• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.163-163
• /
• 1999

MOSFET, MESFET 그리고 MODFET는 Logic ULSIs, high speed ICs, RF MMICs 등에서 중요한 역할을 하고 있으며, 그것의 gate electrode, contact, interconnect 등의 물질로는 refractory metal을 이용한 CoSi2, MoSi2, TaSi2, PtSi2, TiSi2 등의 효과를 얻어내고 있다. 그중 TiSi2는 비저항이 가장 낮고, 열적 안정도가 좋으며 SAG process가 가능하므로 simpler alignment process, higher transconductance, lower source resistance 등의 장점을 동시에 만족시키고 있다. 최근 소자차원이 scale down 됨에 따라 TiSi2의 silicidation 과정에서 C49 TiSi2 phase(high resistivity, thermally unstable phase, larger grain size, base centered orthorhombic structure)의 출현과 그것을 제거하기 위한 노력이 큰 issue로 떠오르고 있다. 여러 연구 결과에 따르면 PAI(Pre-amorphization zimplantation), HTS(High Temperature Sputtering) process, Mo(Molybedenum) implasntation 등이 C49를 bypass시키고 C54 TiSi2 phase(lowest resistivity, thermally stable phase, smaller grain size, face centered orthorhombic structure)로의 transformation temperature를 줄일 수 있는 가장 효과적인 방법으로 제안되고 있지만, 아직 그 문제가 완전히 해결되지 않은 상태이며 C54 nucleation에 대한 physical mechanism을 밝히진 못하고 있다. 본 연구에서는 증착 시 기판온도의 변화(400~75$0^{\circ}C$)에 따라 silicon 위에 DC/RF magnetron sputtering 방식으로 Ti/Si film을 각각 제작하였다. 제작된 시료는 N2 분위기에서 30~120초 동안 500~85$0^{\circ}C$의 온도변화에 따라 RTA법으로 각각 one step annealing 하였다. 또한 Al을 cosputtering함으로써 Al impurity의 존재에 따른 영향을 동시에 고려해 보았다. 제작된 시료의 분석을 위해 phase transformation을 XRD로, microstructure를 TEM으로, surface topography는 SEM으로, surface microroughness는 AFM으로 측정하였으며 sheet resistance는 4-point probe로 측정하였다. 분석된 결과를 보면, 고온에서 제작된 박막에서의 C54 phase transformation temperature가 감소하는 것이 관측되었으며, Al impuritydmlwhswork 낮은온도에서의 C54 TiSi2 형성을 돕는다는 것을 알 수 있었다. 본 연구에서는 결론적으로, 고온에서 증착된 박막으로부터 열적으로 안정된 phase의 낮은 resistivity를 갖는 C54 TiSi2 형성을 보다 낮은 온도에서 one-step RTA를 통해 얻을 수 있다는 결과와 Al impurity가 존재함으로써 얻어지는 thermal budget의 효과, 그리고 그로부터 기대할 수 있는 여러 장점들을 보고하고자 한다.

• Proceedings of the KOSOMBE Conference
• /
• v.1997 no.05
• /
• pp.227-229
• /
• 1997

A new phased-array quadrature RF coil for one or two RF acquisition channels is developed for spine MR imaging. Quadrature RF coils for MRI have been useful to improve the signal-to-noise ratio (SNR) by $"\sqrt{2}"$ using two orthogonal RF coils in combination [1]. More recently, the phased-array RF coil has been proposed for more improvement of SNR by using an array of RF coil elements with a reduced size and coverage for each element. Two new schemes are proposed for the new phased-array quadrature RF coil as follows : (1) Proper overlapping of two quadrature RF coils thus removing the mutual inductance and (2) Attaching preamplifiers right after the coil section and combining the signal with proper phase delays. The coil has been implemented for receive- only mode. It has been tested through phantom and volunteer imaging. The experimental results show the utility of the proposed RF coil.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.13 no.6
• /
• pp.1051-1057
• /
• 2009

USN(Ubiquitous Sensor Network) is used to provide many services such as bridge monitoring, cultural properties monitoring, river monitoring, protection of an old and feeble person, management and control of a city and circumstance monitoring, etc. A RF transceiver is needed for implementing USN. In this paper the implementation and the design of a RF transceiver for sensor nodes operating in 2.4GHz frequency band are presented. The design procedure of AGC, a receiver and a transmitter is described. And the performance of the implemented RF transceiver is also tested. The test results of receiver sensitivity, receiver dynamic range, frequency stability, phase noise, output power of transmitter, flatness and spectrum mask are presented.

• Journal of electromagnetic engineering and science
• /
• v.10 no.1
• /
• pp.35-38
• /
• 2010

A fully integrated parallel-coupled 6-GHz quadrature voltage-controlled oscillator (QVCO) has been designed. The symmetrical parallel-coupled quadrature VCO is implemented using 0.13-${\mu}m$ CMOS process. The measured phase noise is -101.05 dBc/Hz at an offset frequency of 1 MHz. The tuning range of 710 MHz is achieved with a control voltage ranging from 0.3 to 1.4 V. The average output phase error is about $1.26^{\circ}$ including cables and connectors. The QVCO dissipates 10 mA including buffer from the 1.5 V supply voltage. The output characteristic of the differential injection-locked frequency divider (DILFD), which has similar topology to the QVCO, is presented.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07a
• /
• pp.513-514
• /
• 2005

In plasma processing reactors, it is common practice to control plasma density and ion bombardment energy by manipulating excitation voltage and frequency. In this paper, a dually excited capacitively coupled rf plasma reactor is self-consistently simulated with a three moment model. Effects of phase differences between primary and secondary voltage waves, simultaneously modulated at various combination of commensurate frequencies, on plasma properties are investigated. The simulation results show that plasma potential and density as well as primary self-dc bias are nearly unaffected by the phase lag between the primary and the secondary voltage waves. The results also show that, with the secondary frequency substantially lower than the primary frequency, secondary self-dc bias remains constant regardless of the phase lag. As the secondary frequency approaches to the primary frequency, however, the secondary self-dc bias becomes greatly altered by the phase lag, and so does the ion bombardment energy at the secondary electrode. These results demonstrate that ion bombardment energy can be more carefully controlled through plasma simulation.

