• Korean Journal of Optics and Photonics
• /
• v.4 no.1
• /
• pp.15-21
• /
• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Journal of the Society of Disaster Information
• /
• v.14 no.4
• /
• pp.466-473
• /
• 2018

Purpose: Nowadays, it is the trend that seismic isolation method and combined method are used for seismic retrofitting, if concrete sphere foundation(CSF) system is applied to mid and low rise RC structure for the seismic isolation, the characteristics of concrete sphere, etc split tensile strength will be need. Method: The various experiments are carried out to know the split strength of high strength concrete sphere(60Mpa) and the ratio of split strength of concrete sphere to standard cylinder specimen, the size effect of concrete sphere with diameter. Results: It was purposed that the split strength of concrete sphere with diameter 150mm will be lower than that of cylinder specimen but, the average value is 4.39 Mpa and the ratio is higher than that of cylinder specimens, each 3.8% and 13.7%, the reason of this result is thought that the internal stress action of spot load and line load are different. Conclusion: There is a standard method for split tensile strength of cylinder type specimen, but there are few studies for the tensile split of concrete sphere. And therefore, in this study, theoretical and experimental details of concrete sphere will be served for the concrete sphere foundation or other sequent studies.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.26 no.6
• /
• pp.54-63
• /
• 2022

This paper is a study on the friction damper, which is one of the seismic reinforcement devices for structures. This study developed a damper by replacing the internal friction material with ultra high molecular weight polyethylene (UHMWPE), a type of composite material. In addition, this study applied a multi-friction method in which the internal structure where frictional force is generated is laminated in several layers. To verify the performance of the developed multi-friction damper, this study performed a characteristic analysis test for the basic physical properties, wear characteristics, and disc springs of the material. As a result of the wear test, the mass reduction rate of UHMWPE was 0.003%, which showed the best performance among the friction materials based on composite materials. Regarding the disc spring, this study secured the design basic data from the finite element analysis and experimental test results. Moreover, to confirm the quality stability of the developed multi-friction damper, this study performed an seismic load test on the damping device and the friction force change according to the torque value. The quality performance test result showed a linear frictional force change according to the torque value adjustment. As a result of the seismic load test, the allowable error of the friction damper was less than 15%, which is the standard required by the design standards, so it satisfies the requirements for seismic reinforcement devices.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.29 no.6D
• /
• pp.693-702
• /
• 2009

In the Seoul metropolitan area (SMA), transportation sector is the largest source of air pollutant emissions. Of the total amount of air pollutant emissions in the SMA, about 52% of the particulate matter emissions and 59% of the nitrogen oxide emissions are from superannuated heavy diesel vehicles. To lessen the air pollutant emissions from superannuated heavy vehicles in the SMA, this study devised several strategies for operating Environmental Zone (EZ) program, which requires superannuated heavy diesel vehicles to install reduction equipments as well as restricts them entering part of the SMA, and evaluated the effects of different strategies on air pollution in the SMA. By using the Korean traffic statistics, an evaluation has been made of six EZ scenarios, which were devised by different target areas and vehicles. The results showed that the EZ program with retrofitting a DPF (Diesel Particulate Filter) equipment to 7-year-old heavy diesel vehicles and early scrapping of pre-1998 heavy diesel vehicles is the most efficient alternative in terms of air pollution reduction. In addition, the results showed that the magnitude of air pollution reduction increases when implementing the EZ program to all entering superannuated heavy diesel vehicles to the SMA rather than registered ones in the SMA.

• The Journal of Engineering Geology
• /
• v.33 no.4
• /
• pp.599-609
• /
• 2023

In the seismic retrofitting of harbor breakwaters in Korea, the recovery rate is often uncertain due to site conditions and site conditions, and problems continue to arise. Therefore, in this study, we analyzed the recovery rate and compressive strength of the improved material through drilling survey by grouting confirmation method after applying low-fluidity mortar injection method, and furthermore, we checked the elastic modulus by downhole test and tomography to confirm the reinforcement effect of soft ground after ground improvement. The experimental results showed that the average shear wave velocity of the ground increased from 229 m/s to 288 m/s in BH-1 and BH-3 boreholes to a depth of 28.0 m, and the average shear wave velocity of the ground to a depth of 30.0 m tended to increase from 224 m/s to 282 m/s in the downhole test. This is believed to be a result of the increased stiffness of the ground after reinforcement. The results of the tomographic survey showed that the Vs of the soft ground of the sample at Site 1 increased from 113 m/s to 214 m/s, and the Vs of the sample at Site 2 increased from 120 m/s to 224 m/s. This shows that the stiffness of the ground after seismic reinforcement is reinforced with hard soil, as the Vs value satisfies 180 m/s to 360 m/s in the classification of rock quality according to shear wave velocity.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.27 no.6
• /
• pp.70-78
• /
• 2023

