• Title/Summary/Keyword: Real-time acquisition

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Real-time malfunction detection of plasma etching process using EPD signal traces (EPD 신호궤적을 이용한 플라즈마 식각공정의 실시간 이상검출)

  • Cha, Sang-Yeob;Yi, Seok-Ju;Koh, Taek-Beom;Woo, Kwang-Bang
    • Journal of Institute of Control, Robotics and Systems
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    • v.4 no.2
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    • pp.246-255
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    • 1998
  • This paper presents a novel method for real-time malfunction detection of plasma etching process using EPD signal traces. First, many reference EPD signal traces are collected using monochromator and data acquisition system in normal etching processes. Critical points are defined by applying differentiation and zero-crossing method to the collected reference signal traces. Critical parameters such as intensity, slope, time, peak, overshoot, etc., determined by critical points, and frame attributes transformed signal-to symbol of reference signal traces are saved. Also, UCL(Upper Control Limit) and LCL(Lower Control Limit) are obtained by mean and standard deviation of critical parameters. Then, test EPD signal traces are collected in the actual processes, and frame attributes and critical parameters are obtained using the above mentioned method. Process malfunctions are detected in real-time by applying SPC(Statistical Process Control) method to critical parameters. the Real-time malfunction detection method presented in this paper was applied to actual processes and the results indicated that it was proved to be able to supplement disadvantages of existing quality control check inspecting or testing random-selected devices and detect process malfunctions correctly in real-time.

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REAL-TIME 3D MODELING FOR ACCELERATED AND SAFER CONSTRUCTION USING EMERGING TECHNOLOGY

  • Jochen Teizer;Changwan Kim;Frederic Bosche;Carlos H. Caldas;Carl T. Haas
    • International conference on construction engineering and project management
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    • 2005.10a
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    • pp.539-543
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    • 2005
  • The research presented in this paper enables real-time 3D modeling to help make construction processes ultimately faster, more predictable and safer. Initial research efforts used an emerging sensor technology and proved its usefulness in the acquisition of range information for the detection and efficient representation of static and moving objects. Based on the time-of-flight principle, the sensor acquires range and intensity information of each image pixel within the entire sensor's field-of-view in real-time with frequencies of up to 30 Hz. However, real-time working range data processing algorithms need to be developed to rapidly process range information into meaningful 3D computer models. This research ultimately focuses on the application of safer heavy equipment operation. The paper compares (a) a previous research effort in convex hull modeling using sparse range point clouds from a single laser beam range finder, to (b) high-frame rate update Flash LADAR (Laser Detection and Ranging) scanning for complete scene modeling. The presented research will demonstrate if the FlashLADAR technology can play an important role in real-time modeling of infrastructure assets in the near future.

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Studies of process measurement technology for manufacturing advanced nano devices (첨단 나노소자 공정제어용 측정기술 연구)

  • Cho, Yong Jai
    • Vacuum Magazine
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    • v.2 no.3
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    • pp.4-10
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    • 2015
  • We developed a real-time three-polarizer spectroscopic ellipsometer based on a new data acquisition algorithm and a general data reduction (the process of extracting the ellipsometric sample parameters from the Fourier coefficients). The data acquisition algorithm measures Fourier coefficients of radiant flux waveform accurately and precisely. The general data reduction is introduced to represent the analytic functions of the standard uncertainties of the ellipsometric sample parameters, and the extracted theoretical values closely agree with the corresponding experimental data. Our approach can be used for optimization of measurement conditions, instrumentation, simulation, standardization, laboratory accreditation, and metrology.

Autonomous Compensation of Thermal Deformation during Long-Time Machining Process (공작기계 장시간 가공중 열변형의 CNC 자율보정 기술)

  • Kim, Dong-Hoon;Song, Jun-Yeob
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.4
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    • pp.297-301
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    • 2014
  • The biggest factors, which lower the machining accuracy of machine, are thermal deformation and chatter vibration. In this article, we introduce the development case of a device and technology that can automatically compensate thermal deformation errors of machine during long-time processing on the machine tool's CNC (Computerized Numerical Controller) in real time. In machine processing, the data acquisition of temperature signal in real time and auto-compensation of the machine origin of machine tools depending on thermal deformation have significant influence on improving the machining accuracy and the rate of operation. Thus, we attempts to introduce the related contents of the development we have made in this article : The development of a device that embedded the acquisition part of temperature data, linear regression to get compensation value, compensation model of neural network and a system that compensates the machine origin of machine tool automatically during manufacturing process on the CNC.

Gas Turbine Data Acquisition and Monitoring System for Combined Cycle Power Plant

  • Kang, Feel-Soon
    • Journal of information and communication convergence engineering
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    • v.6 no.4
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    • pp.405-410
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    • 2008
  • This paper presents a data acquisition and monitoring system for a gas turbine. The proposed system entitled C-Tune DAS plays an important role to make an analysis of the real-time operation of the gas turbine under maintenance. The designed LabVIEW based software is divided into three parts according to their original functions, i.e., data acquisition, data analysis with display, and data storage. The data acquisition part receives data from a PMS (Plant Management System) server and two cFPs (Compact-Field Point). To verify the validity of the developed system, it is applied to gas turbines in the combined cycle power plant in Korea.

