1 |
www.itrs.net, Technology Roadmap for Semiconductors (2011).
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2 |
S. Zollner, "Spectroscopic Ellipsometry for Inline Process Control in the Semiconductor Industry," in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, ed. (Springer, Berlin, 2013), Chap. 18.
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3 |
Y. J. Cho, W. Chegal, J. P. Lee, and H. M. Cho, Opt. Express 23, 16481 (2015).
DOI
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4 |
Y. J. Cho, W. Chegal, and H. M. Cho, Opt. Lett. 36, 118 (2011).
DOI
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5 |
H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (William Andrew, New York, 2005).
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6 |
W. Chegal, J. P. Lee, H. M. Cho, S. W. Han, Y. J. Cho, J. Opt. Soc. Am. A 30, 1310 (2013).
DOI
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7 |
Y. J. Cho, W. Chegal, and H. M. Cho (to be submitted).
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