• Title/Summary/Keyword: Run-to-Run(R2R) Control

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Optical In-Situ Plasma Process Monitoring Technique for Detection of Abnormal Plasma Discharge

  • Hong, Sang Jeen;Ahn, Jong Hwan;Park, Won Taek;May, Gary S.
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.2
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    • pp.71-77
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    • 2013
  • Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

DEVELOPMENT OF LEVEE WEEDING ROBOT - Pathway Control System on the Strait Levee -

  • Takeda, J.;Takahashi, S.;Torisu, R.;Ashraf, M.A.
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2000.11b
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    • pp.325-332
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    • 2000
  • The objective of this research work is to develop an autonomous levee-weeding robot. In this paper, pathway control system for the robot is developed and simulated. A prototype autonomous vehicle for levee weeding is also developed and used in the actual test. The results obtained in this research work is summarized as follows; 1) The simulated typical time history of lateral displacements and heading angle of the vehicle in straight run shows that the vehicle tendency is always to achieve the target path from any of its deviated position and heading angle. 2) The test run on an asphalt surface by the prototype crawler-type vehicle is in good agreement with the simulation results.

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Evaluation of Enzymatic Method using an Automated Chemistry Analyzers for Homocysteine Measurement

  • Shim, Moon-Jung
    • Korean Journal of Clinical Laboratory Science
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    • v.39 no.3
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    • pp.196-200
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    • 2007
  • In clinical practice, homocysteine has gained popularity because its elevated values are strongly associated with an increased risk of cardiovascular disease. More recently, a new enzymatic colorimetric assay for homocysteine in biological sample, suitable for automated clinical analyzers, has been proposed. To evaluate one of these enzymatic methods and compare the results obtained with this method with those of an immunoenzymatic method, thirty-two samples were analyzed for total homocysteine by HiSens$^{(R)}$ homocysteine reagent on the automated chemistry analyzers TBA 200FR and compared to the widely used immunoenzymatic method ADVIA Centaur. In TBA 200FR, the within-run CVs of two control materials were 3.23% and 0.92%, respectively; the between run CVs were 4.58% and 2.55%, respectively. And in ADVIA 1650, the within-run CVs were 6.81% and 0.99%, respectively; the between run CVs were 9.0% and 3.9%, respectively. The recovery for homocysteine was 100% ($60.8{\mu}mol/L$), 99.1% ($48.64{\mu}mol/L$), 96.3% ($36.48{\mu}mol/L$), 96.1% ($24.32{\mu}mol/L$), and 92.1% ($12.16{\mu}mol/L$). The regression equation of TBA 200FR vs. ADVIA Centaur was y=0.9095x-2.5086 (r=0.9632). And the regression equation for the ADVIA 1650 chemistry vs. Immulite 2000 was y=0.8418x + 0.3207 (r=0.9625). In conclusion, this enzymatic method using automated chemistry analyzer for homocysteine assay shows acceptable analytical performance. I suggest that this assay will be suitable for routine analysis.

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Algorithm and computerize programming to induce optimized Far-infrared radiation (원적외선 최적화 방사유도 알고리즘과 프로그래밍)

  • Kim, Jae-Yoon;Park, Don-Mork;Park, Young-Han;Park, Rae-Joon
    • The Journal of Korean Physical Therapy
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    • v.13 no.2
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    • pp.257-264
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    • 2001
  • To take the Far-infrared(FIR) ray which is a optimized wavewlength and strength, at first, it is to be induced the characteristic algorithm and the computerized programing of FlR radiating materials. In this study, we induced that the formular of optimized FIR with physical, mathematical logic and theory, especially, Plank, Kirchhoff, Wien, Stefan-Boltzmann's logic and law. In the long run the formular was induced with mathematical integration. since we had to know the molecular wavelength. Base on the induced formular as above, we programmed the optimized FlR radiating computerized program, it would be useful to design semiconductor( VLSI) as the FlR instrument center control system.

