• 제목/요약/키워드: Radical density

검색결과 314건 처리시간 0.027초

Effect of Gas Composition on Ozone Generation in Silent Discharge Process

  • Chung, Jae-Woo;Suh, Hyun-Hyo;Park, Hyun-Geoun
    • Journal of Korean Society for Atmospheric Environment
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    • 제19권E4호
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    • pp.169-175
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    • 2003
  • The effect of gas composition on the discharge characteristics and the ozone production in silent discharge (SD) process was investigated. The major gas components, $N_2$, $O_2$, and $H_2O$ influence the discharge properties according to their relative magnitude of ionization thresholds and electron affinities. The generated amount of ozone increased with the discharge energy by increasing the electron mean energy. The higher oxygen content injected, the higher ozone produced. A small amount of water vapor significantly lowered the discharge onset voltage by the ionization threshold decreasing effect and high electrical conductivity. However, the further increase of water vapor contributes to decrease the electron density by the electron affinity The addition of water greatly reduced the ozone generation through the formation of OH radical and the catalytic ozone destruction process.

Numerical Modeling of an Inductively Coupled Plasma Based Remote Source for a Low Damage Etch Back System

  • Joo, Junghoon
    • Applied Science and Convergence Technology
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    • 제23권4호
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    • pp.169-178
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    • 2014
  • Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

New Self-Directed Growth Mechanism of Molecular Lines across the Dimer Rows on H-terminated Si(001) Surface

  • Choi, Jin-Ho;Cho, Jun-Hyung
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.301-301
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    • 2011
  • We present theoretical investigations of the self-assembled growth of one-dimensional (1D) molecular lines directed across the dimer rows on the H-terminated Si(001) surface [1]. Based on density-functional theory calculations, a new growth mechanism of the 1D acetylacetone line is proposed [2], which involves the radical chain reaction initiated at two dangling-bond sites on one side of two adjacent Si dimers. It is also enabled that, if an H-free Si dimer were employed as the initial reaction site, a 1D acetylacetone line can grow along the dimer row. Our findings represent the first insight into the growth of 1D molecular lines not only across but also along the dimer rows on the H-terminated Si(001) surface.

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유도 결합형 Cl$_2$계 플라즈마를 이용한 GaN 식각 특성에 관한 연구 (A study of the GaN etch properties using inductively coupled Cl$_2$-based plasmas)

  • 김현수;이재원;김태일;염근영
    • 한국표면공학회지
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    • 제32권2호
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    • pp.83-92
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    • 1999
  • GaN etching was performed using planar inductively coupled $Cl_2$-based plasmas and the effects of main process parameters on the characteristics of the plasmas and their relations to GaN etch rates were studied. Also, the GaN etch mechanism was investigated using a Langmuir probe and optical emission spectroscopy (OES) during the etching, and X-ray photoelectron spectroscopy (XPS) of the etched surfaces. The GaN etch rates increased with the increase of chlorine radical density and ion energy, and a vertical etch profile haying the etch rate close to 4000 $\AA$/min could be obtained. The addition of 10% Ar to $Cl_2$ gas increased the GaN etch rate and the addition of Ar (more than 20%) and HBr generally reduced the GaN etch rate. The GaN etch rate appeared to be more affected by the chemical reaction between Cl radicals and GaN compared to the physical sputtering itself under the sufficient ion bombardments to break GaN bonds.

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Swelling Controlled Delivery of Antibiotic from a Hydrophilic Macromolecular Matrix with Hydrophobic Moieties

  • Shukla, Sandeep;Bajpai, Anil Kumar;Bajpai, Jaya
    • Macromolecular Research
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    • 제11권4호
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    • pp.273-282
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    • 2003
  • A hydrophilic macromolecular network containing hydrophobic moieties has been prepared by free radical copolymerization of acrylamide and styrene in the presence of poly(vinyl alcohol) (PVA) and its potential as controlled drug delivery carrier was evaluated with tetracycline as a model antibiotic drug. The amount of drug was assayed spectrophotometrically. The network was characterized by optical microscopy, infra-red spectroscopy and structural parameters such as average molecular weight between cross1inks ($M_c$), cross1ink density (q) and number of elastically effective chains ($V_e$) were evaluated. It was found that with increasing concentration of PVA, ST and MBA in the hydrogel, the release rate initially increases but after definite concentrations of the above components the release rate falls. In the case of AM, release rate constantly decreases with increasing AM concentration in the hydrogel.

