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A Study on the Etching Mechanism of $(Ba, Sr)TiO_3$ thin Film by High Density $BCl_3/Cl_2/Ar$ Plasma ($BCl_3/Cl_2/Ar$ 고밀도 플라즈마에 의한 $(Ba, Sr)TiO_3$ 박막의 식각 메커니즘 연구)

  • Kim, Seung-Bum;Kim, Chang-Il
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.11
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    • pp.18-24
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    • 2000
  • (Ba,Sr)$TiO_3$ thin films have attracted great interest as new dielectric materials of capacitors for ultra-large-scale integrated dynamic random access memories (ULSI-DRAMs) such as 1 Gbit or 4 Gbit. In this study, inductively coupled $BCl_3/Cl_2/Ar$ plasmas was used to etch (Ba,Sr)$TiO_3$ thin films. RF power/dc bias voltage=600 W/-250 V and chamber pressure was 10 mTorr. The $Cl_2/(Cl_2+Ar)$ was fixed at 0.2 the (Ba,Sr)$TiO_3$ thin films were etched adding $BCl_3$. The highest (Ba,Sr)$TiO_3$ etch rate is $480{\AA}/min$ at 10 % $BCl_3$ to $Cl_2/Ar$. The change of Cl, B radical density measured by optical emission spectroscopy(OES) as a function of $BCl_3$ percentage in $Cl_2/Ar$. The highest Cl radical density was shown at the addition of 10% $BCl_3$ to $Cl_2/Ar$. To study on the surface reaction of (Ba, Sr)$TiO_3$ thin films was investigated by XPS analysis. Ion bombardment etching is necessary to break Ba-O bond and to remove $BaCl_2$. There is a little chemical reaction between Sr and Cl, but Sr is removed by physical sputtering. There is a chemical reaction between Ti and Cl, and $TiCl_4$ is removed with ease. The cross-sectional of (Ba,Sr)$TiO_3$ thin film was investigated by scanning electron microscopy (SEM), the etch slope is about 65~70$^{\circ}$.

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A 10b 100MS/s 0.13um CMOS D/A Converter Based on A Segmented Local Matching Technique (세그먼트 부분 정합 기법 기반의 10비트 100MS/s 0.13um CMOS D/A 변환기 설계)

  • Hwang, Tae-Ho;Kim, Cha-Dong;Choi, Hee-Cheol;Lee, Seung-Hoon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.47 no.4
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    • pp.62-68
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    • 2010
  • This work proposes a 10b 100MS/s DAC based on a segmented local matching technique primarily for small chip area. The proposed DAC employing a segmented current-steering structure shows the required high linearity even with the small number of devices and demonstrates a fast settling behavior at resistive loads. The proposed segmented local matching technique reduces the number of current cells to be matched and the size of MOS transistors while a double-cascode topology of current cells achieves a high output impedance even with minimum sized devices. The prototype DAC implemented in a 0.13um CMOS technology occupies a die area of $0.13mm^2$ and drives a $50{\Omega}$ load resistor with a full-scale single output voltage of $1.0V_{p-p}$ at a 3.3V power supply. The measured DNL and INL are within 0.73LSB and 0.76LSB, respectively. The maximum measured SFDR is 58.6dB at a 100MS/s conversion rate.

Algorithms of the VLSI Layout Migration Software (반도체 자동 이식 알고리즘에 관한 연구)

  • Lee, Yun-Sik;Kim, Yong-Bae;Sin, Man-Cheol;Kim, Jun-Yeong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.10
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    • pp.712-720
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    • 2001
  • Algorithms from the research of the layout migration were proposed in the paper. These are automatic recognition algorithm for the VLSI devices from it, graph based construction algorithm to maintain the constraints, dependencies, and design rule between the devices, and high speed compaction algorithm to reduce size of the VLSI area and reuse the design with compacted size for the new technology. Also, this paper describes that why proposed algorithms are essential for the era of the SoC (System on a Chip), design reuse, and IP DB, which are the big concerns in these days. In addition to introduce our algorithms, the benchmark showed that our performance is superior by 27 times faster than that of the commercial one, and has better efficiency by 3 times in disk usage.

