• Title/Summary/Keyword: SEM scan

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GaN epitaxy growth by low temperature HYPE on $CoSi_2$ buffer/Si substrates (실리콘 기판과 $CoSi_2$ 버퍼층 위에 HVPE로 저온에서 형성된 GaN의 에피텍셜 성장 연구)

  • Ha, Jun-Seok;Park, Jong-Sung;Song, Oh-Sung;Yao, T.;Jang, Ji-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.4
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    • pp.159-164
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    • 2009
  • We fabricated 40 nm-thick cobalt silicide ($CoSi_2$) as a buffer layer, on p-type Si(100) and Si(111) substrates to investigate the possibility of GaN epitaxial growth on $CoSi_2$/Si substrates. We deposited GaN using a HVPE (hydride vapor phase epitaxy) with two processes of process I ($850^{\circ}C$-12 minutes + $1080^{\circ}C$-30 minutes) and process II ($557^{\circ}C$-5 minutes + $900^{\circ}C$-5 minutes) on $CoSi_2$/Si substrates. An optical microscopy, FE-SEM, AFM, and HR-XRD (high resolution X-ray diffractometer) were employed to determine the GaN epitaxy. In case of process I, it showed no GaN epitaxial growth. However, in process II, it showed that GaN epitaxial growth occurred. Especially, in process II, GaN layer showed selfaligned substrate separation from silicon substrate. Through XRD ${\omega}$-scan of GaN <0002> direction, we confirmed that the combination of cobalt silicide and Si(100) as a buffer and HVPE at low temperature (process II) was helpful for GaN epitaxy growth.

Laser induced dry etching of GaAs (레이저유기에 의한 GaAs의 건식에칭)

  • Park, Se-Ki;Lee, Choen;Choi, Won-Chel;Kim, Moo-Sung;Min, Suk-Ki;Ahn, Byung-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.05a
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    • pp.58-61
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    • 1995
  • Instead of using CCl$_4$CCl$_2$F$_2$ gases, we used a alternative reaction gas of CFCs which we have developed, for the experiment of laser induced dry etching of laser induced dry etching of GaAs, and compared with the etch profile of a usual reation gas. Laser powers(power density) on the sample surface were varied from 100 mW(12.7 MW/$\textrm{cm}^2$) to 210mW(27 MW/$\textrm{cm}^2$) The laser beam was scanned over the sample by moving the cell with a speed raging from 8.3$\mu\textrm{m}$/sec and the gas pressure also was varied form 260 Torr to 760 Torr, High etching rates up to 136 $\mu\textrm{m}$/sec and an aspect ratio of 2.6 have been achieved by single scan of laser beam. The chemical compositions of the reaction products deposited on the etched groove were measured by Auger electron spectroscopy(AES) Etch profiles, including depth and width were observed by scanning electron microscopy(SEM)

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Study on the Annealing Effect and Magnetic Properties of a Zn0.7Mn0.3O Film (열처리 효과에 따른 Zn0.7Mn0.3O박막의 자기 특성 연구)

  • Kim, Y.M.;Kim, Y.;Yoon, M.;Park, C.S.;Lee, Y.S.;Jeon, M.S.;Park, I.W.;Park, Y.J.;Lyou, Jong H.;Kim, S.S.
    • Journal of the Korean Magnetics Society
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    • v.13 no.4
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    • pp.155-159
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    • 2003
  • We report on the annealing effect and ferromagnetic characteristics of Zn$_{0.7}$Mn$_{0.3}$O film prepared by sol-gel method on the silicon (100) substrate using field emission-scanning electron microscopy (FE-SEM), energy dispersive spectroscopy (EDS), X-ray diffractometry (XRD) and superconducting quantum interference device (SQUID) magnetometry. Magnetic measurements show thatZn$_{0.7}$Mn$_{0.3}$O films exhibit ferromagnetism at 5 K revealing the coercive field of ∼110 Oe for as grown sample and 360, 1035 Oe for samples annealed at 700, 800 $^{\circ}C$, respectively. Our experimental evidence suggests that ferromagnetic precipitates of a manganese oxide may be responsible for the observed ferromagnetic behaviors of the film.he film.

