• KSII Transactions on Internet and Information Systems (TIIS)
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• 제13권5호
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• pp.2529-2543
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• 2019

Scanning electron microscopy (SEM) image can link with the microscopic world through reflecting interaction between electrons and materials. The SEM images are easily subject to blurring distortions during the imaging process. Inspired by the fact that dark channel prior captures the changes to blurred SEM images caused by the blur process, we propose a method to evaluate the SEM images sharpness based on the dark channel prior. A SEM image database is first established with mean opinion score collected as ground truth. For the quality assessment of the SEM image, the dark channel map is generated. Since blurring is typically characterized by the spread of edge, edge of dark channel map is extracted. Then noise is removed by an edge-preserving filter. Finally, the maximum gradient and the average gradient of image are combined to generate the final sharpness score. The experimental results on the SEM blurred image database show that the proposed algorithm outperforms both the existing state-of-the-art image sharpness metrics and the general-purpose no-reference quality metrics.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.122-128
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• 2007

The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.

• 한국공작기계학회논문집
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• 제12권3호
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• pp.89-95
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• 2003

This research analyzes the cutting mechanism of A1100-H18 of commercially pure aluminum by image processing in SEM(Scanning Electron Microscope) for the measurement of strain rate distribution near a cutting edge in orthogonal micro-cutting. The distribution is measured using various methods in order. The methods are in-situ observations of cutting process in SEM, inputting image data, a computer image processing, calculating displacements by SSDA(Sequential Similarity Detection Algorithm) and calculating strain rates by FEM. The min results obtained are as follows: (1)It enables to measure a microscopic displacement near a cutting edge. (2) An application of this system to cutting process of various materials will help to make cutting mechanism clear.

• 한국진공학회지
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• 제8권3B호
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• pp.315-321
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• 1999

In this paper, the SEM image processing system based on PC is designed, and a new noise reduction filtering algorithm is proposed. The SEM image obtained in semiconductor processing line is sensitive to noise, the weighted-D filter can remove uniform and Gaussian noise effectively, but can not remove impulse noise properly, A new improved filtering algorithm is proposed to reduce mixed-noise. The performance of the proposed filter is quantitatively evaluated by use of the normalized mean square errors (NMSE). The experimental results show that the performance of the proposed filter is obtained between 0.96 and 2.5 times better than that of weighted-D filter in NMSE evaluation.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.28-33
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• 2008

In a scanning electron microscope (SEM), outside acoustic noise causes image noise that distorts observations of the specimen being examined. A SEM that is less sensitive to acoustic noise is highly desirable. This paper investigates the image noise problem by addressing the mode shapes of the base plate and the transmission path of the acoustic noise and vibration. By arranging the position of the rib, a new SEM base plate was developed that had twisting as the 1st and 2nd modes. In those two twisting modes, vibration nodes existed near the center of the base plate where the specimen chamber is placed. Less vibration was transmitted to the chamber and to the specimen by the twisting modes compared to bending ones, which are the 2nd and 3rd modes for a rectangular plain base plate. An SEM with the developed base plate installed exhibited a significant reduction of image noise when exposed to acoustic noises below 250 Hz.

• 한국측량학회:학술대회논문집
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• 한국측량학회 2003년도 춘계학술발표회 논문집
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• pp.151-159
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• 2003

This study presents method for self-calibration of the SEM(Scanning Electron Microscope) stereo image using the standard microprobe with same grid pattern and using parallel and central perspective projection equation. Result showed that parallel projection method is more suitable for standard microprobe. The maximum error of 3D coordinates acquired by this method did not exceed 5 $\mu\textrm{m}$, and DSM(Digital Surface Model) for three dimensional measurement of the rock sample was generated by the digital photogrammetry. This result can be used for quantification of micro scale change of shape and analysis of the micro morphology of rock due to weathering.

• 한국대기환경학회지
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• 제15권2호
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• pp.175-182
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• 1999

Scanning electron microscopy (SEM) has played an important role in receptor modeling area because it is a powerful tool for characterizing individual particles. The purpose of the study was to classify individual diesel particles base on statistical analysis and image analysis by SEM/EDX (energy dispersive x-ray analyser). The diesel particles were sampled by both a modified CVS 75 mode and a high speed mode with a chassis dynamometer. The SEM/EDX system provides various physical parameters including particle's particle diameter and chemical information. Thus density and mass of the diesel particle were estimated cased on its chemical composition and further fractal dimensions of the diesel particle were obtained by the Hurst exponent method. The fractal dimension in the sample of modified CVS 75 mode was higher than the high speed mode. Finally, mass fractions for a diesel vehicle as a source profile were estimated cased on a particle class concept.

• 환경위생공학
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• 제20권3호
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• pp.17-26
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• 2005

Many researches were focused on the data which obtained from chemical bulk analysis. It is difficult to evaluate source contribution by wet type chemical bulk analysis. In this study, we have reviewed the characterization of individual particle for source identification. We analyzed by SEM/EDX methods. We have obtained average geometric particle diameter measured by optical diameter which were resulted from SEM/EDX image scan, representative physical diameter of individual particle was $3.38\;{\mu}m\;in\;A,\;3.67\;{\mu}m\;in\;B$. In the result of image analysis at each spots particles, both samples non-sphere shapes, C-rich particles. In consequence of chemical analysis of individual particle, each sampling sites some elements.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.132-134
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• 2006

To improve equipment throughput and device yield, a malfunction in plasma equipment should be accurately diagnosed. A recognition model for plasma diagnosis was constructed by applying neural network to scanning electron microscope (SEM) image of plasma-etched patterns. The experimental data were collected from a plasma etching of tungsten thin films. Faults in plasma were generated by simulating a variation in process parameters. Feature vectors were obtained by applying direct and wavelet techniques to SEM Images. The wavelet techniques generated three feature vectors composed of detailed components. The diagnosis models constructed were evaluated in terms of the recognition accuracy. The direct technique yielded much smaller recognition accuracy with respect to the wavelet technique. The improvement was about 82%. This demonstrates that the direct method is more effective in constructing a neural network model of SEM profile information.

• 한국공작기계학회논문집
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• 제16권6호
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• pp.153-158
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• 2007

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.