• Journal of Sensor Science and Technology
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• v.25 no.2
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• pp.116-123
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• 2016

This paper presents the fabrication and evaluation of the novel drag force type air flowmeter using MEMS technologies for the vehicle applications. To obtain the air drag force, the flowmeter utilized the curved beam structure, which was realized by the difference of residual stress between the silicon oxide layer and the silicon nitride layer. The paddle structure was applied for the maximum air drag force, and the dual-beam was adapted to prevent distortion. The basic experiments were performed in the wind tunnel, and the stable outputs were obtained. The device was applied to the internal combustion engine, and the results were compared with the HI-DS output where the convection thermal flowmeter was used as the reference sensor. The results indicated that the comparable resolutions and response times were obtained under the various engine speeds.

• Journal of the Korean Vacuum Society
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• v.11 no.4
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• pp.225-229
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• 2002

LPCVD silicon films were deposited at temperatures between $560^{\circ}C$ and $650^{\circ}C$ Structure, surface roughness, films thickness and residual stress were measured by using XRD, SEM, ellipsometer, $Tektak^3$, Tencor FLX-2320 and other techniques. Polysilicon films of low stress, small surface roughness were obtained when the films are deposited at $560^{\circ}C$ in the amorphous phase and subsequently annealed to make polycrystalline silicon layers at $900^{\circ}C$ -$1100^{\circ}C$. The silicon films deposited in amorphous phase and crystallized by post thermal treatment showed better mechanical properties.

• Current Photovoltaic Research
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• v.6 no.1
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• pp.27-30
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• 2018

The dependency of the electrical characteristics of silicon solar-cells on the depth of damaged layer induced by wire-sawing process was investigated. To compare cell efficiency with residual sawing damage, silicon solar-cells were fabricated by using as-sawn wafers having different depth of saw damage without any damaged etching process. The damaged layer induced by wire-sawing process in silicon bulk intensely influenced the value of fill factor on solar cells, degrading fill factor to 57.20%. In addition, the photovoltaic characteristics of solar cells applying texturing process shows that although the initial depth of saw-damage induced by wire-sawing process was different, the value of short-circuit current, fill-factor, and power-conversion-efficiency have an almost same, showing ~17.4% of cell efficiency. It indicated that the degradation of solar-cell efficiency induced by wire-sawing process could be prevented by eliminating all damaged layer through sufficient pyramid-surface texturing process.

• Korean Chemical Engineering Research
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• v.46 no.2
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• pp.389-396
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• 2008

The effect of thermal cycling on bond strength and residual stress at the interface between benzocyclobutene (BCB) and plasma enhanced chemical vapor deposited (PECVD) silicon dioxide ($SiO_2$) coated silicon wafers were evaluated by four point bending and wafer curvature techniques. Wafers were bonded using a pre-established baseline process. Thermal cycling was done between room temperature and a maximum peak temperature. In thermal cycling performed with 350 and $400^{\circ}C$ peak temperature, the bond strength increased substantially during the first thermal cycle. The increase in bond strength is attributed to the relaxation in residual stress by the condensation reaction of the PECVD $SiO_2$: this relaxation leads to increases in deformation energy due to residual stress and bond strength.

• Tribology and Lubricants
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• v.31 no.4
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• pp.157-162
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• 2015

In this study, an ultrasonic nanocrystalline surface modification (UNSM) technique is applied to tungsten carbide-cobalt (WC-Co) to extend the service life of carbide parts used in press mold. The UNSM technique modifies the structure, reduces the surface roughness, increases the surface hardness, induces the compressive residual stress, and increases the wear resistance of materials by introducing severe plastic deformation. The surface roughness, hardness, and compressive residual stress of WC after UNSM treatment improve by about 42, 10, and 71%, respectively. A wear test under dry conditions is used to assess the effectiveness of the UNSM technique on the friction and wear behavior of WC. The UNSM technique is found to reduce the WC friction coefficient by approximately 21% and enhance the wear resistance by approximately 85%. The improved friction and wear behavior of WC may be mainly attributed to the increased hardness and compressive residual stress. Moreover, the WC specimen is treated by UNSM technique using three different WC, silicon nitride (Si₃N₄) and stainless steel (STS304) balls. The surface treated by WC balls shows the highest hardness when compared with treatment by stainless steel and silicon nitride balls. According to the obtained results, the UNSM technique is believed to increase the durability of the carbide component by improving the friction and wear behavior.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.2
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• pp.520-528
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• 1996