Electrochemical Characteristics of an Electric Double Layer Supercapacitor Electrode using Cooked-Rice based Activated Carbon (쌀밥으로 제조된 활성탄을 사용하는 전기이중층형 슈퍼커패시터 전극의 전기화학적 특성)

  • Jo, Un;Kim, Yong-Il;Yoon, Jae-Kook;Yoo, Jung-Joon;Yoon, Ha-Na;Kim, Sung-Soo;Kim, Jong-Huy
    • Journal of the Korean Electrochemical Society
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    • v.16 no.3
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    • pp.129-137
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    • 2013
  • From the cooked-rice as a raw material, activated carbons throughout a hydrothermal synthesis and vacuum soak of KOH for chemical activation were obtained. Activated carbon electrodes for electric double layer supercapacitors were prepared and electrochemical characteristics were examined. Including the specific surface area by BET method and pore size distribution by NLDFT method, physical properties of activated carbons were investigated by means of SEM, EDS, XRD, and TG analyses. Cycle voltammetry and AC-impedance measurements were conducted to confirm the electrochemical characteristics for the electrodes. From hydrothermal synthesis, $5{\sim}7{\mu}m$ diameters of spherical carbons were obtained. After the activation at $800^{\circ}C$, it was notable for the activated carbon to be the specific surface $1631.8cm^2/g$, pore size distribution in 0.9~2.1 nm, and micro-pore volume $0.6154cm^3/g$. As electrochemical characteristics of the activated carbon electrode in 6M KOH electrolyte, it was confirmed that the specific capacitances of 236, 194, and 137 F/g at the scan rate of 5, 100, and 500 mV/s respectively were exhibited and 91.2% of initial capacitance after 100,000 cycles at 200 mV/s was maintained.

EFFECTS OF SURFACE ROUGHNESS AND MULTILAYER COATING ON THE CORROSION RESISTANCE OF Ti-6Al-4V ALLOY

  • Ko, Yeong-Mu;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.10a
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    • pp.134-135
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    • 2003
  • The dental implant materials required good mechanical properties, such as fatigue strength, combined with a high resistance to corrosion. For increasing fatigue resistance and delaying onset of stress corrosion cracking, shot peening has been used for > 50 years to extend service life of metal components. However, there is no information on the electrochemical behavior of shot peened and hydroxyapatite(HA) coated Ti-6Al-4V alloys. To increase fatigue strength, good corrosion resistance, and biocompatibility, the electrochemical characteristics of Ti/TiN/HA coated and shot peened Ti-6Al-4V alloys by electron beam physical vapor deposition(EB-PVD) have been researched by various electrochemical method in 0.9%NaCl. Ti-6Al-4V alloys were prepared under the condition of hydrogen and vacuum arc furnace. The produced materials were quenched at 1000$^{\circ}C$ under high purity dried Ar atmosphere and were hold at 500$^{\circ}C$ for 2 hrs to achieve the fatigue strength(1140㎫) of materials. Ti-6Al-4V alloys were prepared under the condition of hydrogen and vacuum arc furnace. Shot peening(SP) and sand blasting treatment was carried out for 1, 5, and 10min. On the surface of Ti-6Al-4V alloys using the steel balls of 0.5mm and alumina sand of 40$\mu\textrm{m}$ size. Ti/TiN/HA multilayer coatings were carried out by using electron-beam deposition method(EB-PVD) as shown Fig. 1. Bulk Ti, powder TiN and hydroxyapatite were used as the source of the deposition materials. Electrons were accelerated by high voltage of 4.2kV with 80 - 120mA on the deposition materials at 350$^{\circ}C$ in 2.0 X 10-6 torr vacuum. Ti/TiN/HA multilayer coated surfaces and layers were investigated by SEM and XRD. A saturated calomel electrode as a reference electrode, and high density carbon electrode as a counter electrode, were set according to ASTM GS-87. The potentials were controlled at a scan rate of 100 mV/min. by a potentiostat (EG&G Co.273A) connected to a computer system. Electrochemical tests were used to investigate the electrochemical characteristics of Ti/TiN/HA coated and shot peened materials in 0.9% NaCl solution at 36.5$^{\circ}C$. After each electrochemical measurement, the corrosion surface of each sample was investigated by SEM.

