[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2010.11.2.065

Design of a Valveless Type Piezoelectric Pump for Micro-Fluid Devices

Kim, Hyun-Hoo (Department of Display Engineering, Doowon Technical University College)
Oh, Jin-Heon (College of Electrical and Computer Engineering, Chungbuk National University)
Yoon, Jae-Hun (College of Electrical and Computer Engineering, Chungbuk National University)
Jeong, Eui-Hwan (College of Electrical and Computer Engineering, Chungbuk National University)
Lim, Kee-Joe (College of Electrical and Computer Engineering, Chungbuk National University)

Publication Information

Transactions on Electrical and Electronic Materials / v.11, no.2, 2010 , pp. 65-68 More about this Journal

Abstract

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$ . We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.

Keywords

Piezoelectric micro-pump; Valveless pump; Extensional vibration mode; Peristaltic motion;

Citations & Related Records

Reference

1	K. J. Lim, S. Y. Lee, J. S. Lee, M. J. Lee, and S. H. Kang, J. Electroceram. 13, 449 (2004) [DOI: 10.1007/s10832-004-5140-9]. DOI
2	E. Stemme and G. Stemme, Sens. Actuators A 39, 159 (1993) [DOI: 10.1016/0924-4247(93)80213-z]. DOI
3	J. C. Rife, M. I. Bell, J. S. Horwitz, M. N. Kabler, R. C. Y. Auyeung, and W. J. Kim, Sens. Actuators A 86, 135 (2000) [DOI: 10.1016/s0924-4247(00)00433-7]. DOI
4	M. M. Teymoori and E. Abbaspour-Sani, Sens. Actuators A 117, 222 (2005) [DOI: 10.1016/j.sna.2004.06.025]. DOI ScienceOn
5	T. Sashida and T. Kenjo, An introduction to ultrasonic motors (Oxford University Press, Oxford, 1993). p. 127.
6	P. Woias, Proc. SPIE, vol. 4560: microfluidics and bioMEMS (San Francisco, CA, USA 2001 Oct. 23, International Society for Optical Engineering) p. 39. [DOI: 10.1117/12.443069]. DOI
7	Y. Bar-Cohen and Z. Chang, Proc. SPIE, vol. 3992 (Newport Beach, CA, USA 2000 Mar. 3, International Society for Optical Engineering) p. 669. [DOI: 10.1117/12.388190]. DOI
8	T. Sashida and T. Kenjo, An introduction to ultrasonic motors (Oxford University Press, Oxford, 1993). p. 10.