• Title/Summary/Keyword: SCT Thin Film

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Electrical Characteristics of ($Sr_{0.85}Ca_{0.15})TiO_3$ Thin Film by RF Sputtering Method (RF 스퍼터링법에 의한 ($Sr_{0.85}Ca_{0.15})TiO_3$ 박막의 전기적 특성)

  • 장원석;김진사;최운식;김충혁;이준웅
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.11a
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    • pp.239-242
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    • 1998
  • The (S $r_{0.85}$C $a_{0.15}$)Ti $O_3$ (SCT) thin films are deposited on Pt-coated electrode using RF magnetron sputtering method at various substrate temperature. Dielectric constant of SCT thin films is increased with increased as the deposition temperature and changes almost linearly in temperature ranges from -80 to +90[$^{\circ}C$]. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 200[kHz]. V-I characteristics of SCT thin films show the increasing leakage current with the increases of deposition temperature.ure.

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Electrical Properties of SCT Ceramic Thin Film with Top Electrode (상부전극에 따른 SCT 세라믹 박막의 전기적 특성)

  • Cho, C.N.;Kim, J.S.;Shin, C.G.;Choi, W.S.;Kim, C.H.;Park, Y.P.;Yoo, Y.G.;Lee, J.U.
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1501-1503
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    • 1999
  • The $(Sr_{0.85}Ca_{0.15})TiO_3$(SCT) thin films are deposited on Pt-coated electrode$(Pt/TiO_2/SiO_2/Si)$ using RF sputtering method. Ag, Cu, Al, Pt films for the formation of top eletrode were doposited on SCT thin films by thermal evaporator and sputtering. The effects of top electodes have be studied on SCT samples with a variety of top electrode materials.

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Microstructure and Electrical Properties of SCT Ceramic Thin Film (SCT 세라믹 박막의 미세구조 및 전기적 특성)

  • 조춘남;신철기;최운식;김충혁;박용필;이준웅
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.295-299
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    • 1999
  • The (S $r_{1-x}$C $a_{x}$)Ti $O_3$(SCT) thin films are deposited on Pt-coated electrode(Pt/TiN/ $SiO_2$/ Si) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mo1%]. The dielectric constant changes almost linearly in temperature ranges of -80~ +90[$^{\circ}C$]. The temperature properties of the dielectric loss have a stable value within 0.02 independent of the substitutional contents of Ca. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200(kHz).)..

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Microstructure and Dielectric Properties of ($Sr_{1-x}Ca_x)TiO_3$ Ceramic Thin Film by RF Sputtering Method (RF 스퍼터링법에 의한 ($Sr_{1-x}Ca_x)TiO_3$ 세라믹 박막의 미세구조 및 유전특성)

  • 김진사;오재한;이준웅
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.11
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    • pp.984-989
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    • 1998
  • The ($Sr_{1-x}Ca_x)TiO_3$(SCT) thin films are deposited on Pt-coated electrode($Pt/TiN/SiO_2/Si$) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. All SCT thin films had (111) preferred orientation. The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mol%]. The dielectric constant changes almost linearly in temperature ranges of -80~+90[$^{\circ}C$]. The temperature properties of the dielectric loss have a stable value within 0.02 independent of the substitutional contents of Ca. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz].

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Fabrication and Properties of SGT thin film by RF Magnetron Sputtering Method (RF 마그네트론 스펴터링법에 의한 SCT 박막의 제초 및 특성)

  • 김진사;백봉현;김충혁;최운식;박용필;박건호;이준웅
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.325-329
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    • 1998
  • In this paper, the (Sr$_{1-x}$ Ca$_{x}$)TiO$_3$(SCT) thin films were deposited at various substrate temperature using RF magnetron sputtering method on optimized Pt-coated electrodes (Pt/TiN/SiO$_2$/Si). An influence of substrate temperature and annealing temperature on the structural and dielectric properties are investigated. The substrate temperature changed from 100[$^{\circ}C$] to 500[$^{\circ}C$] and crystalline SCT thin films were deposited abode 400[$^{\circ}C$]. All thin films had (111) preferred orientation, the (100) oriented films were obtained at the substrate temperature above 400[$^{\circ}C$]. The dielectric constant changes almost linearly in the temperature region of -80~+90[$^{\circ}C$], the temperature characteristics of the dielectric loss exhibited a stable value within 0.1, then not affected by substitutional contents. The capacitance characteristics appears a stable value within $\pm$5[%].