• Journal of Communications and Networks
• /
• v.18 no.5
• /
• pp.837-845
• /
• 2016

Providing a customer with tailored location-based services (LBSs) is a fundamental problem. For location-estimation techniques with radio-based measurements, LBS applications are widely available for mobile devices (MDs), such as smartphones, enabling users to run multi-task applications. LBS information not only enables obtaining the current location of an MD but also provides real-time push-pull communication service. For indoor environments, localization technologies based on radio frequency (RF) pattern-matching approaches are accurate and commonly used. However, to survey radio information for pattern-matching approaches, a considerable amount of time and work is spent in indoor environments. Consequently, in order to reduce the system-deployment cost and computing complexity, this article proposes an indoor positioning approach, which involves using Asus Xtion to facilitate capturing RF signals during an offline site survey. The depth information obtained using Asus Xtion is utilized to estimate the locations and predict the received signal strength (RF information) at uncertain locations. The proposed approach effectively reduces not only the time and work costs but also the computing complexity involved in determining the orientation and RF during the online positioning phase by estimating the user's location by using a smartphone. The experimental results demonstrated that more than 78% of time was saved, and the number of samples acquired using the proposed method during the offline phase was twice as much as that acquired using the conventional method. For the online phase, the location estimates have error distances of less than 2.67 m. Therefore, the proposed approach is beneficial for use in various LBS applications.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.9 no.2
• /
• pp.397-401
• /
• 2005

In this paper, we have developed a frequency mixer which can be used as a microwave phase conjugator in the retrodirective array antenna. The retrodirective array, which can reflect the incident wave retrodirertively back to the source direction without any priori information, requires phase conjugators to achieve the phase change of 180 degrees for the incoming signal. frequency mixers can efficiently serve as phase conjugators. The circuit topology is of the 2-port structure to avoid the complexity of LO and Rf signal combination and matching circuits, using a pseudomorphic HEU device. The operating frequencies are 4.0 CHz, 2.01 CHz, and 1.99 CHz for LO, RF, and If signals, respectively. Conversion loss is measured to be -ldB and 1-dB compression point -l5 dBm at the LO power of -10 dBm.

• Journal of the Semiconductor & Display Technology
• /
• v.9 no.1
• /
• pp.29-33
• /
• 2010

Recently, the growth of ZnO thin film on glass substrate has been investigated extensively for transparent thin film transistor. We have studied the phase transition of ZnO thin films from metal to semiconductor by changing RF power in the deposition process by RF magnetron sputtering system. The structural, electric, and optical properties of the ZnO thin films were investigated. The film deposited with 75 watt of RF power showed n-type semiconductor characteristic having suitable resistivity $-3.56\;{\times}\;10^{+1}\;{\Omega}cm$, carrier concentration $-2.8\;{\times}\;10^{17}\;cm^{-3}$, and mobility $-0.613\;cm^2V^{-1}s^{-1}$ while other films by 25, 50, 100 watt of RF power closed to metallic films. From the surface analysis (AFM), the number of crystal grain of ZnO thin film increased as RF power increased. The transmittance of the film was over 88% in the visible region regardless of the change in RF power.

• Journal of the Korean Ceramic Society
• /
• v.31 no.2
• /
• pp.227-233
• /
• 1994

The Bi-Sr-Ca-Cu-O thin films were deposited by RF-magnetron sputtering method on Si(P-111) wafer without a buffer layer and annealed at various temperatures in oxygen atmosphere. The temperature dependence of electrical resistance, the microstructure of intermediate phase, and the surface morphology of films were examined by four probe method, XRD, and SEM, respectively. The chemical composition and the depth profile of the films were determined by ESCA spectra. Thin films annealed at $600^{\circ}C$ and $700^{\circ}C$ in oxygen atmosphere showed onset temperatures of 90 K and 85K, and Tc(zero) of 22K and 31K, respectively. The sample annealed at $700^{\circ}C$ had the highest volume fraction of superconducting phase and showed smooth microsturcture. In ESCA spectra, the thin films were homogeneous with depth.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.21 no.8
• /
• pp.222-227
• /
• 2020

Pb(Zr,Ti)O₃(denoted as PZT) in the perovskite phase is used as a dielectric, piezoelectric, and super appetizer material owing to its ferroelectric properties. A PZT film was formed by an RF magnetron sputtering process by preparing a target composed of Pb_1.3(Zr_0.52Ti_0.48)O₃. The PZT film was formed by dividing the material into a mono-layer PZT produced continuously with the same sputtering power and a bi-layer PZT produced with two-stage sputtering power. The bi-layer PZT consisted of a lower layer produced under low-power sputtering conditions and an upper layer produced under the same conditions as the mono-layer PZT. XRD revealed small amounts of pyrochlore phase in the mono-layer PZT, but only the perovskite phase was detected in the bi-layer PZT. SEM and AFM revealed the upper part of the bi-layer PZT to be more compact and smooth. Moreover, the bi-layered PZT showed superior symmetry polarization and a significantly reduced leakage current of less than 1×10-5 A/cm². This phenomenon observed in bi-layer PZT was attributed to the induction of growth into a pure perovskite phase by suppressing the formation of a pyrochlore phase in the upper PZT layer where the densely formed lower PZT layer was produced sequentially.