• Title/Summary/Keyword: S-Transform

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ECR-PECVD 방법으로 제작된 DLC 박막의 기판 Bias 전압 효과

  • 손영호;정우철;강종석;정재인;황도원;김인수;배인호
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.188-188
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    • 2000
  • DLC (Diamond-Like Carbon) 박막은 높은 경도와 가시광선 및 적외선 영역에서의 광 투과도, 전기적 절연성, 화학적 안정성 및 저마찰.내마모 특성 등의 우수한 물리.화학적인 물성을 갖고 있기 때문에 여러 분야의 응용연구가 이루어지고 있다. 이러한 DLC 박막을 제작하는 과정에는 여러 가지가 있으나, 본 연구에서는 ECR-PECVD electron cyclotron resonance plasma enhanced chemical vapor deposition) 방법을 사용하였다. 이것은 최근에 많이 이용되고 있는 방법으로, 이온화률이 높을뿐만 아니라 상온에서도 성막이 가능하고 넓은 진공도 영역에서 플라즈마 공정이 가능한 장점이 있다. 기판으로는 4" 크기의 S(100)를 사용하였고, 박막을 제작하기 전에 진공 중에서 플라즈마 전처리를 하였다. 플라즈마 전처리는 Ar 가스를 150SCCM 주입시켜 5$\times$10-1 torr 의 진공도를 유지시키면서, ECR power를 700W로 고정하고, 기판 bias 전압을 -300 V로 하여 5분 동안 기판을 청정하였다. DLC 박막은 ECR power를 700W. 가스혼합비와 유량을 CH4/H2 : 10/100 SCCM, 증착시간을 2시간으로 고정하고, 기판 bias 전압을 0, -50, -75, -100, -150, -200V로 변화시켜가면서 제작하였다. 이때 ECR 소스로부터 기판까지의 거리는 150mm로 하였고, 진공도는 2$\times$10-2torr 였으며, 기판 bias 전압은 기판에 13.56 MHz의 RF power를 연결하여 RF power에 의해서 유도되는 negative DC self bias 전압을 이용하였다. 제작된 박막을 Auger electron spectroscopy, elastic recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.

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Carbon-induced reconstructions on W(110)

  • Kim, Ji-Hyeon;Rojas, Geoff;Anders, Axel;Kim, Jae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.362-362
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    • 2010
  • Today, vast attention has been paid to periodic arrays of nanostructures due to their potential for applications such as memory with huge storage density. Such application requires large-scale fabrication of well ordered nano-sized structures. One of the most widely used methods for the ordered nanostructures is lithography. This top-down process, however, has the limit to reduce size. Here the promising alternative is the self-organization of ordered nano-sized structures such as large scale 2d carbon-induced reconstructions on W(110). In the present study, we report on the first well-resolved atomic resolution STM studies of the well-known R($15{\times}3$) and R($15{\times}12$) carbon induced reconstruction of the W(110). From the atomic image of R($15{\times}3$) for different values of tunneling gap resistance, we can tell there are no missing atoms in unit cells of R($15{\times}3$) and some atomic displacements are substantial from the clean W(110), even though not all the imaged position of atoms correspond to tungsten, but may include those of carbon. We are considering two cases; First case is related to lattice deformation, or top layer of W(110) is deformed in the process of relief of strain caused by random inserting of carbon atoms possibly in the interstitial position. In the second case, R($15{\times}3$) unit cell results from a coincidence lattice between clean W(110) substrate and tungsten carbide overlayer which has rectangular atomic arrangement and giving R($15{\times}3$) coincidence lattice. beta-W2C showing rectangular unit cell should be a candidate. Further, we report on new reconstructions. Unlike the well-known R($15{\times}12$) consisting of two parts, two inner structures between two "Backbone" structures. The new reconstruction, which we found for the first time, contains more parts between the "Backbone"s. Sometimes we can observe the reconstruction consists of only inner parts without "Backbone" parts. Thus, the observed reconstruction can be built by constructing of two types of "Lego"-like block. Moreover, the rectangle shape of "Backbone" transform to parallelogram-like shape over time, the so-called wavy-R($15{\times}12$). Adsorption of hydrogen can be the reason for this transformation.

