• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.3
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• pp.137-140
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• 2014

With the recent advent of through silicon via (TSV) technology, wafer level-TSV interconnection become feasible in high volume manufacturing. To increase the manufacturing productivity, it is required to develop equipment for backside passivation layer deposition for TSV wafer bonding process with high deposition rate and low film stress. In this research, we investigated the relationship between process parameters and the induced wafer stress of PECVD silicon nitride film on 300 mm wafers employing statistical and artificial intelligence modeling. We found that the film stress increases with increased RF power, but the pressure has inversely proportional to the stress. It is also observed that no significant stress change is observed when the gas flow rate is low.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.576-576
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• 2013

Recently, diagnostics of plasma becomes more important due to requirement of precise control of plasma processing based on measurement of plasma characteristics. The Langmuir probe has been used for the diagnostics but it has an inevitable uncertainty and error sources such as incorrect tip length and RF noise. Instead of the Langmuir probe, various diagnostic methods have been developed and researched. The cutoff probe is promising one for plasma density using microwaves and resonance phenomenon at the plasma frequency. The cutoff probe has various advantages as follows; (i) it is simple and robust, (ii) it uses few assumptions, and (iii) it is free from deposition by reactive gas. However, the cutoff probe also has uncertainty and error sources such as gap between tips, tip length, direction of tip plane, and RF noise. In this study, the uncertainty and error sources in manufacturing both probes and in diagnostics process were analyzed via comparative experiment at various discharge conditions. Furthermore, to reveal the user dependence of both probes, three well trained Ph. D students made the Langmuir probe and the cutoff probe, respectively, and it were analyzed. Thought this study, it is established that reliability and validity of the Langmuir probe and the cutoff probe related with not only the intrinsic characteristics of probes but also probe user.

• Elastomers and Composites
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• v.34 no.2
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• pp.128-134
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• 1999

Steel tire cords were coated via RF plasma polymerization of acetylene and butadiene gas in order to enhance adhesion to rubber compounds. Adhesion of tire cords was measured by TCAT and T-test as a function of type of gas, plasma powder, treatment time, gas pressure and Ar gas etching. Some samples were subjected to aging study in distilled water at $80^{\circ}C$ for a period of 7 days. After testing, tire cords were analysed by SEM to elucidate the adhesion mechanism. The highest adhesion values were obtained at 20W, 2min and 25mtorr for acetylene plasma polymerization, and l0W, 4min, 25mtorr for butadiene plasma polymerization. However, Ar plasma etching did not affect adhesion, while the adhesion of tire cords increased rather than decreased, contrary to expectations. It was not possible to elucidate failure mode by SEM, owing to the rough surface of the tire and the thin plasma polymer coating layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.8
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• pp.660-666
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• 2010

Carbon aerogels are promising materials as electrodes for electrical double layer capacitors (EDLCs). An optimum process is presented for synthesis of nanoporous carbon aerogels via pyrolyzing resorcinol-formaldehyde (RF) organic aerogels, which could be cost-effectively manufactured from RF wet gels. The major reactions between resorcinol and formaldehyde include an addition reaction to form hydroxymethyl derivatives ($-CH_2OH$), and then a condensation reaction of the hydroxymethyl derivatives ($-CH_2-$)- and methylene ether ($-CH_2OCH_2-$) bridged compounds. The textural properties of carbon aerogels obtained were characterized by nitrogen adsorption/desorption analysis and SEM and TEM. The application of the resultant carbon for electrodes of electric double layers capacitor (EDLC) in organic TEABF4/ACN electrolyte indicated that the ESR, as low as 55 $m{\Omega}$, was smaller than for commercially activated carbons. And EDLC with carbon Aerogel electrodes has an excellent stable more than for commercially activated carbons.

• Information and Communications Magazine
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• v.34 no.2
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• pp.12-19
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• 2017

The LED technology advancement introduce cuttingedge technology on Internet of Things (IoT) to connect the physical world to the digital realm, using digital smart lighting infrastructure called Internet of light (IoL). This paper proposes an Integrated IoT agent on networked smart LED lighting controller called IoL Filed Gateway using lighting infrastructure in which a lighting system that can connect to a network and can be monitored and controlled from a centralized system or via the cloud. The IoL Field Gateway defines new world of smart connected intelligence, lighting can become an integral and responsive part of everyday human life environments. The proposed connected lighting gateway uses the concept of multi-hop ad hoc network using visible light communication (VLC) with RF wireless technologies and Wired PLC (Power Line Communication). This connectivity and intelligence integrated into LED-based luminaires form the backbone of smart buildings and cities and make the Internet of Things (IoT) vision feasible and enables the lighting administrator can control numerous lightings easily and visitors can get visual information from the lightings with their smart devices. The proposed IoL gateway design is emulated on Arduino based HW platform with VLC, RF, and PLC connectivity and evaluated with four sensor interface.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.337-342
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• 2004

Laser optical power stabilization of a radio frequency excited $CO_2$ slab laser using the opto-Hertzian effect generated from the laser itself is achieved on the peak of the Doppler broadened gain curve. The opto-Hertzian signal was generated by a modulation of the optical flux circulating inside the laser cavity from a variation in the cavity length caused by the vibrations of the PZT. The opto-Hertzian signal is directly coupled from a RE discharge chamber via a loop antenna into a detector and applied to a lock-in stabilizer as an reference signal. The power stability of an RF excited slab laser is estimated to be better then 0.2%.