The ordinary concentrically braced frame has an advantage of having simple design procedure. For this reason, it has been widely used for the small-sized frame structures subject to moderate or lower magnitude earthquake, even though its seismic performance against the earthquake load is not much effective compared to that of other frame systems. To enhance seismic performance of the ordinary concentrically braced frame where the bracing has a weakness for compressive behavior under lateral earthquake, seismic retrofitting by viscous damper has been commonly introduced. However, the viscous damper, itself, generally does not have stiffness for restoring the structure to the original position. This may cause residual displacement to the structure. In this paper, a self-centering viscous damper system in which upper and lower beams having flexural rigidity play a role as a nonlinear-elastic spring, restoring the spring-damper system subject to external displacement history to its original location, is developed. The numerical analysis for a simplified frame structure shows how including the developed self-centering viscous damper system leads to an enhanced seismic performance of the frame structure through energy dissipation during earthquake excitation.

• The Journal of Korean Academy of Prosthodontics
• /
• v.62 no.2
• /
• pp.140-145
• /
• 2024

Removable partial denture wearers are exposed to the risks that remaining teeth get damaged by caries, attritions, erosion, and fracture. In the case of damaged abutment tooth which should fit to Removable partial denture (RPD), the fabrication of surveyed crown is followed by the making of RPD. However, making new denture takes a long time, and needs several processes and costs. Also, patients should get used to new denture. If other abutment teeth and edentulous ridges provide the existing denture with support, retention, and stability, use of existing denture is considered clinically acceptable. In this situation, fabricating retrofit crowns to an existing removable partial denture makes patient use existing denture, cuts costs, and reduces discomfort. In this case, severely worn teeth were restored using monolithic zirconia crown which fit to an existing removable partial denture by CAD-CAM. Moreover, support, retention, and stability of the denture were improved, and both doctor and patient were satisfied with the result.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.28 no.2
• /
• pp.43-52
• /
• 2024

In this study, we evaluated the seismic performance of a masonry building that was not designed to be earthquake-resistant and attempted to improve the seismic performance by adopting a seismic reinforcement method on the exterior of the building. In addition, the building seismic design standards and commentary(KDS 41 17 00:2019) and existing facility(building) seismic performance evaluation methods were applied to evaluate seismic performance, and a pushover analysis was performed using non-linear static analysis. As the result of this study, it was determined that seismic reinforcement was urgent because the distribution rate of earthquake-resistant design of houses in Korea was low and masonry structures accounted for a large proportion of houses. When reinforcing the steel beam-column+brace frame in a masonry building, the story drift angle was 0.043% in the X direction and 0.047% in the Y direction, indicating that it satisfied the regulations. The gravity load resistance capacity by performance level was judged to be a safe building because it was habitable in both X and Y directions. In conclusion, it is believed that the livability and convenience of the house can be secured by reinforcing the exterior of the building and the seismic performance and behavior of the structure can be clearly predicted.

• Korean Chemical Engineering Research
• /
• v.52 no.4
• /
• pp.503-515
• /
• 2014

A lot of existing wastewater treatment plants (WWTPs) are rebuilt or retrofitted for advanced wastewater treatment processes to cope with reinforced effluent criteria of nitrogen and phosphorous. Moreover, how to treat the wasted sludge from WWTPs has been also issued since the discharge of the wasted sludge into ocean is impossible from 2011 due to the London Convention 97 protocol. These trend changes of WWTPs get a motivation to assess environmental and economic impacts from the construction stage to the waste stage in WWTPs. Therefore, this study focuses on evaluation of environmental and economic impacts of the advanced wastewater treatment processes and waste sludge treatment process by using life cycle assessment. Four advanced wastewater treatment processes of Anaerobic/Anoxic/Oxic ($A_2O$), 5 stages-Bamard Denitrification Phosphate (Bardenpho), Virginia Initiative Plant (VIP), and Modified University of Cape Town (MUCT) are chosen to compare the conventional activated sludge (CAS) and three waste sludge treatment methods of land fill, incineration, and composting are used. To evaluate environmental and economic impacts of each advanced wastewater treatment processes, life cycle assessment (LCA) and life cycle cost (LCC) are conducted based on International organization for standardization (ISO) guidelines. The results clearly represent that the $A_2O$ process with composting shows 52% reduction in the environmental impact than the CAS process with landfill. On the other hand, the MUCT process with composting is able to save 62% of the life cycle cost comparing with the CAS process with landfill. This result suggested the qualitative and quantitative criteria for evaluating eco-environmental and economic technologies of advanced treatment processes and also sludge treatment method, where their main influence factors on environmental and economic impacts are analyzed, respectively. The proposed method could be useful for selecting the most efficient and eco-friendly wastewater treatment process and sludge treatment method when retrofitting the existing WWTPs to advanced treatments.