Improved Performance of Organic Light-Emitting Diodes Using Novel Hole-transporting Materials

  • Kim, Young-Kook;Hwang, Seok-Hwan;Kwak, Yoon-Hyun;Lee, Chang-Ho;Yi, Jeoung-In;Lee, Jong-Hyuk;Kim, Sung-Chul
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.758-761
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    • 2009
  • The electroluminescent devices with the phenylnaphthyldiamine HTMs as the hole-transporting layer were more efficient than that with the biphenyldiamine HTM 1. Particularly, the life-time of the device IV using HTM 2 is about two times longer than that of the reference device III with HTM 1 within the measured current density, indicating more effective recombination at the emitting layer of device IV.

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Property Control in a Continuous MMA Polymerization Reactor using EKF based Nonlinear Model Predictive Controller

  • Ahn, Sung-Mo;Park, Myung-June;Rhee, Hyun-Ku
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1998년도 제13차 학술회의논문집
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    • pp.468-473
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    • 1998
  • A mathematical model was developed for a continuous re-actor in which free radical polymerization of methyl methacrylate (MMA) occurred. Elementary reactions considered in this study were initiation, propagation, termination, and chain transfers to monomer and solvent. The reactor model took into account the density change of the reactor contents and the gel effect. A control system was designed for a continuous reactor using extended Kalman filter (EKF) based non-linear model predictive controller (NLMPC) to control the conversion and the weight average molecular weight of the polymer product. Control input variables were the jacket inlet temperature and the feed flow rate. For the purpose of validation of the control strategy, on-line digital control experiments were conducted with densitometer and viscometer for the measurement of the polymer properties. Despite the com-plex and nonlinear features of the polymerization reaction system, the EKF based NLMPC performed quite satisfactorily for the property control of the continuous polymerization reactor.

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양릉천 시호 약침이 고지혈증에 미치는 영향 (The Effect of Bupleuri Radix Herbal-acupuncture at GB34(Yangneungcheon) on Hyperlipidemia in Rats)

  • 박재영;송춘호
    • Korean Journal of Acupuncture
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    • 제27권2호
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    • pp.121-140
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    • 2010
  • Objectives & Methods : The purpose of this study is to observe the effects of Bupleuri Radix Herbal-acupuncture at GB34(Yangneungcheon) of hyperlipidemic rats. The author performed several items to analyze body-weight of the rats, weight of its liver, serum as well as urine changes in each group. Results : 1. Bupleuri Radix herbal-acupuncture(BR-HA) infused solution (MCR-HAS) increased both DPPH radical scavenging activity and HMG-CoA reductase inhibition rate in rat liver cells. 2. BR-HA at GB34 significantly decreased the level of serum total cholesterol and atherogenic index(AI), while significantly increased the ratios of high-density lipoprotein (HDL)/total cholesterol and phospholipid/total cholesterol in hyperlipidemic rats. 3. BR-HA at GB34 significantly decreased urine glucose in hyperlipidemic rats. Conclusions : From the results above, it is suggested that Bupleuri Radix herbal -acupuncture at GB34 has a therapeutic effect on hyperlipidemia.

FGM기반 Multi-Environment PDF 모델을 이용한 메탄/공기 부상화염장의 Large Eddy Simulation (Large Eddy Simulation of a Lifted Methane/Air Flame using FGM-based Multi-Environment PDF Approach)

  • 김남수;김재현;김용모
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2015년도 제51회 KOSCO SYMPOSIUM 초록집
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    • pp.265-266
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    • 2015
  • The multi-environment PDF model coupled with flamelet generated manifolds(FGM) has been developed for a large eddy simulation of turbulent partially premixed lifted flame. This approach has a capability to realistically account for the transport and evolution of probability density function for mixture fraction and progress variable with the manageable computational burden. Using the tabulated chemistry, it is possible to track radical distributions which is important to predict autoignition process with the vitiated coflow environment. Numerical results indicate that the present yields the good agreement with experimental data in terms of mixture fraction, temperature, and species mass fractions.

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유기화합물이 첨가된 LDPE에서의 트리 형상과 부분방전 (Tree Shape and Partial Dishcharge in LDPE Blended with Organic Compounds)

  • 강성화;최한식;신윤식;정득영;임기조;박대희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1993년도 하계학술대회 논문집 B
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    • pp.1130-1133
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    • 1993
  • In this paper, it is discussed the correlation between shape of tree and internal partial discharge in low density polyethylene(LDPE) blended with organic compounds that used to improve the effect of resistance to treeing. Initiation and growing of tree are retarded in specimens blended with organic compounds that comprised radical having large electron affinity, and also discharge magnitude and counts of discharging pulse per unit time in these samples are more than those in others. It is observed that the shape of tree in these samples is bush type, but in case of pure LDPE samples dendrite type.

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