Study of Effect of PZT Thin Film Prepared in Different Post-Annealing Temperature Using SIMS |
Shenteng, Shenteng
(Department of Information and Communication Engineering, Sungkyunkwan University)
Lee, Tae-Yong (Department of Information and Communication Engineering, Sungkyunkwan University) Lee, Kyung-Chun (Department of Information and Communication Engineering, Sungkyunkwan University) Hur, Won-Young (Department of Information and Communication Engineering, Sungkyunkwan University) Shin, Hyun-Chang (Department of Information and Communication Engineering, Sungkyunkwan University) Kim, Hyun-Duk (Department of Information and Communication Engineering, Sungkyunkwan University) Song, Joon-Tae (Department of Information and Communication Engineering, Sungkyunkwan University) |
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