• Proceedings of the Korean Environmental Sciences Society Conference
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• 2018.10a
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• pp.106-106
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• 2018

• Journal of the Korean Society of Urban Environment
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• v.18 no.4
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• pp.523-530
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• 2018

Kyoto Protocol, adopted in 1997, set the obligation to reduce $CO_2$, $CH_4$, $N_2O$, HFCs, PFCs, and $SF_6$ in developed countries during 1st promised period. $SF_6$ has been drawing a lot of attention since the Kyoto Protocol because once it is released into the atmosphere, it not only stays in the atmosphere for more than 3,200 years but also emits 22,800 times stronger global warming potential at the same concentrations as $CO_2$ if remains in the atmosphere for 100 years. This study introduces 12 methods for $SF_6$ of measuring trace. $SF_6$ of trace level in the atmosphere correctly, the measurement method was changed and as a result, when the back flush method was applied to the pre-concentration system that used low-temperature concentration and high-temperature desorption system, which used Carboxen-1000 adsorption trap, the effect was the best.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.21 no.9
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• pp.18-24
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• 2007

When faults occur in the power equipment that is used a great deal in industrial sites, it may lead to fatal accidents that cause losses both economically and in manpower. In this paper, the effect of particle impact on the partial discharge of $SF_6$ gas was measured by simulating a partial discharge following the type of fault found in the GIS using $SF_6$ insulating gas as the insulating material. A spectrum analysis was performed on the radiate electromagnetic waves emitted upon partial discharge by using the UHF insulation diagnosis method. This subject of this study is insulation diagnosis by the measurement of radiate electromagnetic waves when particles exist in the GIS and power equipment insulated with $SF_6$ gas.

• Journal of Electrical Engineering and Technology
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• v.2 no.2
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• pp.257-262
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• 2007

In this paper the experiments of breakdown characteristics by temperature change of $SF_6$ gas($GSF_6$), and $SF_6$ liquid ($LSF_6$) in model GIS (Gas Insulated Switchgear) are described. From the experiment's results, the breakdown characteristics classify the vapor stage of $SF_6$ according to Paschen's law, in which the gas & liquid coexisted stage of voltage value increases, resulting in much deviation and the breakdown of voltage ($V_B$) low stage as the interior of the chamber gets filled with a mixture of $SF_6$ that is not liquefacted and remaining air that cannot be ventilated. The ability of $LSF_6$ insulation is higher than the high-pressurized $SF_6$ gas. The breakdown characteristics of $LSF_6$ were produced by bubble formed evaporation of $LSF_6$ and bubbles caused by high electric emission. It is considered in this paper that the results are fundamental data for electric insulation design of superconductor and cryogenic equipments machinery that will be studied and developed in the future.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.105-108
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• 1995

The inter-metal dielectric SiOF films were fabricated using remote plasma-enhanced chemical vapour deposition with addition of SF$\sub$6/ gas. SiOF bond formation in these films was recognized by a chemical bonding structural study using FT-IR. The deposition rate and the dielectric constant of a deposited films were decreased with increasing SF$\sub$6/ gas. It was observed that leakage current of SiOF film was reduced the one order compared to a film without addtion of SF$\sub$6/ gas.

• Journal of computational fluids engineering
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• v.2 no.1
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• pp.109-116
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• 1997

The objective of this paper is to develop a computational model for the prediction of the pollutant spread from a mass source over a complex terrain. The model comprises a two-dimensional, steady state flow model and a concentration model which employs the results of the computed flow field. The computational model is applied to predict the spread of pollutants for Sanbon city, and the two cases have been compard with the results of SF/sub 6/ trace experiments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.413-417
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• 1997

In this study, chlorine(Cl)-based gas chemistry is generally used to etching for AlCu films metallization. The corrosion phenomena of AlCu films were examined with XPS (X-ray photoelectron spectroscopy), SEM (Scanning electron microscopy), and TEM (Transmission electron microscopy). SF$\sub$6/ plasma treatment subsequent to the etch process prevents the corrosion effectively in the pressure of 300 mTorr. It is found that the chlorine atoms on the etched surface are not substituted for fluorine atoms during SF$\sub$6/ treatment, but a passivation layer on the surface by fluorine-related compounds would be formed. The passivation layer prevents the moisture penetration on the SF$\sub$6/ treated surface and suppresses the corrosion successfully.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.4
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• pp.238-243
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• 2014

This paper dealt with the measurement and analysis of partial discharge (PD) under high voltage direct current (HVDC) in SF6 gas. Electrode systems such as a protrusion on conductor (POC), a protrusion on enclosure (POE), a crack on epoxy plate and a free particle (FP) were fabricated to simulate the insulation defects. The analysis system was designed with a Time-Frequency (T-F) map algorithm programed based on LabVIEW. This can arrange the acquired PD pulses into frequency and time domain. A HVDC power source is composed of a transformer (220 V/50 kV), a diode (100 kV) and a capacitor (50 kV, 0.5 ${\mu}F$). The gap between the electrodes is 3 mm, and the $SF_6$ gas was set at 5 bar. PD pulses were detected by a 50 ${\Omega}$ non-inductive resistor. In the analysis, PD pulses were distributed below 0.5 MHz and 20 ns ~ 35 ns for the POC, 0.7 MHz ~ 1.7 MHz, below 0.6 MHz and 10 ns ~ 40 ns and 60 ns ~125 ns for the POE, below 0.1 MHz and 135 ns ~ 215 ns for the crack, and below 1.6 MHz and 250 ns for the FP.

• Membrane Journal
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• v.26 no.2
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• pp.159-165
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• 2016

Polyimide hollow fiber membrane modules were prepared in order to investigate the process of multi stage gas separation. The modules performance was carried out using 50/50 of $N_2/SF_6$ mixed gas. The membrane modules has been tested for measuring gas flow rate and concentration under various stage cut at 0.5 MPa. The membrane modules showed a high recovery ratio at the same stage cut as $N_2/SF_6$ selectivity increased. Two stage process was fulfilled for improving $SF_6$ recovery ratio and $SF_6$ concentration. Eventually, two stage process showed higher performance of $SF_6$ recovery ratio and concentration ($SF_6$ recovery ratio = 95%, $SF_6$ conc. = 98%).