• Title/Summary/Keyword: Removal process

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Studies on Cu Dual-damascene Processes for Fabrication of Sub-0.2${\mu}m$ Multi-level Interconnects (Sub-0.2${\mu}m$ 다층 금속배선 제작을 위한 Cu Dual-dmascene공정 연구)

  • Chae, Yeon-Sik;Kim, Dong-Il;Youn, Kwan-Ki;Kim, Il-Hyeong;Rhee, Jin-Koo;Park, Jang-Hwan
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.12
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    • pp.37-42
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    • 1999
  • In this paper, some of main processes for the next generation integrated circuits, such as Cu damascene process using CMP, electron beam lithography, $SiO_2$ CVD and RIE, Ti/Cu-CVD were carried cut and then, two level Cu interconnects were accomplished. In the results of CMP unit processes, a 4,635 ${\AA}$/min of removal rate, a selectivity of Cu : $SiO_2$ of 150:1, a uniformity of 4.0% are obtained under process conditions of a head pressure of 4 PSI, table and head speed of 25rpm, a oscillation distance of 40 mm, and a slurry flow rate of 40 ml/min. Also 0.18 ${\mu}m\;SiO_2$ via-line patterns are fabricated using 1000 ${\mu}C/cm^2$ dose, 6 minute and 30 second development time and 1 minute and 30 second etching time. And finally sub-0.2 ${\mu}$ twolevel metal interconnects using the developed processes were fabricated and the problems of multilevel interconnects are discussed.

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Separation of Dark and Ordinary Muscle with Specific Gravity Controlled Sugar Solutions (당용액비중조절에 의한 보통육과 혈합육의 분리에 관한 연구)

  • KIM Woo-Jun;LEE Kang-Ho
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.15 no.3
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    • pp.185-190
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    • 1982
  • In utilization of small size red muscled fishes like mackerel, sardine, and filefish, mechanical dressing is usually required. The removal of dark muscle is also necessary to improve qualify of the product, which could hardly be done by mechanical process. As a method of separating dark muscle, specific gravity method using sugar solution was investigated in this study. And the effects of the level of specific gravity, the size and density of meat particles, and stability of meat particle float on the separation of dark muscle were discussed. From the results, effective specific gravity, in case of sucrose solution, ranged 1.067 to 1.072 for mackerel, 1.062 to 1.070 for sardine, and 1.072 to 1.077 for filefish, respectively. The maximum separation of more than $90\%$ was obtained at specific gravity of 1.075, 1.070, and 1.075 in cases of mackerel, sardine and filefish, respectively. The size of meat particles which were ground with 0.2cm orifice plate was adequate to yield $90\%$ separation or above. The meat particle float in the glucose solution began to precipitate within 5 minutes after separation while 25 minutes in case of sucrose solution. Lipids were also fairly removed by the dark muscle separation process.

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Recovery of Cobalt from Synthetic Leaching Solution of Manganese Nodule Matte by Solvent Extraction-electrowinning (용매추출-전해채취법에 의한 망간단괴 매트상 모의 침출용액으로부터 코발트 회수)

  • Kim, Hyun-Ho;Nam, Chul-Woo;Park, Kyung-Ho;Yoon, Ho-Sung;Kim, Min-Seuk;Kim, Chul-Joo;Park, Sang-Woon
    • Resources Recycling
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    • v.25 no.2
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    • pp.33-41
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    • 2016
  • A scale up tests (380 kg/day) using a continuous solvent extraction and electro-winning system was carried out to separate and recover cobalt from a solution containing 1.91 g/L Co and 14.65 g/L Ni. The solution was obtained during a process including solvent extraction and precipitation stages for removal of Cu and Fe from a synthetic sulfuric acid solution of manganese nodule matte. The optimal condition for solvent extraction was : solvent concentration of 0.22M Na-Cyanex 272 (45% saponified with NaOH) and O:A phase ratios of 1:1.5, 10:1 and 1.5:1 used in extraction, scrubbing and stripping stages, respectively. The extraction and stripping efficiencies were found to be 99.8% and 99.88%, respectively. The stripped solution contained 40.27 g/L Co with 4 ppm Ni. Cobalt metal of 99.963% purity was yielded with current efficiency of 67% and current density of $0.563A/dm^2$ during the electro-winning process.

