• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.77-86
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• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.

• Journal of the Korean Ceramic Society
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• v.27 no.4
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• pp.529-535
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• 1990

This paper describes the factors which control the impedance-relative humidity characteristics of the TiO2-V2O5 humidity sensor. To obtain the quantitative relationships between impedance and many manufacturing parameters such as V2O5mol%, the sintering time and temperature, various sets of samples are preared and tested. With changing relative hymidity from 20% to 80%, it is measrued that the corresponding capacitance and impedance from the semicircles which complex impedance plots make. As a result we found that the impedance-relative humidity characteristics are mainly controlled by the doping amount of V2O5 total pore volume and bulk resistence of the elements. We can assume the equivalent circuits of each samples and finally control the sintering time to get a linear humidity impedance response curve which plays an important role in device making. 4mol% V2O5-TiO2 specimen sintered at 90$0^{\circ}C$ for 10min. show liear log(Z) vs. RH characteristics and 10mol% V2O5-TiO2 specimen sintered at the same temp. for 20min. show linear (Z) vs. RH.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.83-89
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• 2012

A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: $2.7{\times}2.7mm^2$ ; mid-size: $1.5{\times}1.5mm^2$ ; small-size: $0.7{\times}0.7mm^2$) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.

• Current Optics and Photonics
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• v.5 no.6
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• pp.652-659
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• 2021

The theoretical analysis and optimization of extrinsic Fabry-Perot interferometer (EFPI) opticalfiber humidity sensors are deeply investigated. For a typical dual-cavity structure composed of an optical fiber and a humidity-sensitive membrane (HSM), the changes in refractive index (RI) and initial length are discussed for polymer materials and porous oxide materials when relative humidity (RH) increases. The typical interference spectrum is simulated at different RH using MATLAB. The spectral change caused by changing HSM RI and initial length are simulated simutineously, showing different influences on humidity response. To deeply investigate the influence on RH sensitivity, the typical response sensitivity curves for different HSM lengths and air-cavity lengths are simulated. The results show that the HSM is the vital factor. Short HSM length can improve the sensitivity, but for HSM RI and length the influences on sensitivity are opposite, because of the opposite spectral-shift trend. Deep discussion and an optimization method are provided to solve this problem. According to analysis, an opaque HSM is helpful to improve sensitivity. Furthermore, if using an opaque HSM, a short air cavity and long HSM length can improve the sensor's sensitivity These results provide deep understanding and some ideas for designing and optimizing highly sensitive EFPI fiber humidity sensors.

• Atmosphere
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• v.30 no.4
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• pp.391-404
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• 2020

To understand the characteristics of the relationship between visibility and particulate matter (PM) in different meteorological conditions, we investigated the contributions of PM and relative humidity (RH) to visibility in Seoul, South Korea. For the period from 2001 to 2018, both PM and RH show descending trends, resulting in a visibility increase. PM has little impact on the hourly variation of visibility, which could be explained more by the RH variability. Meanwhile, the daily change of PM accounts for daily visibility variation. For the monthly variation of visibility, both PM and RH showed similar influence. The correlation coefficients of PM10, PM2.5, and RH with visibility was -0.486, -0.644, and -0.556, respectively, which became higher during the high PM seasons of spring and winter. The correlation coefficient between PM2.5 and visibility was -0.454 for RH higher than 80%, and -0.780 for RH between 40% and 60%. From 2017 to 2018, there were 10 cases of extreme visibility impairment, among which five cases were incurred by high PM pollution, and two cases were by high humidity. Further analysis with PM chemical composition measurements is required to better understand the characteristics of visibility in Seoul.