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Surface Characteristics and Micro-Scale Friction Property of Natural Surface (식물잎의 표면형상 및 마이크로-스케일에서의 마찰 특성)

  • Yoon, Eui-Sung;Kim, Hong-Joon;Singh R. Arvind;Kim, Jin-Seok
    • Tribology and Lubricants
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    • v.22 no.5
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    • pp.237-242
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    • 2006
  • Surfaces found in nature, including biological surfaces have been providing inspiration to modify/fabricate artificial surfaces as solutions for tribological applications. As an example, the concept of 'lotus-effect' has motivated tribologists world wide to modify/fabricate surfaces for enhanced tribological performance. These was done by creating nano/micro-scale asperities on various surfaces using ion beam milling and ion-beam assisted roughening. In order to understand the attributes of natural surfaces, which are inspirational to tribologists, we characterized the surface of two natural surfaces-Nelumbo nucifera (lotus) and Colocasia esculenta leaves. Further, we evaluated their micro-scale friction property, both in their fresh and dried conditions. The characterization of surfaces was conducted using a confocal microscope and SEM, which involved the evaluation of size and distribution of protuberances. The micro-scale friction property was evaluated using a ball-on-flat type micro-tribo tester, under reciprocating motion. A soda lime glass ball (2 mm diameter) was used in these tests. Tests were conducted at the applied normal load of $3000{\mu}N$, at a sliding speed of 1 mm/sec for a scan length of 3 mm. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C}$) and relative humidity ($45{\pm}5%$). It was observed that the friction behaviour of the natural surfaces was influenced by their surface characteristics (morphology and distribution of protuberances) and also by the condition (fresh or dried) in which they were tested.

Synthesis and Electrochemical Characterization of Porous Co3O4/RuO2 Composite (다공성 Co3O4/RuO2 복합체 합성 및 전기화학적 특성)

  • Lim, Hye-Min;Ryu, Kwang-Sun
    • Korean Journal of Materials Research
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    • v.22 no.3
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    • pp.118-122
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    • 2012
  • We synthesized porous $Co_3O_4/RuO_2$ composite using the soft template method. Cetyl trimethyl ammonium bromide (CTAB) was used to make micell as a cation surfactant. The precipitation of cobalt ion and ruthenium ion for making porosity in particles was induced by $OH^-$ ion. The porous $Co_3O_4/RuO_2$ composite was completely synthesiszed after anealing until $250^{\circ}C$ at $3^{\circ}C$/min. From the XRD ananysis, we were able to determine that the porous $Co_3O_4$/RuO2 composite was comprised of nanoparticles with low crystallinity. The shape or structure of the porous $Co_3O_4/RuO_2$ composite was studied by FE-SEM and FE-TEM. The size of the porous $Co_3O_4/RuO_2$ composite was 20~40 nm. From the FE-TEM, we were able to determine that porous cavities were formed in the composite particles. The electrochemical performance of the porous $Co_3O_4/RuO_2$ composite was measured by CV and charge-discharge methods. The specific capacitances, determined through cyclic voltammetry (CV) measurement, were ~51, ~47, ~42, and ~33 F/g at 5, 10, 20, and 50 mV/sec scan rates, respectively. The specific capacitance through charge-discharge measurement was ~63 F/g in the range of 0.0~1.0 V cutoff voltage and 50 mAh/g current density.

ON THE SURFACE CHARACTERISTICS AND STABILITY OF IMPLANT TREATED WITH ANODIZING OXIDATION (양극산화 처리한 임플랜트의 표면 특성 및 골유착 안정성에 관한 연구)