Applicability of Washing Techniques Coupled with High-Pressure Air Jet for Petroleum-contaminated Soils (고압공기분사를 이용한 유류오염토양 세척기법의 적용성 연구)

  • Choi, Sang-Il;Kim, Kang-Hong
    • Journal of Soil and Groundwater Environment
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    • v.11 no.6
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    • pp.61-68
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    • 2006
  • Soil washing techniques coupled with high pressure air jet were applied for diesel-contaminated soils sampled by an underground oil reservoir of which the initial total petroleum hydrocarbon (TPH) ($2,828{\pm}206\;mg/kg$) exceeded 5 times of current standard level (500 mg/kg) regulated by the Soil-Environment Conservation Law. Through several tests, we found that the position of impeller has a critical impact for washing efficiencies. The highest washing efficiency was obtained at an oblique angle (30 degree) for the impeller and optimized mixing speed (300 rpm) that could have high shearing forces. Considered economical and feasible aspects, the optimum mixing time was 10 min. Rate constants of TPH removal derived from the first-order equation were not linearly increased as mixing speed increased, indicating that mechanical mixing has some limits to enhance the washing efficiencies. Application of high-pressure air jet in washing process increased the washing efficiency. This increase might be caused by the fact that the surface of micro-air bubbles strongly attached hydrophobic matters of soil particles. As the pressure of air jet increased, the separation efficiencies of TPH-contaminated soil particles increased. In the combined process of high-pressure air jet and mixing by impeller, the optimum mixing speed and air flow-rate were determined to be 60 rpm and $2\;kg/cm^2$, respectively. Consequently, the washing technique coupled with high-pressure air jet could be considered as a feasible application for remediating petroleum-contaminated soils.

Comparative Inactivation of Hepatitis A Virus and Murine Encephalomyocarditis Virus to Various Inactivation Processes (바이러스 불활화 공정에 대한 Hepatitis A Virus와 Murine Encephalomyocarditis Virus의 민감도 비교)

  • Kim, In-Seop
    • Korean Journal of Microbiology
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    • v.39 no.4
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    • pp.242-247
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    • 2003
  • Murine encephalomyocarditis virus (EMCV) has been used as a surrogate for hepatitis A virus (HAV) for the validation of virus removal and/or inactivation during the manufacturing process of biopharmaceuticals. Recently international regulation for the validation of HAV safety has been reinforced because of the reported cases of HAV transmission to hemophiliac patients who had received ntihemophilic factors prepared from human plasma. The purpose of the present study was to compare the resistance of HAV and EMCV to various viral inactivation processes and then to standardize the HAV validation method. HAV was more resistant than EMCV to pasteurization (60oC heat treatment for 10 hr), low pH incubation (pH 3.9 at 25oC for 14 days), 0.1 M NaOH treatment, and lyophilization. EMCV was completely inactivated to undetectable levels within 2 hr of pasteurization, however, HAV was completely inactivated to undetectable levels after 5 hr treatment. EMCV was completely inactivated to undetectable levels within 15 min of 0.1 M NaOH treatment, however, residual infectivity of HAV still remained even after 120 min of treatment. The log reduction factors achieved during low pH incubation were 1.63 for HAV and 3.84 for EMCV. Also the log reduction factors achieved during a lyophilization process of antihemophilic factor VIII were 1.21 for HAV and 4.57 for EMCV. These results indicate that HAV rather than EMCV should be used for the virus validation study and the validation results obtained using EMCV should be precisely reviewed.