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Women's Level of Fatigue after Delivery (산부의 피로정도에 관한 연구)

  • Kim, Sun-Hee
    • Korean Parent-Child Health Journal
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    • v.4 no.1
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    • pp.1-18
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    • 2001
  • Fatigue after delivery affect women's birth experience and interrupt the process of labor. Finally woman cannot have a positive birth result and will experience a postpartum fatigue. But researches about fatigue during the labor are lacked. Nurse help adapting a mother's role, bonding with new baby, recovering after birth, and improving woman's quality of life through decreasing fatigue during the labor and intercepting a continued postpartum fatigue. So it is very important that measuring a fatigue and confirming relationships between fatigue and factors affecting fatigue. The purpose of this study was measuring the level of fatigue within 4hours after delivery and identifing factors affecting fatigue. The ultimate goal was to contribute to improving a birth experience and adapting after birth through decreasing the level of fatigue and interventions. The data was collected for this study at the hospital of two universities and the third hospital in Seoul from Aug. 15. to Nov. 10. 2000. The subjects were 106 of mothers who deliveried a normal newborn and were tested within four hours after birth. The instruments were The Visual Analogue Scale for fatigue, The State Anxiety Inventory, and The Labor Support Inventory. The data were analyzed by using percentage, mean, SD, t-test, ANOVA, Pearson correlation. The results of this study were as follows; (1) The level of fatigue during the labor was 61.48point. (2) The deferences according to general and obstetric character affecting fatigue founded that there were Significant differences according to job(t=2.659, p=0.009), and the type of delivery(t=-2.035, p=0.044). (3) The deferences according to factors affecting fatigue revealed that there was significant difference according to quality of sleep(F=2.935, p=0.037). The significant fatigue and the fatigue after delivery was anxiety(r=0.343, p=0.000). The above findings indicate that the level of fatigue during the labor is higher than during pregnancy and postpartum. Woman having a job, delivering by vacuum was more fatigued. The level of fatigue according to a quality of sleep was significant difference. The poor quality of sleep, higher level of fatigue. And the more anxiety after delivery, the more fatigue. So, the variable nursing interventions for lessening the level of fatigue through appling the situation for rest, relaxation during the labor to reserve energy, and decreasing anxiety should be provided for mothers.

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A Study on the Basic Characteristics of In-situ Soil Flushing Using Surfactant (계면활성제를 이용한 원위치 토양세정 기법 적용을 위한 기초 특성 연구)

  • 최상일;소정현;조장환
    • Journal of Soil and Groundwater Environment
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    • v.7 no.4
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    • pp.87-91
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    • 2002
  • Lab scale batch and column tests were performed to investigate the treatability of petroleum contaminated soil using the in-situ soil flushing method. The pyrex column (4.5$\times$25 cm) was used to investigate optimal washing agent, surfactant concentration, mixing ratio, and inlet velocity. The miked surfactant of $POE_{14}$ and SDS were determined as ideal systems for the batch tests. From the results of preliminary tests, mixed surfactant was found to be more harmful for microorganisms. So $POE_{5}$ and $POE_{14}$ were chosen as the surfactant system for the batch study. The washing efficiency for the diesel contaminated soil was increased until 1 %, and decreased after l %. When applied as selected mixed surfactant, the ideal mixed ratio was recognized as 1:1. Therefore we selected miked surfactant $POE_{5}$ and $POE_{14}$, surfactant concentration 1%, and mixed ratio 1:1 for the remediation of diesel contaminated soil. In column tests, the total removal efficiency was improved as the flux of washing agent was increased. At the same pore volume, small flux showed better removal efficiency.

Correlation of Body Mass Index and Neck Circumference in Patients with Obstructive Sleep Apnea-Hypopnea Syndrome (폐쇄성 수면무호흡 증후군과 목둘레 및 체질량 지수와의 상관성 연구)

  • Kim, Cheon-Sik;Kim, Dae-Sik
    • Korean Journal of Clinical Laboratory Science
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    • v.39 no.2
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    • pp.141-146
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    • 2007
  • Obstructive Sleep Apnea-Hypopnea Syndrome (OSAHS) is a disorder characterized by the repetitive collapse of the pharyngeal airway during sleep, which leads to oxygen desaturation, sleep fragmentation, daytime sleepiness, and increased risk for hypertension and stroke. We investigated the clinical factors related to the severity of OSAHS. Polysomnography was performed in three hundred and ninety five consecutive adult patients with clinical symptoms of obstructive sleep apnea syndrome. All patients completed the sleep questionnaire and the Epworth Sleepiness Scale before polysomnography. Patients were classified into four groups based on the severity of their polysomnographic data: Non-OSA group, characterized by Apnea-Hypopnea Index (AHI) < 5; mild OSA group, by AHI 5-15; moderate OSA group, by AHI 16-30; and severe OSA group, by AHI > 30. Neck circumference was also measured at the cricothyroid level. A total of 395 patients (336 men and 59 women) were studied. In the non-OSA group, there were 55 patients; their mean neck circumference was $39.63{\pm}4.24cm$ and mean BMI was $24.48{\pm}3.53$. In the mild group, there were 101 patients; their mean neck circumference was $41.93{\pm}3.75cm$ and mean BMI was $25.33{\pm}2.94$. In the moderated group, there were 93 patients; their mean neck circumference was $43.27{\pm}3.50cm$ and BMI was $25.90{\pm}2.88$. In the severe group, there were 146 patients; their mean neck circumference was $44.94{\pm}3.93cm$ and mean BMI was $26.81{\pm}3.76$. Men had significantly larger neck circumference than women ($Mean{\pm}SD$, $43.72{\pm}3.83$ vs $39.17{\pm}4.30$, p < 0.001), and higher AHI than women ($29.12{\pm}22.65$ vs $14.63{\pm}14.11$, p < 0.001). Multiple regression analysis revealed that neck circumference was the most significant predictor of AHI. Neck circumference and BMI were positively correlated with the severity of OSAHS. The severity of OSAHS was greater in men than in women.

