A Study on Competive Reactiion of TiN/$TiSi_2$ by RTA in $NH_3$ ambient
($NH_3$ 분위기에서의 RTA에 의한 TiN/$TiSi_2$ 경합반응에 관한 고찰)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1992.05b
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- pp.96-97
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- 1992