• Title/Summary/Keyword: SF1

Search Result 1,178, Processing Time 0.036 seconds

30 um pitch의 Probe Unit용 Slit Etching 공정 및 특성 연구

  • Kim, Jin-Hyeok;Sin, Gwang-Su;Kim, Seon-Hun;Kim, Hyo-Jin;Go, Hang-Ju;Han, Myeong-Su
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.257-257
    • /
    • 2010
  • 디스플레이 산업의 발달로 화상 영상폰, 디지털 카메라, MP4, PMP, 네비게이션, LCD TV등의 가전 제품의 수요증가에 따라 이에 장착되는 LCD 패널의 생산력 향상과 원가 절감을 위한 검사 기술이 요구되고 있다. LCD 검사를 위한 Probe unit은 미세전기기계시스템(MEMS) 공정을 이용하여 제작된다. LCD 검사용 Probe unit는 LCD 가장자리 부분에 전기적 신호(영상신호, 등 기신호, 색상신호)가 인가되도록 하는 수 십 내지 수 백개의 접속 단자가 고밀도로 배치되는데, 이러한 LCD는 제품에 장착되기 전에 시험신호를 인가하여 화면의 불량여부를 검사하기 위한 점등용 부품으로 50 um 이하의 Pin간 거리를 유지하면서 정확한 Pin Alignment를 요구하는 초정밀 부품이다. 본 연구에서는 반도체용 Si wafer에 마스크 공정 및 slit etching 공정을 적용하여 목표인 30 um pitch의 Probe unit을 개발하기 위해 Deep Si Etching(DRIE) 장비를 이용하여 식각 공정에 따른 특성을 평가하였다. 마스크 공정은 500 um 두께의 양면 연마된 반도체용 Si wafer를 이용하였으며, thick PR을 사용하여 마스킹하여 식각공정을 수행하였다. Si 깊은 식각은 $SF_6$ 가스와 Passivation용으로 $C_4F_8$ 가스를 교대로 사용하여 수직방향으로 깊은 식각이 이루어지는 원리이다. SEM 측정 결과 30 um pitch의 공정 목표에 도달하였으며, 식각공정 결과 식각율 6.2 um/min, profile angle $89.1^{\circ}$로 측정되었다. 또한 상부 에칭공정과 이면 에칭공정에서 폭과 wall의 간격이 동일하였으며, 완전히 관통된 양면식각이 이루어졌음을 확인하였다. 또한 실제 사용되는 probe unit의 조립에 적합한 slit 공정을 위한 에칭특성을 조사하였다.

  • PDF

Si Deep Etching Process Study for Fine Pitch Probe Unit

  • Han, Myeong-Su;Park, Il-Mong;Han, Seok-Man;Go, Hang-Ju;Kim, Hyo-Jin;Sin, Jae-Cheol
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.296-296
    • /
    • 2012
  • LCD panel 검사를 위한 Probe unit은 대형 TV 및 모바일용 스마트폰을 중심으로 각광을 받고 있는 소모성 부품으로 최근 pitch의 미세패턴화가 급속히 진행되고 있다. 본 연구에서는 Slit Wafer 제작 공정을 최적화하기 위해 25 um pitch의 마스크를 설계, 제작하였다. 단공과 장공을 staggered 형태로 배열하여 25 um/25 um line/space pitch로 설계하였다. 또한 단위실험을 위해 직접 25 um pitch로 설계하여, 동일한 실험조건을 적용하여 최적 조건을 찾고자 하였다. 반응변수는 Etch rate 및 profile angle로 결정하였으며, 약 200~400 um 에칭된 slit의 상단과 하단의 폭, 그리고 식각깊이를 SEM 측정사진을 통해 정한 후 etch rate 및 profile angle을 결정하였다. 인자는 식각속도 및 wall의 각도를 결정하는 식각 및 passivation 가스의 유량, chamber 압력(etching/passivation), 식각시간 등으로 정하였으며, 이들의 최대값과 최소값 2 수준으로 실험계획을 설계하였다. 식각 조건에 따라 8회의 실험을 수행하였다. 가스의 유량은 SF6 400 sccm, C4F8 400 sccm, 식각 싸이클 시간은 5.2~10.4 sec, passivation 싸이클시간 4 sec로 하였으며, 압력은 식각시 7.5 Pa, passivation 시 10 Pa로 할 경우가 가장 sharp하게 나타났다. Coil power 와 platen power는 각각 2.6 KW, 0.14 KW로 하였으며, 최적화를 위한 인자의 값들은 이 범위에서 조절하였다. 이러한 인자의 조건 조절을 통해 etch rate는 5.6 um/min~6.4 um/min, $88.9{\sim}89.1^{\circ}$의 profile angle을 얻을 수 있었다.