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A Development of Expected Loss Control Chart Using Reflected Normal Loss Function (역정규 손실함수를 이용한 기대손실 관리도의 개발)

  • Kim, Dong-Hyuk;Chung, Young-Bae
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.39 no.2
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    • pp.37-45
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    • 2016
  • Control chart is representative tools of statistical process control (SPC). It is a graph that plotting the characteristic values from the process. It has two steps (or Phase). First step is a procedure for finding a process parameters. It is called Phase I. This step is to find the process parameters by using data obtained from in-controlled process. It is a step that the standard value was not determined. Another step is monitoring process by already known process parameters from Phase I. It is called Phase II. These control chart is the process quality characteristic value for management, which is plotted dot whether the existence within the control limit or not. But, this is not given information about the economic loss that occurs when a product characteristic value does not match the target value. In order to meet the customer needs, company not only consider stability of the process variation but also produce the product that is meet the target value. Taguchi's quadratic loss function is include information about economic loss that occurred by the mismatch the target value. However, Taguchi's quadratic loss function is very simple quadratic curve. It is difficult to realistically reflect the increased amount of loss that due to a deviation from the target value. Also, it can be well explained by only on condition that the normal process. Spiring proposed an alternative loss function that called reflected normal loss function (RNLF). In this paper, we design a new control chart for overcome these disadvantage by using the Spiring's RNLF. And we demonstrate effectiveness of new control chart by comparing its average run length (ARL) with ${\bar{x}}-R$ control chart and expected loss control chart (ELCC).

Hardware configuration of High-Density HVPS and High Speed independent Control method Using FPGA for Phased Array Transmitters (위상 배열 고출력증폭기용 고밀도 고전압 전원공급기 하드웨어 구성 및 FPGA를 이용한 고속 독립 제어방식)

  • Kang, Chun-Ho;Lee, Sung-Wook;Lee, Hong-Hak;Lee, Chang-Hoon;Byun, Gi-Sig
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.19 no.11
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    • pp.2758-2764
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    • 2015
  • In the field of electronic warfare applications, high voltage power supply(HVPS) for high power phased array transmitters must necessarily have an independent operating characteristics for driving mini TWTs. TWT independent operational characteristics, in order to run without interrupting the electronic warfare mission by maintaining the partial transmission function even when one of the TWT has occurred a failure, is known to be very important. In this paper, we describe the research on high-speed independent control system using a high-density HVPS, including FE modulators, hardware configuration and the FPGA in order to independently operate mini TWTs. Also, we have simulated some possible faults in phased array transmitters, and presents the test results to control a faulted TWT independently.

A ChIP-Seq Data Analysis Pipeline Based on Bioconductor Packages

  • Park, Seung-Jin;Kim, Jong-Hwan;Yoon, Byung-Ha;Kim, Seon-Young
    • Genomics & Informatics
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    • v.15 no.1
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    • pp.11-18
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    • 2017
  • Nowadays, huge volumes of chromatin immunoprecipitation-sequencing (ChIP-Seq) data are generated to increase the knowledge on DNA-protein interactions in the cell, and accordingly, many tools have been developed for ChIP-Seq analysis. Here, we provide an example of a streamlined workflow for ChIP-Seq data analysis composed of only four packages in Bioconductor: dada2, QuasR, mosaics, and ChIPseeker. 'dada2' performs trimming of the high-throughput sequencing data. 'QuasR' and 'mosaics' perform quality control and mapping of the input reads to the reference genome and peak calling, respectively. Finally, 'ChIPseeker' performs annotation and visualization of the called peaks. This workflow runs well independently of operating systems (e.g., Windows, Mac, or Linux) and processes the input fastq files into various results in one run. R code is available at github: https://github.com/ddhb/Workflow_of_Chipseq.git.

