Properties wRh Ca Substitutional Contents of Ceramic Thin Film |
Kim Jin-Sa
(광운대 전기공학과)
Oh Yong-Cheol (광운대 전기공학과) Cho Choon-Nam (광운대 전기공학과) Shin Cheol-Gi (광운대 전기공학과) Song Min-Jong (광주보건대학 의료정보공학과) Choi Woon-Shik (대불대 전기공학과) Park Min-Sun (광운대 교양학부) Kim Chung-Hyeok (광운대 전기공학과) |
1 | A. N. Gubkin, A. J. Kashtanova, G. I. Skanavi, 'Dielectric Properties of Strontium Bismuth Titanates at Low Temperature', Fiz. Tverd. Teia., Vol.34, pp.1110-1116, 1961 |
2 | Yoshitaka Nakano, Masamitsu Watanable, and Tomoharu Takahashi, 'Investigation of interface states in based ceramic', J. Appl. Phys., Vol. 70, No. 3, pp.1539, 1991 DOI |
3 | W. Johnson, L.E. Cross, F.A. Hummel, 'Dielectric Relaxation in Strontium Titanates Containing Rare-Earth Lons', J. Appl. Phys., Vol. 41, pp.2828-2833, 1970 DOI |
4 | H. E. Weaver, 'Dielectric Properties of Single Crystals of at Low Temperatures', J. Phys. Chem. Solids, Vol.11, p.274, 1959 DOI ScienceOn |
5 | R. Wernicke, 'Two-Layer Model Explaining the properties of Boundary Layer Capacitior', Advances in Ceramics, Vol.1 pp.272-281, 1981 |
6 | S. Matsubara, S. Miura, Y. Miyasaka, and N. Shohata, 'Preparation of epitaxial Perovskite-type Oxide Thin Films on a(100) Substrate',J.Appl. Phys., Vol.66(12), pp.5826-5832, 1989 DOI |
7 | Z. Surowiak, A. M. Margolin, I. N. Zaharochenoko, and S. V. Biryukov, 'The Influence of structure on the Piezoelectric properties of and Thin Films with a Diffuse Phase Transition', Thin Solid Flims, Vol.176, pp.227-246, 1989 DOI |
8 | L. P. Cook, M. D. Vaudin et al., 'Microstructural Changes during Processing of Laser Deposited and PZT Thin films', MRS Symposium Proceeding, Vol.202, pp.241-245, 1991 |
9 | Neung-Ho Cho, Seunf-Hee Nam, 'Preparation of strontium titanate thin film on Si substrate by radio frequency magnetron sputtering', J. Vac. Sci. Technol., A10(1), pp.87-91, 1992 DOI |
10 | C. A. T. Salama and E. Siciunas, 'Characteristics of rf Sputtered Barium Titanate Films on Silicon', J. Vac. Sci.&Technol., Vol.9(1), pp.91-96, 1971 DOI |
11 | SUSUMU NISHIGAKI, KANJI MURANO et al., 'Dielectric Properties of Ceramics in the system and Their Applications',J. Am.Ceram.Soc., Vol.65(11), pp.554-560, 1982 DOI |
12 | Yoshio Abe, Midori Kawamura, 'Dielectric Properties of Capacitor Using TIN Bottom Electrode and Effects of Film Thickness', Jpn. J. Appl. Phys., Vol.36. pp.5175-5178, 1997 DOI |
13 | D. W. Hoffman, and J. A. Thorton, 'Internal Stresses in Cr, Mo, Ta, and Pt Films Deposited by Sputtering from a Planar Magnetron Sources', J. Vac. Sci.&Technol., Vol.20(3), pp.355-358, 1982 DOI |