• 한국전기전자재료학회논문지
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• 제20권10호
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• pp.869-872
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• 2007

In this study, in order to develop low temperature sintering ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric actuators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. A ring-type piezoelectric actuator was modeled by ATILA program using finite element method(FEM). The piezoelectric actuator dimension was $\Phi26.5$ (outer diameter), $\Phi12$ (inner diameter), 3.5 mm (thickness). By FEM analysis, resonant and anti-resonant frequencies were appeared as 56.7 kHz and 61.5 kHz. The displacement increased with the increases of the number of layer. Based on the result, ring-type multilayer piezoelectric actuators were manufactured at low co-firing temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.578-582
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• 2007

In this paper, vibration modes and frequencies of a ring-type stacked piezoelectric actuator for a wire bonding transducer system are analyzed using FEM simulations. We implement experiments using a commercial product model of the actuator PZT module which consists of 6 layer ring-type PZT and 7 electrodes, combined bolts, nut and tinut. There are two main results: One is that FEM analysis should consider the effect the harmonic voltage input in order to meet the experimental results. The other is that the current wire bonder using exciting frequency of 136 kHz should be modified in order to improve the actuator and bonding performance because the actuator module has the main longitudinal mode of 145 kHz.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.299-299
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• 2007

This paper presents an omni-directional piezoelectric actuator which utilizes only one actuator. The actuator has a simple structure of cone type consists of two piezoelectric ceramics of ring type and electrodes divided four segments and a stainless steel body. To find the optimal operating condition of the actuator, the frequency characteristics of the actuator are analyzed by ATILA, FEM and measured by Impedance Analyzer. We have also developed a stage using the omni-directional actuator and an actuator driver circuit to create four sinusoidal waves with a variable frequency and phase difference.

• 한국전기전자재료학회논문지
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• 제22권5호
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• pp.405-410
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• 2009

The conventional ultrasonic nozzle produces a mist by applying an ultrasonic vibration into a non-flowering liquid. In this paper, we first present a novel designed nozzle type sprayer that is able to apply an ultrasonic vibration directly to the moving liquid and generate a mist instantly. For the novel nozzle, a ring-type actuator of the novel nozzle was designed and built using the PZW-PMN-PZT ceramics. This paper will describe a variety of physical, mechanical, and electrical characteristics of the ultrasonic nozzle. The characteristics of the mist particles was also measured as the amount of the outflow liquid was varied.

• 정보저장시스템학회논문집
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• 제2권4호
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.190-194
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• 2005

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile camera phones. However, conventional magnetic coils of electromagnetic motors are a major obstacle for miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM (ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 1.52 mm/s at 10 kHz input signal in 5 V.

• Transactions on Electrical and Electronic Materials
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• 제11권2호
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.

• 대한기계학회논문집A
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• 제38권2호
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• pp.227-233
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• 2014

본 논문은 상용화된 와이어 본딩용 초음파 혼 시스템에서 발생하는 와이어 본딩 불량의 원인을 진동해석을 통하여 파악하고자 한다. 먼저 링 형상의 압전 구동기와 초음파 혼 그리고 캐필러리 등 각 부품의 진동 특성과 136kH의 가진 주파수 근처에서 발생하는 전체 초음파 혼 시스템의 주요 진동 모드들을 유한요소해석을 이용하여 구하였다. 136kHz에서 공진되는 전체 트랜스듀서 시스템의 진동 모드가 종진동 모드가 아닌 굽힘 진동 모드임을 조화 가진 해석과 실험으로 확인하였다. 136kHz에서 발생하는 굽힘 진동 모드는 캐필러리 끝단의 움직임이 종방향 뿐만 아니라 좌우 횡방향으로도 큰 변위가 발생하기 때문에 정밀 작업 시 본딩 불량의 원인이 될 수 있다. 가진 주파수 대역 근처인 119kHz에서 발생하는 종진동 모드는 캐필러리의 횡방향 진동이 감소하기 때문에 본딩 성능의 향상을 위해서 이러한 종진동 모드를 이용하도록 설계 변경이 필요함을 제시하였다.