Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.11a
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- Pages.239-242
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- 1998
Electrical Characteristics of ($Sr_{0.85}Ca_{0.15})TiO_3$ Thin Film by RF Sputtering Method
RF 스퍼터링법에 의한 ($Sr_{0.85}Ca_{0.15})TiO_3$ 박막의 전기적 특성
Abstract
The (S
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