Four point bending tests of the brazed joint composed of sintered silicon nitride and 0.2% carbon steel with Cusil ABA filler which were fabricated at 86$0^{\circ}C$ were performed at temperatures, 25, 100, 200, 300, 400, 50$0^{\circ}C$ From the experiments, the maximum bending strength was measured at 30$0^{\circ}C$ From the 3D FE analysis of the residual stress of the brazed joint, it was revealed that the thermally induced residual stresses were minimized when the environmental temperature was 35$0^{\circ}C$ Considering the degradation of the filler material at high temperatures, it was calculated that the maximum bending strength of the brazed joint occured just below the temperature of the minimum thermal residual stress and the thermal residual stress was the dominative parameter of the brazed joint.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.612-614
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• 1997

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.

• Journal of electromagnetic engineering and science
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• v.6 no.2
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• pp.135-145
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• 2006

This paper presents the theory, design, fabrication and characterization of the novel low actuation voltage capacitive shunt RF-MEMS switch using a corrugated membrane with HRS MEMS packaging. Analytical analyses and experimental results have been carried out to derive algebraic expressions for the mechanical actuation mechanics of corrugated membrane for a low residual stress. It is shown that the residual stress of both types of corrugated and flat membranes can be modeled with the help of a mechanics theory. The residual stress in corrugated membranes is calculated using a geometrical model and is confirmed by finite element method(FEM) analysis and experimental results. The corrugated electrostatic actuated bridge is suspended over a concave structure of CPW, with sputtered nickel(Ni) as the structural material for the bridge and gold for CPW line, fabricated on high-resistivity silicon(HRS) substrate. The corrugated switch on concave structure requires lower actuation voltage than the flat switch on planar structure in various thickness bridges. The residual stress is very low by corrugating both ends of the bridge on concave structure. The residual stress of the bridge material and structure is critical to lower the actuation voltage. The Self-alignment HRS MEMS package of the RF-MEMS switch with a $15{\Omega}{\cdot}cm$ lightly-doped Si chip carrier also shows no parasitic leakage resonances and is verified as an effective packaging solution for the low cost and high performance coplanar MMICs.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.119-126
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• 1999

The rolling fatigue lives (RFL) of five kinds of silicon nitride balls were investigated. Four kinds of Si$_3$N$_4$ balls were fabricated using different raw materials, sintering aids and sintering conditions, Commercially available Si3N4 ball was also studied for comparison. All the balls were finished up to the dimensional accuracy of Grade 10 defined in KS B 2001 (Steel Balls for Ball Bearings) with a size of 9.525mm. RFL tests were then conducted under the initial theoretical maximum contact stress 6.38 GPa and the spindle speed 10,000 rpm. Gear oil was provided by oiled race as lubricant. The results of RFL test indicated the prerequisitic conditions for the long rolling life of Si$_3$N$_4$ball : (1) the high density, (2) mjcrostructures consisted of small uniformly distributed grains, (3) little glassy phase in grainboundary, and (4) little crystalline phase and secondary phase that induces residual thermal stress due to the differences of thermal expansion coefficient with Si$_3$N$_4$Phase.

• The Korean Journal of Ceramics
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• v.1 no.1
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• pp.45-54
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• 1995

Four kinds of silicon nitride based ceramic materials have been hot pressed. Effect of the sintering additives on the phase transformation, microstructural development and mechanical properties was investigated. While sintering under the same condition a big difference among the microstructures of the specimens, they appeared alike if sintered to have a similiar $\alpha$-$\beta$ phase ratio. The specimen of the stoichiometric $\alpha$-$\beta$ sialon composition showed very limited amount of the intergranular glassy phase and a significant degree of the residual stress. It exhibited almost no strength degradation up to $1300^{\circ}C$, and the strength of the specimen degraded more as its composition deviated from the stoichiometry.