• Journal of the Semiconductor & Display Technology
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• 제11권2호
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• pp.33-38
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• 2012

The wafer positioning robot in the semiconductor industry is required to operate at high speed for the improvement of productivity. The residual vibration caused by the high speed of the wafer positioning robot, however, makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the improvement of the cycle time. The followings are the process for the reduction and the improvement; 1) System modeling of the wafer positioning robot, 2) Verification of dynamic characteristics of the wafer positioning robot, 3) Input shaping plan using impulse response reiteration, 4) Simulation test using SIMULINK program, 5) Analysis of result.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.559-563
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• 2005

The wafer positioning robot used in the semiconductor industry is required to operate at high speed for the improvement of productivity. However, the residual vibration produced by the high speed of the wafer positioning robot makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the optimization of the cycle time. The followings are the process for the reduction and the optimization; 1)System modeling of wafer positioning robot, 2)Verification of dynamic characteristic of wafer positioning robot, 3)Input shaping plan using impulse response reiteration, 4)Simulation test using simulink, 6)Analysis of result.

• Journal of the Korean Society for Precision Engineering
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• 제17권4호
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• pp.181-188
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• 2000

Input shaping is a method fur reducing residual vibration. Vibration is eliminated by convolving an input shaper, which is a sequence of impulses, with the desired system command. It has been applied to robot with a flexible manipulator. But it can be applied to the reduction of residual vibration far overhead crane. In this paper, input shaping shows good performance for anti-sway of overhead crane. In the z-domain, we designed an input shaper and calculated the sensitivity of it. If sensitivity is calculated in the z-domain, the shapes of sensitivity curves are expected easily. Accordingly, it is easy to design an input shaper in the z-domain. We compared the response of a system with shaper to it without that. Also, we compared El shaper to ZV shaper in view of robustness.

• Transactions of the Korean Society of Mechanical Engineers
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• 제17권10호
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• pp.2437-2445
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• 1993

In this work, a new method is presented for generating the manipulator path which significantly reduces residual vibration under the torque constraints. The desired path is optimally designed so that the required movement can be achieved with minimum residual vibration. From the previous research works, the dynamic model had been established including both the link and the joint flexibilities. The performance index is selected to minimize the maximum amplitude of residual vibration. The path to be designed is developed by a combined Fourier series and polynomial function to satisfy both the convergence and boundary condition matching problems. The concept of correlation coefficients is used to select the minimum number of design variables, i.e. Fourier coefficients, the only ones which have a considerable effect on the reduction of residual vibration. A two-link Manipulator is used to evaluate this method. Results show that residual vibration can be drastically reduced by selecting an appropriate manipulator path to both of unlimited and torque-limited cases.

• Journal of KSNVE
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• 제9권4호
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• pp.714-719
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• 1999

Because the residual vibration of a gun barrel acts negatively on the firing of a large calibers gun, the fast stabilization of theresidual vibration is indispensible to the precise and successive firing. In this study, the residual vibrations of a gun barrel carrying a bore evacuator and a muzzle brake are investigated by the experimental method. The influence of the eigenfrequencies and the mode shapes of gun barrel on the fast stabilization of the residual vibration is studied for the various masses of bore evacuator and muzzle brake, the possition of bore evacutor. Also the relationships between the funcamental frequencies and the settling times of the gun barrel are investigated for the various parameters. The experiments to reduce the residual vibration using the viscoelastic damping treatment gives the best result among the various treatments for the reduction of residual vibration of the system.

• Steel and Composite Structures
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• 제4권5호
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• pp.355-365
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• 2004

A new reduction method of residual stress in welding joint is proposed where welded metals are shaken during welding. By an experiment using a small shaker, it can be shown that tensile residual stress near the bead is significantly reduced. Since tensile residual stress on the surface degrades fatigue strength for cumulative damage, the proposed method is effective to reduction of residual stress of welded joints. The effectiveness of the proposed method is demonstrated by the response analysis using one mass model with nonlinear springs.

• Journal of the Korean Society for Precision Engineering
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• 제30권7호
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• pp.717-724
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• 2013

Industrial cranes are indispensable equipment in heavy industry. However, unwanted vibrations in cranes often cause accidents. Input shaping is widely accepted as a useful tool for removing residual vibration in cranes. A unity magnitude zero vibration (UMZV) input shaper is often used for cranes driven by on-off-type motors. However, although a UMZV input shaper minimizes residual vibration, the input shaper cannot prevent the crane from moving slightly further than expected from the original command. This paper describes an improved method of input shaping that can compensate for position inaccuracies, as well as remove the residual vibration of cranes. Experiments were performed to validate the proposed input-shaping method, illustrated through numerical simulations.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• 제17권1호
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• pp.80-87
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• 2007

In this paper, a method for identifying the location and extent of a damage in a structure using residual forces was presented. Element stiffness matrix reduction parameters in a finite element model were used to describe the damaged structure mathematically. The element stiffness matrix reduction parameters were determined by minimizing a global error derived from dynamic residual vectors, which were obtained by introducing a simulated experimental data into the eigenvalue problem. Genetic algorithm was used to get the solution set of element stiffness reduction parameters. The proposed scheme was verified using Euler-Bernoulli beam. The results were presented in the form of tables and charts.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• 제24권11호
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• pp.898-906
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• 2014

This paper presents a reduction method for a straight-line path error of a flexible beam deploying from a rotating rigid hub. Previous studies discussed about only vibration phenomena of flexible beams deploying from rotating hubs; however, this study investigates a vibration reduction of a rotating beam with variable length. The equation of motion and associated boundary conditions are derived for a flexible beam deploying from a rotating rigid hub, and then they are transformed to a variational equation. By applying the Galerkin method, the discretized equations are obtained from the variational equation. Based on the discretized equations, the dynamic responses of a rotating/deploying beam are analyzed when the beam end has a straight line motion. A reduction method for the trajectory error is proposed, using the average length of a rotating/deploying beam. It is shown that the proposed method is able to reduce the residual vibration of a rotating/deploying beam.

• Transactions of the Korean Society of Mechanical Engineers A
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• 제21권7호
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• pp.1106-1115
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• 1997

A method of obtaining a control input to reduce residual vibration was developed for nonlinear time-varying systems moving along pre-determined two dimensional paths. First, the nonlinear system equation was solved with nominal input then linearized by nominal response which is defined at equilibrium point. Next an additional input can be obtained by solving the linearized equation that should satisfied the required boundary conditions. Residual vibration reduction was experimentally verified by applying the control input, which is sum of nominal and additional input, to a moving pendulum whose length is varying time.