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The Effect of Thermal Stability of Cu(I) Precursors on the Deposition in the Metal Organic Chemical Vapor Deposition (MOVCD에 있어서 구리(l)전구체들의 열적 안정성이 증착에 미치는 영향)

  • Park, Man-Young;Lee, Shi-Woo
    • Korean Journal of Materials Research
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    • v.8 no.4
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    • pp.345-353
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    • 1998
  • Metal organic chemical vapor deposition (MOCVD) of copper using three Cu( I ) precursors. (hfac)Cu (VTMS) (hfac= hexafluoroacetylacetonate, VTMS= vinyltrimethylsilane), (hfac)Cu(VTMOS) (VTMOS= vinyltri¬methoxysilane) and (hfac)Cu(A TMS) (A TMS= allyltrimethylsilane) was studied. The thermal stability and the gase¬ous phase reaction mechanism of Cu( I ) precursors were identified using $^1H$-, $^I3C$-NMR and Fourier transform infra¬red spectroscopy. It was found out that thermal stability of liquid phase (hfac)Cu(VTMS) and (hfac)Cu(VTMOS) were better than that of (hfac)Cu(A TMS) using FT - NMR. From in-situ FT - IR experiments, the disproportion reaction of Cu(hfac). the decomposition reaction of Cu(hfac), and cracking of free hfac ligand were observed. Also the effect of gaseous phase reaction on the deposition rates and film properties was investigated. The minimum temperature that deposition of copper films from (hfac)Cu(A TMS) was as low as 60$^{\circ}$C and such a low deposition temperature compared with those of other Cu( I ) precursors is believed to be related with weaken Cu- A TMS bond.

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Adsorption Characteristics of Carbon Dioxide on Chitosan/Zeolite Composites (키토산/제올라이트 복합체의 이산화탄소 흡착 특성)

  • Hong, Woong-Gil;Hwang, Kyung-Jun;Jeong, Gyeong-Won;Yoon, Soon-Do;Shim, Wang Geun
    • Applied Chemistry for Engineering
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    • v.31 no.2
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    • pp.179-186
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    • 2020
  • In this study, chitosan/zeolite composites were prepared by using basalt-based zeolite impregnated with aqueous chitosan solution for the adsorptive separation of CO2. The prepared composites were characterized by scanning electron microscopy (SEM), Fourier-transform infrared (FT-IR) spectroscopy, thermogravimetric analysis (TGA), X-ray photoelectron spectroscopy (XPS), and nitrogen adsorption analysis. In addition, the adsorption equilibrium isotherms for CO2 and N2 were measured at 298 K using a volumetric adsorption system, and the results were analyzed by applying adsorption isotherm equations (Langmuir, Freundlich, and Sips) and energy distribution function. It was found that CO2 adsorption capacities were well correlated with the structural characteristics of chitosan and zeolite, and the ratio of elements [N/C, Al/(Si + Al)] formed on the surface of the composite. Moreover, the CO2/N2 adsorption selectivity was calculated under the mixture conditions of 15 V : 85 V, 50 V : 50 V, and 85 V : 15 V using the Langmuir equation and the ideal adsorption solution theory (IAST).

Effect of Silane Coupling Agent on Adhesion Properties between Hydrophobic UV-curable Urethane Acrylate and Acrylic PSA (소수성 UV 경화형 우레탄 아크릴레이트와 아크릴 점착제 사이의 계면 부착력 향상을 위한 에폭시 실란의 영향)

  • Noh, Jieun;Byeon, Minseon;Cho, Tae Yeun;Ham, Dong Seok;Cho, Seong-Keun
    • Applied Chemistry for Engineering
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    • v.31 no.2
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    • pp.230-236
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    • 2020
  • In this study, an adhesive tape with water and impact resistance for mobile devices was developed using a UV-curable urethane acrylate based polymer as a substrate. The substrate fabricated by UV-curable materials shows hydrophobicity and poor wettability, which significantly deteriorates the interface-adhesions between the substrate and acrylic adhesive. In order to improve the interface adhesion, 3-glycidoxy-propyl trimethoxysilane (GPTMS), a silane coupling agent having epoxy functional groups, was selected and incorporated into UV-curable urethane acrylate based polymer resins in various contents. The changes of the chemical composition according to the contents of GPTMS was studied with Fourier-transform infrared spectroscopy (FT-IR), energy-dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS) to know the surface bonding properties. Also mechanical properties of the substrate were characterized by tensile strength, gel fraction and water contact angle measurements. The peel strengths at 180° and 90° were measured to compare the adhesion between the substrate and adhesive according to the silane coupling agent contents. The mechanical strength of the urethane acrylate adhesive tape decreased as the silane coupling agent increased, but the adhesion between the substrate and adhesives increased remarkably at an appropriate content of 0.5~1 wt%.