Sintering Mixtures in the Stage of Establishing Chemical Equilibrium

  • Savitskii, A.P.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 1999.04a
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    • pp.5-5
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    • 1999
  • The Principal deficiency of the existing notion about the sintering-mixtures consists in the fact that almost no attention is focused on the Phenomenon of alloy formation during sintering, its connection with dimensional changes of powder bodies, and no correct ideas on the driving force for the sintering process in the stage of establishing chemical equilibrium in a system are available as well. Another disadvantage of the classical sintering theory is an erroneous conception on the dissolution mechanism of solid in liquid. The two-particle model widely used in the literature to describe the sintering phenomenon in solid state disregards the nature of the neighbouring surrounding particles, the presence of pores between them, and the rise of so called arch effect. In this presentation, new basic scientific principles of the driving forces for the sintering process of a two-component powder body, of a diffusion mechanism of the interaction between solid and liquid phases, of stresses and deformation arising in the diffusion zone have been developed. The major driving force for sintering the mixture from components capable of forming solid solutions and intermetallic compounds is attributed to the alloy formation rather than the reduction of the free surface area until the chemical equilibrium is achieved in a system. The lecture considers a multiparticle model of the mixed powder-body and the nature of its volume changes during solid-state and liquid-phase sintering. It explains the discovered S-and V-type concentration dependencies of the change in the compact volume during solid-state sintering. It is supposed in the literature that the dissolution of solid in liquid is realised due to the removal of atoms from the surface of the solid phase into the melt and then their diffusicn transfer from the solid-liquid interface into the bulk of liquid. It has been shown in our experimental studies that the mechanism of the interaction between two components, one of them being liquid, consist in diffusion of the solvent atoms from the liquid into the solid phase until the concentration of solid solutions or an intermetallic compound in the surface layer enables them to pass into the liquid by means of melting. The lecture discusses peculimities of liquid phase formation in systems with intermediate compounds and the role of the liquid phase in bringing about the exothermic effect. At the frist stage of liquid phase sintering the diffusion of atoms from the melt into the solid causes the powder body to grow. At the second stage the diminution of particles in size as a result of their dissolution in the liquid draws their centres closer to each other and makes the compact to shrink Analytical equations were derived to describe quantitatively the porosity and volume changes of compacts as a result of alloy formation during liquid phase sinteIing. Selection criteria for an additive, its concentration and the temperature regime of sintering to control the density the structure of sintered alloys are given.

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Electrosorption Behavior of $TiO_2$/Activated Carbon Composite for Capacitive Deionization (축전식 이온제거에 대한 $TiO_2$/Activated Carbon 화합물의 전기흡착 거동)

  • Lee, Jeong-Won;Kim, Hong-Il;Kim, Han-Joo;Park, Soo-Gil
    • Applied Chemistry for Engineering
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    • v.21 no.3
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    • pp.265-271
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    • 2010
  • Desalination effects of capacitive deionization (CDI) process was studied using $TiO_2$/activated carbon electrode. In order to enhance the wettability of electrode and decrease a electrode resistance, $TiO_2$ was coated on activated carbon. By means of $TiO_2$ coating on activated carbon, electric double layer to adsorption content in CDI process was increased. It was identified from TEM, XRD, and XPS that the activated carbon based on $TiO_2$ composite was fabricated successfully by means of sol-gel method. As a results of cyclic voltammetry and impedance, it was identified that $TiO_2$/activated carbon electrode has more electric double later capacitance and less diffusion resistance than activated carbon. Also charge-discharge and ion conductivity profiles showed that the ion removal ratios of $TiO_2$/activated carbon electrode in NaCl electrolyte of $1000\;{\mu}S/cm$ more increased about 39% than that of activated carbon. In conclusion it was possible to identify that the carbon electrode coated $TiO_2$ as electrode material was more effective than raw carbon electrode.