  • PDF

Reliability and Validity of Patient Oriented Eczema Measure (POEM) Korean Version

  • Kim, Yoon-Ha;Han, Jong-Min;Jung, In-Chul;Kang, Weechang;Park, Yang-Chun
    • The Journal of Korean Medicine
    • /
    • v.37 no.4
    • /
    • pp.22-29
    • /
    • 2016
  • Objectives: We developed a Korean translation of this questionnaire by sequential forward-and-backward translation. The purpose of this study is to validate the Korean version of the POEM, the "POEM-K" by Korean patients with atopic dermatitis (AD). Methods: A single-center prospective study was conducted with 50 participants diagnosed with AD. The POEM was translated to Korean version by an expert panel. Scoring Atopic Dermatitis (SCORAD) and Short Form 36 Health Survey (SF-36) were used as external comparators. Results: Twenty men and thirty women between the ages of 18 and 63 participated in the study. The test-retest reliability of the total POEM-K was estimated using the intra-class correlation coefficient (ICC) that showed a strong agreement (ICC = 0.72). By using Pearson correlation coefficients, we compared the POEM-K to SCORAD and yielded a concurrent validity that showed a significant result. The responsiveness of the POEM-K was represented by the effect size (ES) of 1.41 and statistically significant (p = 0.004). Conclusions: The Korean version of the POEM is a reliable, valid, and responsive disease-specific questionnaire for assessing the symptoms and quality of life of Korean patients with AD.

Comparison of Health Status and Sleep Patterns between Shift Workers and Non-shift Workers in Manufacturing Plants (사업장 교대근무자와 비교대근무자의 수면문제와 건강상태 비교)

  • Kim, Eun Joo;Kim, Myung Ae;Kyeun, kyeng
    • Korean Journal of Occupational Health Nursing
    • /
    • v.17 no.1
    • /
    • pp.45-54
    • /
    • 2008
  • Purpose: This study was conducted to compare and estimate sleep patterns and health status of the shift and non-shift factory workers. Methods: The subjects of this study were 290 male workers in 13 companies, which manufacture automobile parts in Daegu, Korea. Survey data were collected from March 5th, 2007 to April 5th, 2007. PSQI was scored to check the quality of sleep, ESS for excessive daytime sleep disorder, ISI for insomnia, and SF-36 for health status. The data were analyzed by $X^2$ and t-test using SPSS 12.0 for windows. Results: There was a difference in quality of sleep patterns between shift and non-shift workers (p=.033). A difference in the pattern of excessive daytime sleep (P=.005) and in the degree of insomnia (p=.030) were observed between the two groups. However, there were no significant difference in health status between the two groups. Conclusion: Based on these results, shift workers are in need of careful and continuous monitoring regarding sleep disorders and we need to develop health promotion programs including sleep hygiene for shift workers.

  • PDF

Health Behaviors by Job Stress Level in Large-Sized Company with Male and Female Workers (대규모 사업장 남녀 근로자의 직무스트레스 수준에 따른 건강행태)

  • Park, Hyun-Ju;Jung, Hye-Sun
    • Journal of Korean Academy of Nursing
    • /
    • v.40 no.6
    • /
    • pp.852-862
    • /
    • 2010
  • Purpose: This study was done to investigate differences in health behaviors by job stress level in male and female workers in a large-sized company. Methods: Participants were 576 male and 228 female workers who completed questionnaires. Job stress was measured using the 'Short Form Korean Occupational Stress Scale (SF-KOSS)'. Health behaviors included smoking, alcohol consumption, regular exercise, and diet. Frequency, mean, SD, chi-square test, and multivariate logistic regression using SAS version 9.1 were used to analyze data. Results: Smoking, drinking and regular exercise rates were not different by job stress level in male or female workers. Only regular diet was significantly different by job stress level in male and female workers. From multivariate analysis, the alcohol consumption rates for female workers differed by marital status. Regular exercise rate was significantly related to age for male workers and type of employment for female workers. After adjusting for demographic and work-related characteristics, regular diet significantly differed by shift work for male workers and marital status and shift work for female workers. Conclusion: The findings of the study indicate that nursing interventions should be developed to manage job stress to improve diet habits for male and female workers in large-sized companies.

Multiple-Relay-Assisted Spectral Efficient OFDMA Transmission System with Simple Channel Cyclicity Restoration (간단한 채널 주기성 복원이 포함된 다중 중계기 기반의 주파수 효율적인 OFDMA 전송 시스템)

  • Won, Hui-Chul
    • Journal of Korea Society of Industrial Information Systems
    • /
    • v.20 no.6
    • /
    • pp.1-10
    • /
    • 2015
  • In this paper, we propose a spectral efficient orthogonal frequency division multiple access(OFDMA) transmission system using multiple relays for a shadow area. The performance of the proposed OFDMA system in a shadow area can be improved by applying space-frequency(SF) block code over relaying multi-path channels. A simple channel cyclicity restoration method is also added in the proposed OFDMA system without cyclic prefix(CP) to recover the destruction of channel cyclicity due to the lack of CP. Simulation results show that the proposed OFDMA system without CP is almost same as that of the conventional OFDMA system with sufficient CP, which increases the spectral efficiency of the system.