Serum Angiotensin-Converting Enzyme Levels in Coal Worker's Pneumoconiosis (탄광부 진폐증환자의 Angiotensin-Converting Enzyme 활성치)

  • Kim, Kyung-Dong;Choi, Myung-Sook;Lee, Chae-Hoon;Kim, Chung-Sook;Bae, Eun-Kyung
    • Journal of Yeungnam Medical Science
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    • v.6 no.1
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    • pp.109-119
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    • 1989
  • We measured fasting serum angiotensin -converting enzyme (SACE) in 100 healthy controls and 75 coal worker's pneumoconiosis (CWP) patients by a commercial kits($ACEcolor^{(R)}$, Fujirio Inc., Japan) and evaluated this manual method. The linear range extends to an activity of 80U/L. Precision on a commercial control serum (ACE control-$N^{(R)}$, Sigma Co.)with a mean value, of 9.47U/L yielded a within-run and between-run CVs are 5.6% (N=15) and 6.9% (N=14) respectively. SAVE in 75 CWP was $20.3{\pm}5.7U/L$ ($mean{\pm}s.d.$) ; higher than in healthy controls ($13.4{\pm}3.9U/L$, P<0.01). No correlation was found between SACE, sex, and age. The results suggest that the measurement of SACE and follow-up SACE in coal workers may be a useful diagnostic fools for CWP.

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Evaluation of Norudia® HbA1c Kit for Glycohemoglobin Assay (당화혈색소 측정을 위한 Norudia® HbA1c 키트의 평가)

  • Hong, Seung-Bok;Kim, Eun-Joong
    • Korean Journal of Clinical Laboratory Science
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    • v.41 no.1
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    • pp.37-41
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    • 2009
  • Measurement of hemoglobin A1c is used as an objective indicator of long-term blood glucose control in diabetic patients. We evaluated recently introduced Norudia$^{(R)}$ HbA1c (Daiichi Pure Chemical Co. Ltd, Tokyo, Japan) test reagent using enzyme method for HbA1c assay. Linearity, precision and correlation with VARIANT$^{TM}$ II Turbo HbA1c analyzer (BIO-RAD, Hercules, CA, USA) were evaluated. The reference range was determined from 201 healthy subjects. The Norudia$^{(R)}$ HbA1c test reagent was founded to be linear in a range of 5.6% to 14.0% ($r^2=0.9885$). The within-run and between-day precision were 0.954% and 1.03% for low level (HbA1c 5.24%), 0.67% and 1.28% for high level (HbA1c 9.01%), respectively. Comparison study between Norudia$^{(R)}$ HbA1c test reagent and VARIANT$^{TM}$ II Turbo showed good correlation with a slope of 1.0489. an intercept at -0.9717, and coefficient of correlation was 0.9907. The reference range of HbA1c obtained from this reagent was 4.07-5.50%. The Norudia$^{(R)}$ HbA1c test reagent showed good linearity, precision and correlation with HbA1c analyzer with HPLC method. In addition, the exclusive analyzer is not required for assay and then this kit may be useful for HbA1c assay in clinical laboratory.

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The Study for Implementation method of Concurrency Control for DataBase Flow Graphs (DBFG를 이용한 동시성제어 구현 방법에 관한 연구)

  • 남태희;위승민
    • Journal of the Korea Society of Computer and Information
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    • v.1 no.1
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    • pp.147-158
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    • 1996
  • This paper proposed a concurrency control structure based on specialized data flow graphs that was analysed a run-time concurrency control activity to be integrated with the task scheduler Data were viewed as flowing on the arcs from one node to another in a stream of discrete to tokens. The network that Is based upon the Entity-Relationship model, can be viewed a fixed problems used query tokens as a data flow graph. The performance was measured used in the various expriments compared the overall performance of the different concurrency control methods, DBFG (DataBase Flow graphs) scheduling had the knowledge to obtain better performance than 2PL in a distributed environment.

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