Effect of Surface Treatments of Polycrystalline 3C-SiC Thin Films on Ohmic Contact for Extreme Environment MEMS Applications (극한 환경 MEMS용 옴익 접촉을 위한 다결정 3C-SiC 박막의 표면 처리 효과)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.20 no.3
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- pp.234-239
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- 2007