Production of Foamed Glass by Using Hydrolysis of Waste Glass(III) - Heat Treatment for Stabilization and Scale-up Test - (폐유리의 가수분해 반응에 의한 발포유리의 제조(III) - 안정화 열처리공정 및 Scale-up Test -)

  • Lee, Chul-Tae;Um, Eui-Heum
    • Applied Chemistry for Engineering
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    • v.17 no.1
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    • pp.73-81
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    • 2006
  • Heat treatment condition for the stabilization of foamed glass block through the foaming process of the hydrolized waste glass was investigated and scale-up test for the manufacturing of foamed glass was also attempted for the actual foaming process. Proper heat treatment condition was quenching from the foaming temperature to $550{\sim}600^{\circ}C$ for stabilization, and then annealing from stabilization temperature to $200^{\circ}C$ and holding up at $200^{\circ}C$ for removal thermal stress, and then annealing to the room temperature with cooling speed of $0.3^{\circ}C/min$. Through this heat treatment conditions, foamed glass block with size of $250mm{\times}250mm{\times}90mm$ was produced successfully. The properties of this foamed glass block showed density of $0.28{\pm}0.06g/cm^3$, thermal conductivity of $0.048{\pm}0.005kcal/hm^{\circ}C$, moisture absorption of $0.5{\pm}0.09vol%$, linear expansion coefficient of $(8.6{\pm}0.2){\times}10^{-6}m/m^{\circ}C$($400^{\circ}C$), flexural strength of $15.0{\pm}0.6kg/cm^2$, and compression strength of $39.5{\pm}0.6kg/cm^2$.

Synthesis of High Purity Al2O3 from Low Grade Bauxite Ore(II) (저품위 Bauxite로부터 고순도 Al2O3의 합성(II))

  • Kwon, Kung-Taek;Song, Yon-Ho;Lee, Chul-Tae
    • Applied Chemistry for Engineering
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    • v.5 no.4
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    • pp.597-608
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    • 1994
  • A new process for the production of high purity ${\alpha}-Al_2O_3$ from ammonium aluminium sulfate solution abtained through the sulfation of low grade bauxite ore with $(NH_4)_2SO_4$, and leaching of the sulfated product was investigated. This process is consisted of solvent extraction for Fe component removal from ammonium aluminum sulfate solution and homogeneous precipitation of Al containing precipitate from the refined ammonium aluminium sulfate solution by using urea as precipitator. The optimum conditions of solvent extraction with Alamine 336 as extractant were shaking time of 4min, organic phase ratio to aqueous phase of 0.25. The types of precipitation products from this precipitation were amorphous alumina gel, pseudo-boehmite and crystalline boehmite in the lower temperature of $100^{\circ}C$, in the range from $125^{\circ}C$ to $150^{\circ}C$, and above $150^{\circ}C$, respectively. And also amorphous alumina gel hydrate in $1000^{\circ}C$ and crystalline boehmite in $1250^{\circ}C$ were tranfered to ${\alpha}-Al_2O_3$, respectively. This alumina was identified as ${\alpha}-Al_2O_3$ of purity 99.7%.

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Biofilter Model for Robust Biofilter Design: 2. Dynamic Biofilter Model (강인한 바이오필터설계를 위한 바이오필터모델: 2. 동적 바이오필터모델)

  • Lee, Eun Ju;Song, Hae Jin;Lim, Kwang-Hee
    • Korean Chemical Engineering Research
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    • v.50 no.1
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    • pp.155-161
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    • 2012
  • A dynamic biofilter model was suggested to integrate the effect of biofilter-medium adsorption capacity on the removal efficiency of volatile organic compound (VOC) contained in waste air. In particular, the suggested biofilter model is composed of four components such as biofilm, gas phase, sorption volume and adsorption phase and is capable of predicting the unsteady behavior of biofilter-operation. The process-lumping model previously suggested was limited in the application for the treatment of waste air since it was derived under the assumption that the adsorbed amount of VOC equilibrated with biofilter-media would be proportional to the concentration of dissolved VOC in the sorption volume of biofilter-media. Therefore a Freundlich adsorption isotherm was integrated into a robust biofilter process-lumping model applicable to a wide range of VOC concentration. The values of model parameters related to biofilter-medium adsorption were obtained from the dynamic adsorption column experiments in the preceding article and literature survey. Furthermore a separate biofilter experiment was conducted to treat waste air containing ethanol and the experimental result was compared with the model predictions with various values of Thiele modulus (${\phi}$). The obtained value of Thiele modulus (${\phi}$) was close to 0.03.