• Journal of the Korean Society of Mechanical Technology
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• v.13 no.4
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• pp.93-99
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• 2011

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

• International Journal of Precision Engineering and Manufacturing-Green Technology
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• v.5 no.5
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• pp.571-581
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• 2018

In the present study, monitoring of elliptical vibration cutting process by utilizing internal data in the ultrasonic elliptical vibration device without external sensors such as a dynamometer and displacement sensor is investigated. The internal data utilized here is the change of excitation frequency, i.e. resonant frequency of the device, voltages applied to the piezoelectric actuators composing the device, and electric currents flowing through the actuators. These internal data change automatically in the elliptical vibration control system in order to keep a constant elliptical vibration against the change of the cutting process. Correlativity between the process and the internal data is described by using a vibration model of ultrasonic elliptical vibration cutting and verified by several experiments, i.e. planing and mirror surface finishing of hardened die steel carried out with single crystalline diamond tools. As a result, it is proved that it is possible to estimate the elements of elliptical vibration cutting process, e.g. tool wear and machining load, which are important for stable cutting in such precision machining.

• Progress in Superconductivity and Cryogenics
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• v.22 no.4
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• pp.10-13
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• 2020

High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• Journal of Sensor Science and Technology
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• v.11 no.6
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• pp.335-341
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• 2002

In this paper, we investigated a novel UV sensor using evanescent field coupling between the side polished fiber and photo-functional polymer waveguide. It was found that resonant wavelength shifts occur due to variation in the refractive index of polymer planar waveguide for its photo-functional properties on exposed UV. Spiroxazine (photochromic dye) was used as the planar waveguide. The resonant wavelength responses were exhibited at 1.44 nm/mW, 1.64 nm/mW, and 1.78 nm/mW when UV irradiations were exposed for 20 seconds, 30 seconds, and 40 seconds, respectively. The recovery time of sensor was independent of UV exposure power and 90% recovery time was 100 seconds.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.2
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• pp.155-158
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• 2017

With the help of technical development in the electronic industries, the electronic devices employing the cutting-edged technology are spread in all the area requiring electromagnetic communications. Especially, because of the presence of electronic devices in a variety of research fields like automotive vehicle, train, and aircraft, the research area such as the malfunction and critical damage of the internal system and microwave devices due to the unexpected radiated high-powered EM effects are very important even for the possible occurrence of human damage. In this paper, the effects of electromagnetic fields into the cable connecting the electronic devices and many sensors inside the target structure is treated because of potential malfunction or hardware disorders. In addition, correlation function and transmission line theory have been employed for the analysis of the induced current on the cable inside an electrically large resonant structure.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.835-841
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• 2013

Modern solid-state gyroscopes (HRG) with hemispherical resonators from high-purity quartz glass and special surface superfinishing and ultrathin gold coating become the best instruments for precise-grade inertial reference units (IRU) targeting long-term space missions. Designing of these sensors could be a notable contribution into development of Korea as a space nation. In participial, 40mm diameter thin-shell resonator from high-purity fused quartz, fabricated as a single-piece with its supporting stem has been designed, machined, etched, tuned, tested, and delivered by STM Co. (ATS of Ukraine) several years ago; an extremely-high Q-factor (upto 10~20 millions) has been shown. Understanding of the best way how to match such a unique sensor with inner glass assembly of the gyro means how to use the high potential in a maximal extent; and this has become the urgent task. Inner quartz glass assembly has a very thin indium (In) layer soldered the resonator and its silica base (case), but effects of internal resonances between operational modal pair of the shell-cup and its side (parasitic) modes can notable degrade the potential of the sensor as a whole, instead of so low level of resonator's intrinsic losses. Unfortunately, there are special combinations of dimensions of the parts (so-called, "resonant sizes"), when intensive losses of energy occurs. The authors proposed to use the length of stem's fixture as an additional design parameter to avoid such cases. So-called, a cyclic scheme of finite element method (FEM) and ANSYS software were employed to estimate different combinations of gyro assembly parameters. This variant has no mismatches of numerical origin due to FEM's discrete mesh. The optimum length and dangerous "resonant lengths" have been found. The special attention has been paid to analyses of 3D effects in a cup-stem transient zone, including determination of a difference between the positions of geometrical Pole of the resonant hemisphere and of its "dynamical Pole", i.e., its real zone of oscillation node. Boundary effects between the shell (cup) and 3D short "beams" (inner and outer stems) have been ranged. The results of the numerical experiments have been compared with the classic model of a quasi-hemispherical shell band with inextensional midsurface, and the solution using Rayleigh's functions of the $1^{st}$ and $2^{nd}$ kinds. To guarantee the truth of the recommended sizes to a designer of the real device, the analytical and FEM results have been compared with experimental data for a party of real resonators. The consistency of the results obtained by different means has been shown with errors less than 5%. The results notably differ from the data published earlier by different researchers.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.368-376
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• 1999

This paper predicts the changes in the spring constant, the resonant frequency, the electrostatic force, and the displacement of a resonant structure due to non-ideal anisotropic RIE etching process. First, a $6\;{\mu}m$ thick polysilicon was etched by RIE and the anisotropy of the etched structure was measured as a function of a RF power, a $Cl_2$ flow rate and a chamber pressure. In the experimental results, an anisotropy was decreased as the RF power, the $Cl_2$ flow rate, or the chamber pressure was increased. A comb actuator's operation characteristic was predicted depending on the anisotropy variations in RIE etching. Comb actuators with three different support beam structures were investigated : fixed-fixed, crab-leg, and double crab-leg. As the RIE etch anisotropy becomes non-ideal, i.e. the cross section becomes rather a trapezoidal than a rectangular shape, it decreases spring constant, resonant frequency and electrostatic force of a comb actuator but it increases the displacement of the mass. Among the three structures, the comb actuator with double crab-leg support beams is more influenced by anisotropy variation in RIE etch than other two.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.47 no.2
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• pp.1-7
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• 2010

This paper presents empirical equations indicating the high frequency performance characteristics of air-cored induction coil sensors with their constructional parameters. An air-cored induction coil sensor is widely used due to good linearity at low frequency ranges but the sensor has weakness of relatively low sensitivity to the magnetic field. At high frequency ranges, the sensitivity can be dramatically increased, largely depending on the frequency of the injected field, and this property can be a great asset to some electromagnetic inspections, since they utilize the interrogating current with a fixed frequency. The application of this property of the coil sensor requires the estimation of its high frequency performance. We made experiments on the frequency responses of the coil sensors under diverse constructional conditions and, on the basis of the experimental results, the high frequency performance, such as the resonant frequency and the sensitivity at the frequency, was estimated, as a function of the constructional parameters of the coil sensor. The good agreements between experimental and estimated data were reported.

• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.235-238
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• 2017

In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.