• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.22 no.8
• /
• pp.671-676
• /
• 2009

The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various deposition conditions. We investigated the effect of deposition condition on the surface morphology and dielectric properties of SBN thin films. The optimum of the rougness showed about 4.33 nm in 70/30 of Ar/$O_2$ ratio. The crystallinity and rougness of SBN thin films were increased with the increase of rf power. Also, Deposition rate of SBN thin films was about 4.17 nm/min in 70 W of rf power. The capacitance of SBN thin films were increased with the increase of Ar/$O_2$ ratio, rf power and deposition temperature respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.173-174
• /
• 2009

The SBN thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2/Si$) using RF sputtering method at various deposition conditions. The optimum conditions of RF power and $Ar/O_2$ ratio were 60[W] and 70/30, respectively. Also, The surface rougness showed about 4.33[nm] in RF power 60[W] and $Ar/O_2$ ratio 70/30.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.59 no.6
• /
• pp.1083-1086
• /
• 2010

The $Sr_{0.7}Bi_{2.3}Nb_2O_9$ thin films were deposited on Si substrate using RF magnetron sputtering method. And the SBN thin films were annealed at 650~800$[^{\circ}C$]. The surface rougness showed about 0.42[nm] in annealed thin film at $650[^{\circ}C$]. The dielectric constant(150) of SBN thin film was obtained by annealing temperature above $700[^{\circ}C$]. The voltage dependence of dielectric loss showed a value within 0.02 in voltage ranges of -10~＋10[V]. The dielectric constant characteristics showed a stable value with the increase of frequency. Also, the SBN thin films annealed at $750[^{\circ}C$] showed a fatigue-free characteristics up to $1.0\times10^8$ cycles.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.58 no.3
• /
• pp.544-547
• /
• 2009

The $Sr_{0.7}Bi_{2.3}Nb_{2}O_{9}$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various deposition temperature. The optimum conditions of RF power and Ar/$O_2$ ratio were 60[W] and 70/30, respectively. Deposition rate of SBN thin films was about 4.17[nm/min]. The crystallinity of SBN thin films were increased with increase of deposition temperature in the temperature range of $100{\sim}400[^{\circ}C]$, the surface rougness showed about 4.33[nm]. The capacitance of SBN thin films were increased with the increase of deposition temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2010.06a
• /
• pp.291-291
• /
• 2010

The SBN ceramic thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at substrate temperature of 300[$^{\circ}C$]. The grain and crystallinity of SBN thin films were increased with the increase of annealing temperature. The crystallinity of SBN thin films were increased with increase of annealing temperature in the temperature range of 600~800[$^{\circ}C$]. the surface rougness showed about 20 [nm].

• Journal of the Semiconductor & Display Technology
• /
• v.8 no.2
• /
• pp.11-14
• /
• 2009

The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various $Ar/O_2$ ratio. We investigated the effect of deposition condition(specially $Ar/O_2$ ratio) on the structural properties of SBN thin film. As $Ar/O_2$ ratio was increased, the peaks in the XRD pattern became more sharp. Also, the peaks(008)(115)(220) in 80/20 of $Ar/O_2$ ratio were suddenly appeared. The optimum of the rougness showed about 4.33 nm in 70/30 of $Ar/O_2$ ratio. The crystallinity of SBN thin films were increased with the increase of $Ar/O_2$ ratio. Also, Deposition rate of SBN thin films was about 4.17 nm/min in 70/30 of $Ar/O_2$ ratio. The capacitance of SBN thin films were increased with the increase of $Ar/O_2$ ratio.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.185-186
• /
• 2008

The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/SiO2/Si) using RF sputtering method at various substrate temperature. The optimum conditions of RF power and Ar/O2 ratio were 60[W] and 70/30, respectively. The rougness showed about 4.33[nm]. Deposition rate of SBN thin films was about 4.17[nm/min]. The capacitance of SBN thin films were increased with the increase of substrate temperature.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.31 no.8C
• /
• pp.786-794
• /
• 2006

We proposed a novel preconditioner based PCG(Preconditioned Conjugate Gradient) method for super resolution image reconstruction. Compared with the conventional block circulant type preconditioner, the proposed preconditioner can be more effectively applied for objective functions that include roughness penalty functions. The effectiveness of the proposed method was shown by simulations and experiments.

• Journal of Surface Science and Engineering
• /
• v.29 no.6
• /
• pp.745-752
• /
• 1996

Wear property of plasma spray coating in $Cr_2O_3$ powder manufatured of spray dry method on the aluminum substrate was inspected for the application of piston-ring of automotive enginel. The plama spray coatings were varied with feed rate and particle size. Used the ball-on disc type tribometer, wear volume, friction, surface rougness were investigated. The delamination of the coating layer were observed with SEM. Also the cross-section of wear track were investigated, using optical microscopy. As a result of experiment, wear mechanism was addressed in the various coating process.

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2006.09a
• /
• pp.43-44
• /
• 2006

The production method of micro sacrificial plastic mold insert metal injection molding, namely ${\mu}-SPiMIM$ process has been proposed to solve specific problems involving the miniaturization of MIM. Two types of sacrificial plastic molds (SP-mold) with fine structures were used: 1) PMMA resist, 2) PMMA mold injected into Ni-electroform, which is a typical LIGA (${\underline{L}}ithographie-{\underline{G}}alvanoformung-{\underline{A}}bformung$) process. Stainless steel 316L feedstock was injection-molded into the SP-molds with multi-pillar structures. This study focused on the effects of metal particle size and processing conditions on the shrinkage, transcription and surface roughness of sintered parts.