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Correlates of Self-rated Fatigue in Korean Employees (우리나라 직장인 피로의 역학적 특성)

  • Chang, Sei-Jin;Kang, Myung-Gun;Hyun, Sook-Jung;Cha, Bong-Suk;Park, Jong-Ku;Park, Jun-Ho;Kim, Seong-Ah;Kang, Dong-Mug;Chang, Seong-Sil;Lee, Kyung-Jae;Ha, Eun-Hee;Ha, Mi-Na;Koh, Sang-Baek
    • Journal of Preventive Medicine and Public Health
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    • v.38 no.1
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    • pp.71-81
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    • 2005
  • Objective : To elucidate the correlates of self-rated fatigue in Korean employees. Methods : The data for 10,176 (men, 7,984; women, 2,192; mean age, 34.2; SD: 8.8) employees recruited from a nationwide sample were examined. A structured questionnaire was used to measure the participants' fatigue, sociodemographics (sex, age, education, and marital status), job-related characteristics (work duration, grade at work, work hours, shiftwork, employment type, and magnitude of workplace), and health-related habits (smoking, drinking, coffee intake, and exercise). Two types of measurement for fatigue were used to evaluate the magnitude of fatigue: self-rated question and a standardized measurement tool (Multidimensional Fatigue Scale: MFS). Results : According to the self-rated fatigue, 32% of employees reported that they felt fatigue for the past two weeks, and 9.6% of males and 8.7% of females had experienced excessive fatigue (6 months or more). Hierarchical multiple regression analysis showed that fatigue measured by MFS was more common in women, younger, college or more graduated, single, and employees who do not regularly exercise. Fatigue was also associated with long work hours, and the size of the workplace (<1,000 employees). Conclusions : These results suggest that fatigue has been considered as a common complaint, and that it is affected by job-related factors like work hours and the workplace size as well as sociodemographics or health-related behaviors. Further research is needed to clarify the effects of fatigue on adverse health outcomes, work performance, work disability, sick absence and medical utilization, and to examine the relationship of job characteristics (e.g.: work demand, decision latitude) to fatigue.

Estimating Saturation-paste Electrical Conductivities of Rose-cultivated Soils from their Diluted Soil Extracts (절화장미 재배토양에서 희석된 토양 침출용액으로부터 포화반죽 전기전도도 추정)

  • Lee, In-Bog;Ro, Hee-Myong;Lim, Jae-Hyun;Yiem, Myoung-Soon
    • Korean Journal of Soil Science and Fertilizer
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    • v.33 no.6
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    • pp.398-404
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    • 2000
  • We examined the effect of soil:water ratio on the equivalent concentration of individual electrolyte species and the electrical conductivities (EC) of the diluted extracts of 24 soil samples (loam or silt loam) collected from rose-cultivated plastic houses to estimate the EC of saturated soil-paste extracts (ECe) from diluted soil extracts. With increasing volume ratio of water (higher dilution), the equivalent concentrations of each electrolyte species and their sum increased. The relative contribution to the EC, however, was highest for $NO_3{^-}$, irrespective of soil:water ratio. The measured ECe was 6.36 for loam and $8.09dS\;m^{-1}$ for silt loam soils and the corresponding soil:water ratio was 0.38 and 0.50, respectively. The EC_e estimated from the EC of diluted extracts at 1:1, 1:2, or 1:5 soil:water ratios using their corresponding uniform diluted factors was lower than the measured EC_e and this difference was greater with higher dilution and EC values. Therefore, the alternative diluted factors (y) for each soil: water ratio were obtained following the definition of diluted factor and were correlated significantly with volume ratios of added water (x): y=1.55x+0.5 for loam and y=1.21x+0.48 for silt loam soils. On the other hand, correlation analyses of the EC of soil extracts (y) to the volume ratio of added water (x) on log-log scale yielded linear models: logy = -0.805logx + logb, SD of slope=0.05, b=sample specific constant, n=24). With known saturation percentage of a sample representing a group and and the EC of diluted extract of a given soil, the EC_e could be predicted using the proposed logarithmic equation.

