• Title/Summary/Keyword: SAW sensor

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SAW Gas Sensor using WO$_3$Thin Film (WO$_3$박막을 이용한 SAW 가스 센서)

  • 정영우;허두오;이해민;안형근;한득영
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.187-189
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    • 1995
  • A Surface Acoustic Wave Gas sensor for NO, CO, H$_2$gas detection was designed fabricated, and tested. A delay line device was designed to composite a single mode SAW oscillator which enables to measure a SAW velocity. To reduce the effect of temperature and humidity, dual delay line oscillator circuit was used. And final output was measured by digital frequency counter. NO, CO, H$_2$gas were detected by WO$_3$thin film deposited on the path of the Delay Line.

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Characteristics of odorant sensor using SAW Device (SAW 디바이스를 이용한 냄새센서의 특성)

  • Kim, Ki-Young;Kim, Jong-Min;Shin, Hoon-Kyu;Choi, Yong-Sung;Kwon, Young-Soo;Chang, Sang-Mok
    • Proceedings of the KIEE Conference
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    • 1994.07b
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    • pp.1457-1459
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    • 1994
  • A surface acoustic wave(SAW) sensor for the detection of odorants has been constructed by depositing various phospholipids and fatty acids onto the surface of the SAW device. Applying the Langmuir-Blodgett technique, it was possible to deposit the optimal number of layers which was found to be between 10 and 20. Menthone, amylacetate, acetoin, and other organic gases showed different affinities to the coated lipids. An explanation is given for different odorant affinities based on the monolayer properties of phospholipids.

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Vital Sign Sensor Based on Second Harmonic Frequency Drift of Oscillator (발진기의 2채배 고조파 주파수 천이를 이용한 생체신호 측정센서)

  • Ku, Ki-Young;Hong, Yunseog;Lee, Hee-Jo;Yun, Gi-Ho;Yook, Jong-Gwan;Kim, Kang-Wook
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.27 no.3
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    • pp.299-306
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    • 2016
  • In this paper, a vital sign sensor based on impedance variation of resonator is proposed to detect the respiration and heartbeat signals within near-field range as a function of the separation distance between resonator and subject. The sensor consists of an oscillator with a built-in planar type patch resonator, a diplexer for only pass the second harmonic frequency, amplifier, SAW filter, and RF detector. The cardiac activity of a subject such as respiration and heartbeat causes the variation of the oscillation frequency corresponding impedance variation of the resonator within near-field range. The combination of the second harmonic oscillation frequency deviation and the superior skirt frequency of the SAW filter enables the proposed sensor to extend twice detection range. The experimental results reveal that the proposed sensor placed 40 mm away from a subject can reliably detect respiration and heartbeat signals.

surface acoustic wave oscillator hymidity sensor using hexafluoropropene plasma thin film (헥사플루오르프로펜 플라즈마박막을 이용한 표면탄성파발진기 습도센서)

  • 박남천;서은덕
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.05a
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    • pp.144-146
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    • 1992
  • Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

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Improvement of Withdraw릴 Weighted SAW Transversal Filter Performance through Impedance Matching (임피던스 정합을 통한 횡단형 Withdrawal SAW 필터의 성능개선)

  • Lee Youngjin;Lee Seunghee;Roh Yongrae
    • Proceedings of the Acoustical Society of Korea Conference
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    • spring
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    • pp.389-392
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    • 2000
  • 본 연구에서는 1, 2단자쌍 회로망의 임피던스 정합회로를 간단하고 빠르게 구할 수 있는 방안을 개발하였다. 우선 회로망의 전체 전달함수를 F 행열로 부터 계산하고, 이를 이용하여 양단의 부하저항 및 정합회로가 포함된 각각의 단자의 입출력 임피던스를 구하였으며, 이 식으로부터 정합용 소자의 정확한 값을 계산하였다. 본 연구의 타당성을 검증하기 위해 CDMA용 소자로 널리 사용되는 중간주파수 대역 withdrawal 가중형 SAW 필터에 본 연구의 결과를 적용하여 임피던스 정합 전후의 특성변화를 시뮬레이션과 실험을 통하여 동시에 확인하였다 그 결과 85.38 MHz의 중심주파수에서 비대역폭이 $1.2\%$, 삽입손실이 29dB, VSWR이 80인 필터를 본 연구방법을 이용하여 정합 한 경우, 각각 $1.8\%$, 9dB, 3으로 향상됨을 시뮬레이션과 실험을 통해 확인하였다. 본 연구결과는 SAW 디바이스의 정합에 매우 용이하게 이용될 수 있을 뿐만 아니라 일반적인 1, 2단자쌍 회로망의 임피던스 정합에도 널리 사용될 수 있다

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Characteristics of nanocrystalline ZnO films grown on polyctystalline AlN for wireless chemical sensors (무선 화학센서용으로 다결정 AlN 위에 성장된 나노결정질 ZnO 막의 특성)

  • Song, Le Thi;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.252-252
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    • 2009
  • In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at $h/\lambda$=0.0125 (h and $\lambda$ is thickness and wavelength, respectively). For ZnO sensing layers coated on AlN, films have hexagonal wurtzite structure and nanometer particle size. The crystalline size of ZnO films annealed at 400, 500, and 600 $^{\circ}C$ is 10.2, 29.1, and 38 nm, respectively. Surface of the film exhibits spongy which can adsorb steam in the air. The best quality of the ZnO film was obtained with annealing temperature at 500 $^{\circ}Cis$. The change in frequency response (127.9~127.85 MHz) of the SAW humidity sensor based on ZnO/AlN structure was measured along the change in humidity (41~69%). The structural properties of thin films wereinvestigated by XRD and SEM.