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Properties wRh Ca Substitutional Contents of $SrTiO_{3}$ Ceramic Thin Film ($SrTiO_{3}$ 세라믹 박막의 Ca 치환량에 따른 특성)

  • Kim Jin-Sa;Oh Yong-Cheol;Cho Choon-Nam;Shin Cheol-Gi;Song Min-Jong;Choi Woon-Shik;Park Min-Sun;Kim Chung-Hyeok
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.9
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    • pp.397-402
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    • 2005
  • The ($Sr_{1-x}Ca_x)TiO_3(SCT)$ thin films are deposited on Pt-coated electrode (Pt/TiN/SiO$_{2}$Si) using RF sputtering method with substitutional contents of Ca. The optimum conditions of RF power and Ar/O$_{2}$ ratio were 140(W) and 80/20, respectively. Deposition rate of SCT thin film was about $18.75{\AA}$/min. The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over $15[mol\%]$. The capacitance characteristics had a stable value within $\pm4[\%]$ in temperature ranges of $-80\~+90[^{\circ}C]$. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz].

Properties with Ca Substitutional Contents of ST Ceramic Thin Film (ST 세라믹 박막의 Ca 치환량에 따른 특성)

  • Oh, Y.C.;Kim, J.S.;Cho, C.N.;Shin, C.G.;Song, M.J.;Cho, W.S.;So, B.M.;Kim, C.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.160-161
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    • 2005
  • The $(Sr_{1-x}Ca_x)TiO_3$(SCT) thin films are deposited on Pt-coated electrode (Pt/TiN/$SiO_2$/Si) using RF sputtering method with substitutional contents of Ca. The optimum conditions of RF power and $Ar/O_2$ ratio were 140[W] and 80/20, respectively. Deposition rate of SCT thin film was about 18.75$[{\AA}/min]$. The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mol%]. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz].

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Properties of Regenerated Cellulose Films Prepared from the Tunicate Styela clava (미더덕 껍질을 이용한 셀룰로오스 필름의 제조 및 특성)

  • Jung, Young-Jin
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.41 no.4
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    • pp.237-242
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    • 2008
  • The tunic of Styela clava(SCT) consists of a proteoglycan network. Regenerated cellulose films were prepared by solution casting and coagulation of SCT in N-methylmorpholine-N-oxide(NMMO)/$H_2O$(87/13 wt%). The crystalline structure of powdered SCT was primarily that of cellulose I. The crystalline structure of SCT films exhibited a cellulose II structure, similar to that of viscose rayon. Physical characterization of SCT films and fibers revealed an intrinsic viscosity($\eta$) of 6.35 dL/g, average molecular weight($M_w$) of 423,000 g/M, and fiber density of 1.50 $g/cm^3$ with a moisture regain and water absorption of 10.20% and 365%, respectively. The results were similar to those of cellulose films regenerated from wood pulp. Films prepared with 6 wt% SCT exhibited strong tensile strength, high water absorption, and a greater degree of elongation. Scanning electron micrographs(SEM) of film cross-sections showed a layered, sponge-like structure.

Properties of ($Sr_{1-x}Ca_{x}$)$TiO_3$Thin Film by RF Sputtering Method (RF 스퍼터링법에 의한 ($Sr_{1-x}Ca_{x}$)$TiO_3$박막의 특성평가)

  • 김진사;조춘남;오용철;김상진;신철기;박건호;이준웅
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.1001-1004
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    • 2001
  • The (Sr$_{l-x}$Ca$_{x}$)TiO$_3$(SCT) thin films are deposited on Pt-coated electrode(Pt/TiN/SiO$_2$/Si) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. The dielectric constant was increased -with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mol%]. The dielectric constant changes almost linearly in temperature ranges of -80~+90[$^{\circ}C$]. The temperature properties of the dielectric loss have a stable value within 0.02 independent of the substitutional contents of Ca. The current-voltage characteristics of SCT15 thin films showed the increasing leakage current as the measuring temperature increases.ses.

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Fabrication and Dielectric Properties of $(Sr_{1-x}Ca_x)TiO_3$ thin film by RF Magnetron Sputtering Method (RF 마그네트론 스퍼터링법에 의한 $(Sr_{1-x}Ca_x)TiO_3$ 박막의 제조 및 유전특성)

  • Kim, J.S.;Paek, B.H.;Jang, W.S.;Kim, C.H.;Choi, W.S.;Yoo, Y.K.;Kim, Y.J.;Lee, J.U.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1456-1458
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    • 1998
  • The $(Sr_{1-x}Ca_x)TiO_3(SCT)$ thin films were deposited at various substrate temperature using rf magnetron sputtering method on optimized Pt-coated electrodes ($Pt/TiN/SiO_2/Si$). The dielectric constant changes almost linearly in the temperature region of $-80{\sim}+90[^{\circ}C]$, the temperature characteristics of the dielectric loss exhibited a stable value within 0.1. The capacitance characteristics appears a stable value within ${\pm}5$[%]. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 200[kHz]. Dielectric constant of SCT thin films deposited on Si wafer substrate are larger with the increase of deposition temperature.

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