• Food Science and Preservation
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• v.2 no.2
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• pp.243-249
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• 1995

Potatoes, Irish cobbler, were subject to quality evaluation from the physiological and physicochemical points of view during storage under different temperatures and relative humidities for 11 months. Quality criteria were sprouting, rotting, weight changes, moisture, total sugar, reducing sugar and vitamin C. Low temperature condition(LT, 2∼4$^{\circ}C$, 80% RH) was enough to preserve Potatoes for 11 months, but it was indicated to be limitations that the increase in reducig sugar as well as sprouting by about 3.3 to 6.7% occurred from the 3rd month of storage. Meanwhile, pit temperature(PT, 3∼15$^{\circ}C$, 75∼85% RH), room temperature(RT, 7∼17$^{\circ}C$, 80∼95% RH) and ambient temperature(AT, 2∼25$^{\circ}C$, 62∼72 RH) were shown infeasible conditions for the storage of potatoes mainly due to the increase In sprouting-rate and subsequent quality-loss after 3 months of storage. Based on the results, it proposed that more economical conditions, ranging 10 to 15$^{\circ}C$ and about 80% RH following sprout inhibition treatment should be used for the long-term storage of potatoes.

• Journal of Environmental Science International
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• v.26 no.4
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• pp.535-542
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• 2017

This study was conducted to investigate how $PM_{10}$ concentration and Relative Humidity (RH) affected visibility in Jinju, Korea. A 9-yr dataset of 1 h averages for visibility, $PM_{10}$, and RH data was analyzed to examine the correlation between these variables. On average, visibility decreased by 1.4 km for every $10{\mu}g/m^3$ increase in $PM_{10}$ and by 2.1 km for every 10% increase in RH. In general, a negative correlation was observed between visibility and and $PM_{10}$ concentration. However, under conditions of low $PM_{10}$ concentration(< $15{\mu}g/m^3$) and visibility(< 2 km), there was a positive correlation between these two variables. In this case, RH levels were high (> 75%). A high correlation analysis between two variables need to be under control conditions with RH < 75%, $PM_{10}$ $15{\sim}100{\mu}g/m^3$, and visibility > 2 km.

• Journal of Sensor Science and Technology
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• v.26 no.6
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• pp.397-401
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• 2017

A DC resistance type humidity sensor using conductive carbon ink was fabricated and its performance was evaluated. The humidity sensor was fabricated using a screen printing technique and have a structure that does not require additional metal electrodes to measure resistance change. To evaluate the performance of the humidity sensor, we measured the DC resistance change under various relative humidity levels. The fabricated humidity sensor showed a resistance change of about $2.5{\sim}50k{\Omega}$ in 11 ~ 95% RH environment. It also shows a linear relationship in the relative humidity versus log DC resistance graph. In comparison with commercial humidity sensor under real environment, it can be confirmed that the resistance of the humidity sensor changes to almost the same level as the measured humidity. These results show that the resistance type humidity sensor can be operated stably in actual environment.

• Macromolecular Research
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• v.13 no.3
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• pp.265-272
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• 2005

Polyelectrolyte membranes for humidity-sensing were fabricated using a layer-by-layer adsorption process based on the spontaneous self-assembly of alternating layers of cationic and anionic polymers on a silanized ITO patterned glass substrate. The substrate is dipped successively into dilute solutions of a polyanion and a polycation. The homopolymers and copoymers of diallyldimethylammonium chloride (DDA), allylamine hydrochloride (AA), 2-[(methacryloyloxy)ethyl]trimethyl ammonium chloride (METAC) and vinylbenzyl tributyl phosphonium chloride(VTBPC) were used as the polycations. In this experiment, it was found that the resistance varied according to the chemical structure of the polycation. The resistance varied from $10^7$ to $10^5$ $\Omega$, as the humidity was increased from 60 (relative humidity) to $95\%$RH, which is the range of RH values required for a dew sensor operating at high humidity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.05a
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• pp.67-70
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• 1994

On this study, we fabricated humudity sensor with polyimide thin film from the nonaqueous emulsion by the electrophoretic deposition as a function of film thickness. then evaluated performance of the sensor with increasing relative humidity if constant temperature constant humidity chamber, which is electronically controlled. we designed upper electrode of the sensor to brush type to make moisture particles permeate into the polymer bulk. sensing properties of the sensor on % RH shows proportion on the low %RH. Fer the 30V-30S- 200$^{\circ}C$ sample, percentage changing of capacitance on from 30 %RH to 90 %RH is 45.8 %, and increasing rate per 1 % RH of capacitance is 11.25 pF