An Evaluation of the Visiting Nursing Service Model Based on the District Management System - focused on stroke patients - (대도시지역 동단위 지역담당 방문간호소서비스 효과분석 - 뇌졸중 환자를 대상으로 -)

  • Ryu, Ho-Shin;Hwang, Rah-Il;Jin, Dal-Rae;Suk, Min-Hyun
    • Research in Community and Public Health Nursing
    • /
    • v.16 no.1
    • /
    • pp.5-12
    • /
    • 2005
  • Purpose: This study was conducted to examine the effect of visiting nursing of the visiting nursing services based on the district management system on the subjects of stroke patients. Method: A nonequivalent control group pretest-posttest design was applied to 50 stroke patients (31 from the experimental group, 19 from the control group). To evaluate the effects of visiting nursing services. health status(SF-36) and activity daily living(ADL/IADL) were measured from June 2003 to November 2004. Result: Health condition and the activities of daily living (ADL/IADL) of the subjects who received visiting nursing service were shown to be improved. Conclusion: Visiting health service model based on the district management system in public health center is considered to be an effective measure of visiting nursing services in large cities.

  • PDF

An Experimental Study on the Ready-mixed concrete Production of Ultra-High Strength Concrete with Mixing Strength of $100N/mm^2$ (배합강도 $100N/mm^2$인 초고강도 콘크리트의 레미콘 생산성에 관한 실험적 연구)

  • Jung Jin;Jin Yong-Man;Kang Hoon;Lee Sang-Soo
    • Proceedings of the Korea Concrete Institute Conference
    • /
    • 2004.11a
    • /
    • pp.759-764
    • /
    • 2004
  • In this study, the experiment was carried out to investigate and analyze the ready-mixed concrete production of ultra-high strength concrete with mixing strength of $100N/mm^2$ according to types of mineral admixtures. The main experimental variables were water/binder ratio $25.0\%$, water content $160kg/m^3$ and mineral admixtures such as fly ash, silica fume and meta kaolin. According to the test results, the principle conclusions are summarized as follows. 1) even if it secures similar slump, the viscosity appear to difference by mixing condition relatively. 2) The autogeneous shrinkage of ultra-high strength concrete is profitable that use admixture, and heat of hydration is desirable that apply considering countermeasure enough in the advance. 3) The concrete that use SF10+MK10 on 56days could confirm that it is possible that achieve compressive strength more than $100N/mm^2$ under mixing conditions that is appearing by compressive strength $102.7N/mm^2$.

  • PDF

Surface Flashover Characteristics on Poor Contact in N2/O2 Mixture Gas under Non-Uniform Field (불평등 전계 중 불량 접촉갭에 관한 N2/O2 혼합가스의 연면플래쉬오버특성)

  • Lim, Dong-Young;Choi, Eun-Hyeok;Choi, Sang-Tae;Choi, Byoung-Ju;Lee, Kwang-Sik;Bae, Sungwoo
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.29 no.8
    • /
    • pp.63-69
    • /
    • 2015
  • This paper presents the surface flashover characteristics to simulate the poor contact between an anode and a solid dielectric in a $N_2/O_2$ mixture gas (8/2) under a non-uniform field. The surface flashover voltage of the $N_2/O_2$ mixture gas revealed the irregular tendency that was not in accordance with the Paschen's law with an increasing gap of the poor contact. In addition, the insulation performance of the $N_2/O_2$ mixture gas at 0.6MPa was comparable to that of $SF_6$ gas of 0.1MPa based on the insulation performance on the poor contact. These results are able to apply the insulation design of eco-friendly gas insulation switchgear considering the internal faults.

The Effect of Intradermal Acupuncture on Three Patients with Pain : 3 Cases Report (피내침 요법을 적용한 통증 환자 치험 3례)

  • Kim, Ji-Young;Kim, Soon-Joong;Jeong, Su-Hyeon
    • Korean Journal of Acupuncture
    • /
    • v.29 no.1
    • /
    • pp.109-116
    • /
    • 2012
  • This study was performed to evaluate the effects of intradermal acupuncture on patients with pain. Three patients suffered from shoulder pain, low back pain, and wrist pain. Each were treated with intradermal acupuncture and outcomes were measured by McGill pain questionnaire-short form, visual analongue scale and pain rating score. After intradermal acupuncture treatments, we found recovery from three patients who suffered from pain. Through this study, we suggest that intradermal acupuncture treatment is effective to cure patients with pain. Futher on, well-designed, controlled studies and more cases are needed to define the effect of intradermal acupuncture for patients with pain.