The Implementation of Load Resistance Measurement System using Time-Frequency Domain Reflectometry (시간-주파수 영역 반사파 계측방법을 이용한 부하 저항 측정 시스템 구현)

  • Kwak, Ki-Seok;Park, Tae-Geun;Yoon, Tae-Sung;Park, Jin-Bae
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.55 no.10
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    • pp.435-442
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    • 2006
  • One of the most important topics about the safety of electrical and electronic system is the reliability of the wiring system. The Time-Frequency Domain Reflectometry(TFDR) is a state-of-the-art system for detecting and estimating of the fault on a wiring. In this paper, We've considered the load resistance measurement on a coaxial cable using TFDR in a way of expanded application. The TFDR system was built using commercial Pci extensions for Instrumentation(PXI) and LabVIEW. The proposed real time TFDR system consisted of the reference signal design, signal generation, signal acquisition, algorithm execution and results display part. To implement real time system, all of the parts were programmed by the LabVIEW which is one of the graphical programming languages. Using the application software implemented by the LabVIEW, we were able to design a proper reference signal which is suitable for target cable and control not only the arbitrary waveform generator in the signal generation part but alto the digital storage oscilloscope in the signal acquisition part. By using the TFDR real time system with the terminal resistor on the target cable, we carried out load impedance measurement experiments. The experimental results showed that the proposed system are able not only to detect the location of impedance discontinuity on the cable but also to estimate the load resistance with high accuracy.

Network Configuration, Time Management, and Data Storage for Urban Earthquake Disaster Preventing System (도시형 지진방재시스템을 위한 네트워크 구성, 시간관리 및 데이터 저장 방법)

  • Choi, Hun;Youn, Joosang;Heo, Gyeongyong
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.63 no.12
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    • pp.1675-1682
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    • 2014
  • In this paper, we propose a precise time management and time synchronization based on real-time data storage and transmission scheme in design of seismic data acquisition system for urban earthquake disaster preventing system (UEDPS). It is possible to improve the performance of the existing research results through the proposed methods. To evaluate the performances of the proposed methods, we implemented a prototype system(H/W & S/W) and performed some experiments with real seismic data and test equipment generated data as the input.

A Proposal of Simultaneous Acquisition Performance Test Method for Telemetry System (원격 측정 시스템 동시계측 성능시험 방법 제안)

  • Park, Yu-kwang;Lee, Woon-moon;Kim, Bok-ki
    • Journal of Advanced Navigation Technology
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    • v.24 no.3
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    • pp.218-223
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    • 2020
  • There are communication methods that guarantees real-time and method of performing the simultaneous acquisition through the synchronized multi-channels to improve the reliability of the telemetry system. Such synchronized systems need to be verified to confirm the simultaneous measurement performance of channels. In this paper, we propose a method to measure the time difference between synchronized channels in a telemetry system through simultaneous acquisition performance test. The simulation signal is applied for measurement and the difference between the sampling period and the simulation signal period is defined as the concept of time resolution. The principle of checking the measurement time difference between channels through time resolution was explained. In addition, the proposed principle was verified through simulation in the situation when measurement time difference may occur. And a procedure for identifying a measurement time difference in an actual telemetry system is described.

Real-Time Acquisition Method of Posture Information of Arm with MEMS Sensor and Extended Kalman Filter (MEMS센서와 확장칼만필터를 적용한 팔의 자세정보 실시간 획득방법)

  • Choi, Wonseok;Kim, HeeSu;Kim, Jaehyun;Cho, Youngki
    • The Journal of the Korea Contents Association
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    • v.20 no.6
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    • pp.99-113
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    • 2020
  • In the future, robots and drones for the convenience of our lives in everyday life will increase. As a method for controlling this, a remote control or a human voice method is most commonly used. However, the remote control needs to be operated by a person and can not ignore ambient noise in the case of voice. In this paper, we propose an economical attitude information acquisition method to accurately acquire the posture information of the arm in real time under the assumption that the surround drones or robots can be controlled wirelessly with the posture information of the arm. For this purpose, the extended Kalman filter was used to eliminate the noise of the arm position information. in order to detect the arm movement, a low cost MEMS type sensor was applied to secure the economical efficiency of the apparatus. To increase the wear ability of the arm, We developed a compact and lightweight attitude information acquisition system by integrating all functions into one chip as much as possible. As a result, the real-time performance of 1 ms was secured and the extended Kalman filter was applied to acquire the accurate attitude information of the arm with noise removed and display the attitude information of the arm in real time. This provides a basis for generating commands using real-time attitude information of the arm.

Development of a real-time gamma camera for high radiation fields

  • Minju Lee;Yoonhee Jung;Sang-Han Lee
    • Nuclear Engineering and Technology
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    • v.56 no.1
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    • pp.56-63
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    • 2024
  • In high radiation fields, gamma cameras suffer from pulse pile-up, resulting in poor energy resolution, count losses, and image distortion. To overcome this problem, various methods have been introduced to reduce the size of the aperture or pixel, reject the pile-up events, and correct the pile-up events, but these technologies have limitations in terms of mechanical design and real-time processing. The purpose of this study is to develop a real-time gamma camera to evaluate the radioactive contamination in high radiation fields. The gamma camera is composed of a pinhole collimator, NaI(Tl) scintillator, position sensitive photomultiplier (PSPMT), signal processing board, and data acquisition (DAQ). The pulse pile-up is corrected in real-time with a field programmable gate array (FPGA) using the start time correction (STC) method. The STC method corrects the amplitude of the pile-up event by correcting the time at the start point of the pile-up event. The performance of the gamma camera was evaluated using a high dose rate 137Cs source. For pulse pile-up ratios (PPRs) of 0.45 and 0.30, the energy resolution improved by 61.5 and 20.3%, respectively. In addition, the image artifacts in the 137Cs radioisotope image due to pile-up were reduced.