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Implementaion of Home Healthcare System for a Patient using SAW Tag (SAW 태그를 이용한 재택환자 종합관리시스템 구현)

  • Song, Jai-Chul
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.17 no.3
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    • pp.183-188
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    • 2017
  • This paper is for the a study on home healthcare system for a patient using SAW Tag. This system is useful when there's a patient in home. Many patients are wounded in restroom. But restroom is very private place and nobody want to be disturbed here. The place where the patient is most injured in the house is the toilet, and it is the point where the privacy of the individual should be kept and the patient's condition should be checked and cope with in case of emergency. And using saw tag, we can calculate position and ID through reflected rf signal. Therefore we propose a general home healthcare system. The management system utilized a seat bed system to monitor at-home patients. The system mounts a bio-signal measuring unit on a toilet seat, measures a bio-signal from the bio-signal measuring unit, and the measured bio-signal is transmitted to the main server through the user's smart phone. With proposed system, we can expand operation area to silver town where many patients are cared. In this paper we developed sensor system and saw tag positioning system and showed the result.

Quality Evaluation of Dried Laver (Porphyra yezoensis Ueda) Using Electronic Nose Based on Metal Oxide Sensor or GC with SAW Sensor During Storage (Metal oxide 센서를 바탕으로한 전자코와 SAW 센서를 바탕으로한 GC를 이용한 저장 중 김의 품질 평가)

  • Cho, Yen-Soo;Noh, Bong-Soo
    • Korean Journal of Food Science and Technology
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    • v.34 no.6
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    • pp.947-953
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    • 2002
  • Two types of electronic nose were used for investigating the quality of dried lavers stored at 5, 15, and $30^{\circ}C$ RH of 32, 43, and 75%. The electronic nose is composed of metal oxide sensors, and GC is based on SAW sensor. Quality change in dried lavers was described in terms of the sensitivities $(R_{gas}/R_{air})$ of the sensors. Principal component analysis (PCA) was carried out using data obtained from six metal oxide sensors. The first principal component scores were correlated with quality changes of dried lavers. As storage time increased, the stored laver cluster separated from that of fresh lavers. A chromatogram was obtained from GC based on SAW sensor. Olfactory image, A $VaporPrint^{TM}$ image for pattern recognition, showed a significant difference between the stored and the fresh samples. Dried lavers during storage at $30^{\circ}C$ and 75% had bacterial counts of $5.7{\times}10^6\;CFU/g$ after 8 day. Increase of microbial count correlated with the response of electronic nose $(r^2=0.87)$. Whereas, color values showed no correlation.

Development of Surface Acoustic Wave Sensor for Viscosity Measurement of Low Viscose Liquid Using Love Wave (Love파를 이용한 저점성 유체 점도 측정용 표면 탄성파 센서 개발)

  • Lee, Sang-Dae;Kim, Ki-Bok;Lee, Dae-Su
    • Journal of Biosystems Engineering
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    • v.33 no.4
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    • pp.282-287
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    • 2008
  • Love wave is one of the shear horizontal waves and it can propagate between two layers in liquid without energy loss. The SAW (surface acoustic wave) sensor using Love wave is very useful for real time measurement of the viscosity of liquid with high sensitivity. In this study, the 77 MHz and 155 MHz Love wave SAW sensors were fabricated and use to measure the viscosity of low viscous liquid. To generate the surface acoustic wave, the inter-digital transducers were fabricated on the quartz crystal wafer. In order to obtain the optimal thickness of the coating film (novolac photoresist) generating the Love wave on the surface of SAW device, theoretical calculation was performed. The performances of fabricated Love wave SAW sensors were tested. As test liquid, pure water and glycerol solutions having different concentrations were used. Since the determination coefficients of the regression equations for measuring the viscosity of liquid are greater than 0.98, the developed Love wave SAW sensors in this study will be very useful for precise measurement of viscosity of liquid.

Fabrication and Characteristics of Surface-Acoustic-Wave Sensors for Detecting $NO_2$ GaS ($NO_2$ 가스 감지를 위한 표면탄성파 센서의 제작 및 특성)

  • Choi, D.H.
    • Journal of Sensor Science and Technology
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    • v.8 no.2
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    • pp.108-114
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    • 1999
  • Surface acoustic wave (SAW) device is very attractive for gas sensor applications because of their small size, low cost, high sensitivity, and good reliability. A dual delay line surface acoustic wave $NO_2$ gas sensors have been designed and fabricated on the $LiTaO_3$ piezoelectric single crystal substrate. The capacitance of the fabricated IDTs was 326.34pF at the frequency of 79.3MHz. The maximum reflection loss of the impedence-matched IDTs was -16.74dB at the frequency of 79.3MHz. The SAW oscillator was constructed and the stable oscillation was obtained by controlling the gain of rf amplifier properly. The oscillation frequency shift of the SAW oscillator to the $NO_2$ gas was 28Hz/ppm.

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