Antimicrobial Chitosan-silver Nanocomposite Film Prepared by Green Synthesis for Food Packaging (녹색합성법에 기인한 식품포장용 키토산-은나노 항균 복합필름의 개발)

  • Kyung, Gyusun;Ko, Seonghyuk
    • Korean Journal of Food Science and Technology
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    • v.46 no.3
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    • pp.347-351
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    • 2014
  • We studied the green synthesis and antibacterial activity of chitosan-silver (Ag) nanocomposite films for application in food packaging. Green synthesis of Ag nanoparticles (AgNPs) was achieved by a chemical reaction involving a mixture of chitosan-silver nitrate ($AgNO_3$) in an autoclave at 0.1 MPa, $121^{\circ}C$, for 15-120 s. The formation of AgNPs in chitosan was confirmed by both UV-Visible spectrophotometry and transmission electron microscopy (TEM) and the effects of chitosan-$AgNO_3$ concentration and reaction time on the synthesis of AgNPs in chitosan were examined. The resulting chitosan-Ag composite films were characterized by various analytical techniques and their antibacterial activity was evaluated based on the formation of halo zones around films, indicating inhibition of the growth of Escherichia coli. A fourier-transform infrared (FTIR) spectroscopy analysis showed that free amino groups in chitosan acted as effective reductants and AgNP stabilizers. The composite films exhibited enhanced antibacterial activity with increasing Ag content on the surface of as-prepared composite films.

The Effect of Individual Dynamic Capabilities on Organizational Effectiveness and the Mediating Effect of Self-Leadership : Focused on Domestic Chemical Companies (개인의 동적 역량이 조직유효성에 미치는 영향과 셀프리더십의 매개효과 : 국내 화학기업을 중심으로)

  • Won, Suk-Ho;Park, Gwang-Ho
    • Journal of the Korea Management Engineers Society
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    • v.23 no.4
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    • pp.49-72
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    • 2018
  • Before the financial crisis of 1997 in Korea, many industrial sectors across the country have achieved remarkable economic growth since the 1970s because of the development of large-scale equipment industries such as civil engineering, steel, construction and chemical industries. However, after the financial crisis, the economic growth rate has slowed down. Also, the global recession and the rise of China in the global business environment have led to a long-term recession in the national industry as a whole. In current economic environment, it is not easy for the companies even having excellent resources to continue its competitive advantage. Moreover, the chemical industry, which has an influence as a basic industry of other industries, misses the point of transformation into a high value-added industry, as shown in previous research. In order to meet the rapidly changing global business environment, Korean chemical companies should have a dynamic capabilities which to rapidly reallocate and consolidate the resources and capabilities they possess. The dynamic capabilities to convert, rearrange and develop the resources possessed by the company in the direction of creating high added value and to promptly search for, absorb, transform and fuse newly required capabilities and resources should be continuously applied to Korean chemical companies. It is the core competence to secure competitive advantage. In order to secure the dynamic capabilities of the company, the dynamic capabilities of individual employees should be strengthened and employees should be able to demonstrate their own leadership so that they can proactively work and self-manage in a positive direction. Previous studies have focused mainly on the dynamic capabilities of firms. However, the competence of the human resources that make up the enterprise leads to the capabilities of the enterprise, and the human resources themselves are also important corporate resources. This paper focuses on the dynamic capabilities of individuals and strives to clarify the causal relationship between dynamic capabilities, self-leadership, and organizational effectiveness which have direct or indirect effects on management outcome. The reasons for choosing the chemical industry are based on the fact that a domestic chemical companies are in a long-term recession, and they lacks a innovation and value creation capabilities. Also, chemical industry has a large impact on the national economy.