  • Kim, Won-Sang;Cho, In-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.44 no.5
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    • pp.549-560
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    • 2006
  • Purpose : This experiment examined the effects of anodization on commercially pure titanium implant fixtures. Material & methods : The implant fixtures were anodized at three different voltage levels, producing three different levels of oxidation on the surface of the fixure. Implant were divided into four groups according to the level of oxidation. Group 1 consist of the control group of machined surface implants, Group 2 implants were treated by anodizing to 100 voltage, Group 3 implants were treated by anodizing oxidation to 200 voltage Group 4 implants were treated by anodizing oxidation to 350 voltage. Surface morphology was observed by Scanning Electron Microscope(SEM) and the surface roughness was measured using NanoScan $E-1000^{\circledR}$. Implantation of the fixtures were performed using New Zealand white rabbits. $Periotest^{\circledR}$ value(PTV) resonance frequency analysis(RFA), and removal torque were measured in 0, 2, 4, 8, 12 weeks after implantation. Results : The results of the study were as follows: 1. Values for the measured surface roughness indicate statistically significant differences in Ra, Rq, and Rt values among group 1, 2, 3, and 4 at the top portion of the thread,(p<0.05) while values at the base of the threads indicated no significant difference in these values. 2. A direct correlation between the firming voltage, and surface roughness and irregularities were observed using scanning electron microscope. 3. No statistically significant differences were found between test groups regarding $Periotest^{\circledR}$ values. 4. Analysis of the data produced by RFA, significant differences were found between group 1 and group 4 at 12 weeks after implantation.(p<0.05) Conclusions : In conclusion, no significant differences could be found among test groups up to a certain level of forming voltage threshold, beyond this firming voltage threshold, statistically significant differences occurred as the surface area of the oxide layer increased with the increase in surface porosity, resulting in enhanced bone response and osseointegration.

Effect of Zn Content on the Corrosion Behavior of Ti-6Al-4V Alloy after Plasma Electrolytic Oxidation

  • Hwang, In-Jo;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.159-159
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    • 2017
  • Ti-6Al-4V alloy have been used for dental implant because of its excellent biocompatibility, corrosion resistance, and mechanical properties. However, the integration of such implant in bone was not in good condition to achieve improved osseointergraiton. For solving this problem, calcium phosphate (CaP) has been applied as coating materials on Ti alloy implants for hard tissue applications because its chemical similarity to the inorganic component of human bone, capability of conducting bone formation and strong affinity to the surrounding bone tissue. Various metallic elements are known to play an important role in the bone formation and also affect bone mineral characteristics. Especially, Zn is essential for the growth of the human and Zn coating has a major impact on the improvement of corrosion resistance. Plasma electrolytic oxidation (PEO) is a promising technology to produce porous and firmly adherent inorganic Zn containing TiO2(Zn-TiO2)coatings on Ti surface, and the a mount of Zn introduced in to the coatings can be optimized by altering the electrolyte composition. In this study, effect of Zn content on the corrosion behavior of Ti-6Al-4V alloy after plasma electrolytic oxidation were studied by SEM, EDS, XRD, AC impedance, and potentiodynamic polarization test. The potentiodynamic polarization and AC impedance tests for corrosion behaviors were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67 mV/s and potential range from -1500 mV to +2000 mV. Also, AC impedance was performed at frequencies ranging from 10 MHz to 100 kHz for corrosion resistance.

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Corrosion Charateristics of PEO-treated Ti-6Al-4V Alloy in Solution Containing Si and Mg Ions

  • Park, Seon-Yeong;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.153-153
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    • 2017
  • The application of the coating supports the mechanical characteristics of the implant, and various materials and coatings are currently being used in the implant in a way to accelerate adhesion. Especially, plasma electrolytic oxidation (PEO) coating has been proposed continually with good surface treatment of titanium alloys. Also, the PEO process can incorporate Ca and P ions on the titanium surface through variables varied factor. PEO process for bioactive surface has carried out in electrolytes containing Ca and P ions. Natural bone is composed of mineral elements such as Mg, Si, Zn, Sr, and Mn, etc. Especially, Mg and Si of these elements play role in bone formation and growth after clinical implantation of bio-implants. In this study, corrosion charateristics of PEO-treated Ti-6Al-4V alloy in solution containing Si and Mg ions has been investigated using several experimental techniques. The PEO-treated surfaces were identified by X-ray diffraction, using a diffractometer (XRD, Philips X' pert PRO, Netherlands) with Cu $K{\alpha}$ radiation. The morphology was observed by field-emission scanning electron microscopy (FE-SEM, Hitachi 4800, Japan) and energy-dispersive X-ray spectroscopy (EDX, Oxford ISIS 310, England). The potentiodynamic polarization and AC impedance tests for electrochemical degradations were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV.

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