• Proceedings of the Korea Contents Association Conference
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• 2005.05a
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• pp.151-155
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• 2005

Telemedicine uses common technologies that provide a conduit for information exchange between physicians nurses and patients. In addition to patient records, medical professionals can obtain vital signs and other reference data through telemedicine applications. also, recent advancement in RF technology and wireless communications has enabled the development of Ubiquitous networks. Mobile telemedicine involves more than just communicating via mobile phone of PDA that sends and receives medical data on Portable Internet. this paper describes the design of a mobile telemedicine PDA prototype based on Embedded Linux that can be used to monitor the medical information using a single board computer(SBC). This system would be very useful for patients with chronic illness, especially in an emergent environment, and for containing medical cost in the aged society.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.63-63
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• 2018

본 연구는 플라즈마 전해 산화 (PEO) 및 RF (Radio Frequency) 스퍼터링을 이용한 2 단계 접근법에 의해 처리 된 MgO / Ni-Cr의 고내식성 이중층 코팅을 제조하기 위해 수행되었다. 이를 위해 $100mA/cm^2$ 교류 조건에서 180 s PEO를 한 후 150W 에서 900s RF 스퍼터링을 수행 하였다. 코팅의 형태는 주사전자현미경(SEM)을 사용하여 관찰되었으며 코팅의 상조성은 X-선 회절(XRD) 및 X-선 광전자 분광법(XPS)을 사용하여 분석하였다. SEM 이미지는 스퍼터링 된 Ni-Cr이 크랙의 대부분과 미세한 미세 공극을 덮어 코팅 결함이 감소함을 보여 주었다. 따라서, 코팅 된 샘플의 거칠기 값은 스퍼터링 공정 후에 감소되었다. 단면 이미지로부터, 스퍼터링된 코팅층은 낮은 두께 때문에 거의 검출되지 않았다. EDS, XRD 및 XPS를 사용한 조성 분석은 금속 상태의 형태로 Ni 및 Cr 존재를 나타내었고 XPS에서 NiCr2O4 부동태 피막이 검출되었다. MgO / Ni-Cr 이중층 코팅의 내부식성은 MgO / Ni-Cr 이중층을 가진 샘플의 금속 원소와 비교하여 우수한 부식 특성을 나타내는 전위 역학적 분극 시험 및 전기 화학적 임피던스 분광법으로 평가 하였다.

• Journal of Ginseng Research
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• v.35 no.1
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• pp.12-20
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• 2011

The characteristics of absorption and accumulation of inorganic germanium in Panax ginseng C. A. Meyer were examined. In 4-year-old P. ginseng, the germanium content of the field soil increased with increased amounts and frequencies of inorganic germanium application, while chemical components of the soil, such as available phosphate and exchangeable calcium, potassium, and magnesium, decreased with the increased inorganic germanium application. In the 4-year-old P. ginseng, the germanium content was highest in the rhizome and increased in the order of stem, leaf, lateral root, and main root, suggesting that inorganic germanium was absorbed from the root and translocated to the stem and leaf via the rhizome. As for changes in ginsenosides in 4-year-old P. ginseng rhizomes, the contents of ginsenosides $Rb_1$, $Rb_2$, Re, and Rf decreased as the germanium content in soil increased. Ginsenosides $Rb_1$, $Rb_2$, Rc, Re, and Rf in the main root also decreased with increasing germanium content in the main root. The results suggest that inorganic germanium treatment may increase organic germanium in harvested P. ginseng, thus enhancing the medicinal effi cacy of ginseng products.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.473-474
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• 2008

This paper proposes that the relative transmittance and emission intensity measured via optical emission spectroscopy (OES) is a useful for fault detection of reactive ion etch process. With the increased requests for non-invasive as well as real-time plasma process monitoring for fault detection and classification (FDC), OES is suggested as a useful diagnostic tool that satisfies both of the requirements. Relative optical transmittance and emission intensity of oxygen plasma acquired from various process conditions are directly compared with the process variables, such as RF power, oxygen flow and chamber pressure. The changes of RF power and Pressure are linearly proportional to the emission intensity while the change of gas flow can be detected with the relative transmittance.