• Transactions of the Society of Information Storage Systems
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• v.8 no.1
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• pp.16-21
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• 2012

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

• 한국IT서비스학회:학술대회논문집
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• 2008.11a
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• pp.258-261
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• 2008

칩의 초소형화, 태그의 초저가화를 위한 Chipless RFID 기술은 핵심쟁점인 1센트 이하의 상용화 실현까지는 아직 시간과 투자가 더 필요하다. 중소태그업체에서 Chipless 기술의 일종인 표면탄성파(SAW: Surface Acoustic Wave)를 이용하는 RFID 태그의 연구개발과 전략상품화가 시급하고 관련 상세정보의 획득과 전략수립이 필수적인 상황이다. 이에 특정 중소기업의 SAW RFID태그 제품개발 및 시장진입전략, 태그기술 발전을 위해 개발 및 시장정보, 특허정보를 분석 연구한 사례를 제시한다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.4
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• pp.325-331
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• 2002

In this paper, surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) are investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. For the filter design, input-output IDT structure was simulated with modified impulse model; uniform-withdrawal weighting IDTs, withdrawal-withdrawal weighting IDTs. SAW filters of uniform-withdrawal weighting IDTs structure were designed and fabricated on $128^{\circ}LiNbO_3$ piezoelectric substrates. Implemented SAW filter has a fractional bandwidth of 30%, center frequency of 70MHz and shape factor of $1.12\pm0.01$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.13-16
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• 2009

In this study, AlN thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a pulsed reactive magnetron sputtering system. AFM, XRD and FT-IR were used to analyze structural properties and preferred orientation of the AlN/3C-SiC thin film. Suitability of the film in SAW applications was investigated by comparing the SAW characteristics of an interdigital transducer (IDT)/AlN/3C-SiC structure with the IDT/AIN/Si structure at 160 MHz in the temperature range $30-150^{\circ}C$. These experimental results showed that AlN films on the poly 3C-SiC layer were highly (002) oriented. Furthermore, the film showed improved temperature stability for the SAW device, $TCF\;=\;-18\;ppm//^{\circ}C$. The change in resonance frequency according to temperature was nearly linear. The insertion loss decrease was about $0.033dB/^{\circ}C$. However, some defects existed in the film, which caused a slight reduction in SAW velocity.

• Korean Journal of Food Science and Technology
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• v.35 no.5
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• pp.994-997
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• 2003

Domestic and imported Cnidium officinale were investigated using GC based on a SAW sensor. Volatile components from the herb were detected by GC with a Surface Acoustic Wave (SAW sensor without any pretreatment. This system produced a frequency proportional to the amount of column effluent deposited on the SAW sensor. It could discriminate between domestic and imported Cnidium officinales. This was achieved by using a pattern recognition and a visual pattern called a $VaporPrint^{TM}$, derived from the frequency and chromatogram of the GC-SAW sensor. The origins of Cnidium officinale was well discriminated with the direct use of $VaporPrint^{TM}$.

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.459-460
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• 2009

In this study, surface structure and near-field distribution of a surface acoustic wave filter were measured with both reflection mode and collection mode near-field scanning optical microscopes, and there results were compared with each other.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.4
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• pp.393-400
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• 2012

In recent years, nano-structured thin film systems are often applied in industries such as MEMS/NEMS device, optical coating, semiconductor or like this. Thin films are used for many and varied purpose to provide resistance to abrasion, erosion, corrosion, or high temperature oxidation and also to provide special magnetic or dielectric properties. Quite a number of articles to evaluate the characterization of thin film structure such as film density, film grain size, film elastic properties, and film/substrate interface condition were reported. Among them, the evaluation of film adhesive to substrate has been of great interest. In this study, we fabricated the polymeric thin film system with different adhesive conditions to evaluate the adhesive condition of the thin film. The nano-structured thin film system was fabricated by spin coating method. And then V(z) curve technique was applied to evaluate adhesive condition of the interface by measuring the surface acoustic wave(SAW) velocity by scanning acoustic microscope(SAM). Furthermore, a nano-scratch technique was applied to the systems to obtain correlations between the velocity of the SAW propagating within the system including the interface and the shear adhesive force. The results show a good correlation between the SAW velocities measured by acoustic spectroscope and the critical load measured by the nano-scratch test. Consequently, V(z) curve method showed potentials for characterizing the adhesive conditions at the interface by acoustic microscope.

• Korean Journal of Food Science and Technology
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• v.35 no.1
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• pp.144-148
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• 2003

Volatile components were detected from domestic and imported Angelica gigas Nakai without any pretreatment using GC based on Surface Acoustic Wave (SAW) sensor. This system produced a frequency proportional to the amount of column effluent deposited on the SAW sensor. Discrimination between domestic and imported Angelica gigas Nakai was achieved through recognition of visual pattern using $VaporPrint^{TM}$ derived from frequency and chromatogram of GC-SAW sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.252-252
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• 2009

In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at $h/\lambda$=0.0125 (h and $\lambda$ is thickness and wavelength, respectively). For ZnO sensing layers coated on AlN, films have hexagonal wurtzite structure and nanometer particle size. The crystalline size of ZnO films annealed at 400, 500, and 600 $^{\circ}C$ is 10.2, 29.1, and 38 nm, respectively. Surface of the film exhibits spongy which can adsorb steam in the air. The best quality of the ZnO film was obtained with annealing temperature at 500 $^{\circ}Cis$. The change in frequency response (127.9~127.85 MHz) of the SAW humidity sensor based on ZnO/AlN structure was measured along the change in humidity (41~69%). The structural properties of thin films wereinvestigated by XRD and SEM.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.9
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• pp.417-422
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• 2002

ZnO thin films were deposited on various substrates, such as Si-(111), SiO$_2$(5000 $\AA$ by thermal CVD)/Si-(100), and SiO$_2$(2000 $\AA$ by RF sputtering)/Si-(100). The (002)-orientation, surface morphology and roughness, and electrical resistivity of deposited films were measured and compared in terms of substrate. Surface acoustic wave(SAW) filters with a multilayered configuration of IDT/ZnO/SiO$_2$/Si were also fabricated and the IDT was obtained using a lift-off method. From the frequency-response characteristics of fabricated devices, the insertion loss and side-lobe rejection were estimated. The experimental results showed that the (002)-oriented growth nature of ZnO films, which played a crucial role of determining the characteristic of SAW device, was strong1y dependent upon the SiO$_2$buffer.