RF 스퍼터링법에 의한 ($Sr_{0.85}Ca_{0.15})TiO_3$ 박막의 전기적 특성

Electrical Characteristics of ($Sr_{0.85}Ca_{0.15})TiO_3$ Thin Film by RF Sputtering Method

The (S $r_{0.85}$C $a_{0.15}$)Ti $O_3$ (SCT) thin films are deposited on Pt-coated electrode using RF magnetron sputtering method at various substrate temperature. Dielectric constant of SCT thin films is increased with increased as the deposition temperature and changes almost linearly in temperature ranges from -80 to +90[$^{\circ}C$]. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 200[kHz]. V-I characteristics of SCT thin films show the increasing leakage current with the increases of deposition temperature.ure.