Fire Severity Mapping Using a Single Post-Fire Landsat 7 ETM+ Imagery (단일 시기의 Landsat 7 ETM+ 영상을 이용한 산불피해지도 작성)

  • 원강영;임정호
    • Korean Journal of Remote Sensing
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    • v.17 no.1
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    • pp.85-97
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    • 2001
  • The KT(Kauth-Thomas) and IHS(Intensity-Hue-Saturation) transformation techniques were introduced and compared to investigate fire-scarred areas with single post-fire Landsat 7 ETM+ image. This study consists of two parts. First, using only geometrically corrected imagery, it was examined whether or not the different level of fire-damaged areas could be detected by simple slicing method within the image enhanced by the IHS transform. As a result, since the spectral distribution of each class on each IHS component was overlaid, the simple slicing method did not seem appropriate for the delineation of the areas of the different level of fire severity. Second, the image rectified by both radiometrically and topographically was enhanced by the KT transformation and the IHS transformation, respectively. Then, the images were classified by the maximum likelihood method. The cross-validation was performed for the compensation of relatively small set of ground truth data. The results showed that KT transformation produced better accuracy than IHS transformation. In addition, the KT feature spaces and the spectral distribution of IHS components were analyzed on the graph. This study has shown that, as for the detection of the different level of fire severity, the KT transformation reflects the ground physical conditions better than the IHS transformation.

Comparative analysis of linear model and deep learning algorithm for water usage prediction (물 사용량 예측을 위한 선형 모형과 딥러닝 알고리즘의 비교 분석)

  • Kim, Jongsung;Kim, DongHyun;Wang, Wonjoon;Lee, Haneul;Lee, Myungjin;Kim, Hung Soo
    • Journal of Korea Water Resources Association
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    • v.54 no.spc1
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    • pp.1083-1093
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    • 2021
  • It is an essential to predict water usage for establishing an optimal supply operation plan and reducing power consumption. However, the water usage by consumer has a non-linear characteristics due to various factors such as user type, usage pattern, and weather condition. Therefore, in order to predict the water consumption, we proposed the methodology linking various techniques that can consider non-linear characteristics of water use and we called it as KWD framework. Say, K-means (K) cluster analysis was performed to classify similar patterns according to usage of each individual consumer; then Wavelet (W) transform was applied to derive main periodic pattern of the usage by removing noise components; also, Deep (D) learning algorithm was used for trying to do learning of non-linear characteristics of water usage. The performance of a proposed framework or model was analyzed by comparing with the ARMA model, which is a linear time series model. As a result, the proposed model showed the correlation of 92% and ARMA model showed about 39%. Therefore, we had known that the performance of the proposed model was better than a linear time series model and KWD framework could be used for other nonlinear time series which has similar pattern with water usage. Therefore, if the KWD framework is used, it will be possible to accurately predict water usage and establish an optimal supply plan every the various event.

Highly-permeable Mixed Matrix Membranes Based on SBS-g-POEM Copolymer, ZIF-8 and Ionic Liquid (SBS-g-POEM 공중합체, ZIF-8, 이온성 액체에 기반한 고투과성 혼합 매질 분리막)

  • Kang, Dong A;Kim, Kihoon;Kim, Jong Hak
    • Membrane Journal
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    • v.29 no.1
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    • pp.44-50
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    • 2019
  • In this paper, we developed mixed matrix membranes (MMMs) consisting of SBS-g-POEM block-graft copolymer, ionic liquid (EMIMTFSI) and ZIF-8 nanoparticles to separate a $CO_2/N_2$ gas pair. The SBS-g-POEM is a rubbery block-graft copolymer synthesized through low-cost free-radical polymerization. The EMIMTFSI was dissolved into the SBS-g-POEM matrix and solution synthesized ZIF-8 nanoparticles were also dispersed into the copolymer matrix. The physico-chemical properties of manufactured membranes were characterized by Fourier transform infrared spectroscopy (FT-IR), differential scanning calorimetry (DSC), scanning electron microscopy (SEM), X-ray diffraction (XRD), which showed that the components were compatible with each other. The gas separation performance was confirmed by time-lag measurements showing $CO_2$ permeability of 537.0 barrer and $CO_2/N_2$ selectivity of 15.2. The result represents the EMIMTFSI and ZIF-8 nanoparticles improves the gas permeability more than two-times, without significantly sacrificing the $CO_2/N_2$ selectivity.