Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.03a
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- Pages.21-21
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- 2010
Low-temperature crystallization of high-dielectric (Ba,Sr)$TiO_3$ thin films for embedded capacitors
- Cho, Kwang-Hwan (Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Min-Gyu
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Kang, Chong-Yun
(Electronic Materials Center, Korea Institute of Science and Technology) ;
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Yoon, Seok-Jin
(Electronic Materials Center, Korea Institute of Science and Technology)
- Published : 2010.03.25
Abstract
(Ba,Sr)
Keywords