• The Journal of the Acoustical Society of Korea
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• v.10 no.3
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• pp.13-18
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• 1991

In this study, the analysis technique of fracture stress using the reflection coefficient of SAW reflected from a brittle solid with surface crack has been studied. Fracture stress of brittle solid with surface crack has been obtained by the function of the critical stress intensity factor and the maximum normalized stress intensity factor of the crack in the body. And the maximum normalized stress intensity factor of a surface crack can be inferred from a measurement of reflection coefficient of SAW. In experiment, the surface cracks ranging from 0.5mm to 0.9mm in crack depth has been made at the center of each Pyrex disc, and the SAW wedge transducer has been set up for the pitch-catch mode. It has been compared the theoretical values of the fracture stress calculated from the reflection coefficient of SAW with the values of the fracture stress measured from UTM.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.759-762
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• 2003

The epitaxially grown Mg-doped GaN thin film was prepared by MOCVD (Metal Organic Chemical Vapor Deposition) for a SAW(Surface Acoustic Wave) filter. Mg-doped GaN thin film had enough properties for a SAW filter which include crystallinity and morphology. The surface morphology and crystalline of the Mg-doped GaN thin films were characterized using AFM and an X-ray rocking curve. The SAW filter, which was fabricated by lift-off process and frequency response, was measured by HP 8753C network analyzer. Center frequency was 96.687 MHz and SAW velocity was 5801 m/s when wavelength(λ) was 60${\mu}{\textrm}{m}$. Insertion loss was over -10 dB, Q was factor over 200, and side lobe attenuation was over 22 dB which was suitable for use as a SAW filter. Electro-mechanical coupling coefficient (k$^2$) was calculated from the measured data. k$^2$ was from 1 % to 1.44 %. The fabricated SAW filter using Mg-doped GaN/sapphire structure has good qualities as a filter and will be used as a SAW filter for operating RF frequency.

• Tribology and Lubricants
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• v.27 no.5
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• pp.249-255
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• 2011

Recently the demand for a fast and precise actuator in semiconductor industries is growing larger. A SAW motor is now expected as a new friction-drive actuator to meet such demand. However, its friction and wear properties are almost unknown and its low stability and reliability still remain to be solved. In this research the tests of SAW motor were carried out and its durability was discussed. The effect of wear caused by friction on the driving force and driving speed were clarified.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.563-567
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• 2004

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128$^{\circ}$ YX-LiNbO$_3$ Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30$^{\circ}C$ to 80$^{\circ}C$ is linearly changed, the SAW sensor is applicable to the temperature sensor.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.43-44
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• 2008

실리콘 웨이퍼 위에 마이크로웨이브 플라즈마 화학증착법으로 나노결정질 다이아몬드 박막을 형성하고 그 위에 RF 마그네트론 스퍼터로 ZnO 박막을 적층한 후 SAW(Surface Acoustic Wave) 필터를 제작하여 평가하였다. 기판온도, 작업압력, Ar/$CH_4$ 비율을 변화시켜 최적공정 조건에서 30nm 수준의 결정립을 갖는 $4{\mu}m$ 두께의 다이아몬드 박막을 얻었고, RF 인가전력, 기판온도, Ar/$O_2$ 비율을 조정하여 결정성이 우수하고, 표면 거칠기가 좋으며, 높은 비저항을 갖는 $2.2{\mu}m$ 두께의 ZnO 박막을 얻었다. 박막의 특성은 FESEM과 XRD로 평가하였다. Lift-off 식각공정을 이용하여 일정한 선폭과 간격(Line/Space : 1.5/$1.5{\mu}m$)을 갖는 구리 전극 패턴을 형성하였다. Network Analyzer를 이용하여 측정한 SAW 필터의 중심주파수는 1.67GHz이었다.

• Journal of Surface Science and Engineering
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• v.42 no.5
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• Korean Chemical Engineering Research
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• v.49 no.2
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• pp.224-229
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• 2011

In this study, we have developed shear horizontal(SH) surface acoustic wave(SAW) sensors for the detection of immunoglobulin G(IgG) on the gold coated delay line of SH-SAW devices. As the result of the experiment, we could uniformly immobilize anti-MIgG(mouse IgG) conjugate on the surface of gold. When displaying results of immobilization on the surface of gold using G-anti MIgG conjugate and blocking buffer in frequency shift, G-anti MIgG conjugate showed frequency shift of 75.1 kHz in the initial frequency, and blocking buffer showed frequency shift of 215.7 kHz. When various concentrations of MIgG was added in 100MHz type sensor, the sensor showed 46.3, 127.45, 161.21 and 262.39 kHz frequency shift at 25, 50, 75 and 100 ${\mu}g$ MIgG concentration, respectively.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.7
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• pp.94-103
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• 1995

Thin film acoustooptic beam deflector in proton-exchanged Y-cut LiNbO$_{3}$ was fabricated and measured. The planar waveguide was fabricated by using the proton-exchanged and annealing method in Y0cut LiNbO$_{3}$. Interdigital transducer for SAW(surface acoustic wave) was made by the laser lithography. Using above method, the thin film acoustooptic beam deflector was constructed. Its SAW wavelength was 20.mu.m at 174MHz center frequency. The interaction length between guided optical wave and SAW was 2.16mm. The measured 3dB bandwidth was 17MHz using He-Ne laser. And 70% diffraction efficiency was obtained at 970mW RF driving power.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.49.3-49
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• 2002

$\textbullet$ Surface Acoustic Wave $\textbullet$ Tactile Display Principle $\textbullet$ Installed on PC Mouse Button $\textbullet$ Vibration Measurement $\textbullet$ Demonstration on PC Screen $\textbullet$ Comparison Tests

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.5
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• pp.100-108
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• 2016

In various industries, many researches studies have been done in using nano thin film fabrication technology. In the field of printed electronics, various electronic devices can be fabricated using a direct printing process of on multiple functional materials. It has the advantages of low prices, environment-friendly environmentally friendly, flexibleility, large scale, mass production produced, simple process and so on. In this study, a viable thin film fabrication technology has beenwas introduced using the surface acoustic wave mechanism for thin film deposition. Fabrication of thin films using organic, inorganic and composite of organic/inorganic materials have been were analyzed through the experimental research. In this experiment, organic material MEH:PPV, inorganic material ZnO and composite material MEH:PPV/ZnO have been depo sited as thin films.