Microstructure and Electrical Properties of SrBi$_2$ Ta$_2$ O$_9$ Ferroelectric Thin Films Prepared by RF Magnetron Sputtering Method
(R-F magnetron sputtering 법으로 제조된 SrBi$_2$ Ta$_2$ O$_9$ 강유전성 박막의 미세구조 특성 및 전기적 특성)
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- Journal of the Microelectronics and Packaging Society
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- v.6 no.2
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- pp.51-61
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- 1999