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Effect of Rhythmic Exercise Program to Elderly on Risk Factors of Fall Injury (노인을 대상으로 한 율동 운동 프로그램 실시 효과: 낙상 위험 요인과 관련하여)

  • Lee, In-Sook;Chin, Young-Ran;Lee, Dong-Ok;Kim, Yun-A;Baek, Kyeng-Ae
    • Research in Community and Public Health Nursing
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    • v.12 no.3
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    • pp.600-608
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    • 2001
  • Accidents are the fourth-leading causal factor of death among the elderly, and fall is a major type of accident (53.17%). Many cases of falls in the elderly result in delayed discovery and loss of quality of life. As the number of the elderly grows, falls will be a more important health problem. Most previous research on falls investigated prevalence. mortality, and the related factors. There are many studies proving the effect of rhythmic movements. But few researches considered linking risk factors of fall with rhythmic movements. Purpose: We want to show the changes after performing rhythmic movement program, in risk factors of falls and mobility such as flexibility, balance, muscle power and persistency in the elderly, in order to provide basic information needed for the development of fall injury prevention program for the elderly. Method: The design of this study is quasi-experimental, the equivalent control group, pretest-posttest. The subjects consist of 124 people who lived in Do-Bong-Qu. Seoul, agreed to participate in this study, and were able to follow this rhythmic movement program. About 93 % of them are from 65 to 84 years (Mean${\pm}$sd: $73.7{\pm}5.7$): 64% are female. The rhythmic movement program was designed. and performed by two community health nurses working in the Do-Bong-Gu Public Health Center, regularly twice a week from May, 4 to December, 17. in 10 senior citizens' community centers. Risk factors of fall were measured with RAFS- II (Risk Assessment for Falls Scale II) by asking about each item: mobility was measured by observing their specific movements asked by investigators. Results: 1. After performing the program during 7 months, risk factors score of falls were decreased significantly (paired-t = 4.77. p<0.01). 2. After performing the program during 7 months, flexibility (paired-t = 2.26. p=0.03) and mobility were improved (paired-t = 4.98. p<0.01). but muscle power and persistency did not change (paired-t = 0.33. p=0.74). Overall, mobility affecting the occurrence of falls was improved significantly (paired-t = 5.15. p<0.01). Conclusions: A regular rhythmic movement program can be helpful in preventing falls in the elderly. Further. we can develop a fall injury prevention program using rhythmic movement.

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Health Promotion Lifestyle Profiles of the Korean Elderly in Japan (일본에 거주하는 한국 노인의 건강증진 생활양식)

  • Jaung, Ae-Hwa;Park, Kyung-Min;Ryu, Mi-Kyung
    • Research in Community and Public Health Nursing
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    • v.11 no.2
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    • pp.470-485
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    • 2000
  • The purpose of this study was to investigate health promotion lifestyle profiles of the Korean elderly in Japan. The subjects of this study were 202 elders in Aichi prefecture. The method of this study questionnaires interviews, and a self-administered questionnaire from the 1st to the 20th of April in 2000. This study tool was based on Walker et al. (1987)'s Health Promotion lifestyle Profiles (HPLP). Analysis of the data used an SPSS/pc+ WIN 9.0 program. Data analyses were conducted by using frequency, percentage, t-test, ANOVA. Pearson correlation, Kendal tau and Stepwise Multiple Regression. The results were as follows: 1. The average score of Health Promotion Lifestyle Profiles of Korean elderly in Japan was 2.72(SD=0.40). On the sub-scale of Health Promotion Lifestyle Profiles: nutrition(M = 3. 06), self-actualization(M =2.99), interpersonal support (M=2.81), stress management (M=2.68) revealed higher scores, whereas the scores of health responsibility(M=2.52), and exercise(M=1.92) were lower. 2. Health Promotion Lifestyle Profiles were significantly different by age (F = 11. 02, p = .000), religion(F=2.96, p=.033), occupation(F=6.91, p=.000), living family status(F=13.07, p=.000), living family number(F=11.74, p=.000), monthly pocket money(F=18.79, p=.000), the source of pocket money (F=7.18, p=.000), and the length of residence(F=9.79, p=.000). 3. Health Promotion Lifestyle Profiles was significantly predicted by monthly pocket money($r^2$ change =0. 188, p=.000), sex($r^2$ change= 0.066, p= .000), the length of residence($r^2$ change = 0.059, p = .000), the source of pocket money($r^2$ change=0.036, p= .000), age ($r^2$ change=0.018, p=.000). These variables showed a positive correlation with health promotion lifestyle profiles of the Korean elderly in Japan. These variables explained 36.7% of the variance of Health Promotion Lifestyle Profiles. On the basis of the above findings, Health Promotion Lifestyle Profiles programs for Korean elderly in Japan needs be to developed with Japanese social-culture perspectives and needs to develop an intervention method to improve Health Promotion Lifestyle Profiles. It is also suggested that further research is required.

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