• Journal of the Korean Vacuum Society
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• v.20 no.3
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• pp.195-199
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• 2011

ITO thin films and gold (Au), copper (Cu) and nickel (Ni) intermediate ITO multilayer (ITO/Au/ITO, ITO/Cu/ITO, ITO/Ni/ITO) films were deposited on glass substrates with a reactive radio frequency and direct current magnetron sputtering system and then the effect of intermediate metal layer and annealing temperature on the methanol gas sensitivity of ITO films were investigated. Although both ITO and ITO/metal/ITO (IMI) film sensors have the same total thickness of 100 nm, IMI sensors have a sandwich structure of ITO 50 nm/metal 10 nm/ITO 40 nm. The change in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm was measured at room temperature. The IAI film sensors showed the higher sensitivity than the other sensors. Finally, it is concluded that the ITO 50/Au 10/ITO 40 nm film sensors hasthe potential to be used as improved methanol gas sensor.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.15 no.2
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• pp.263-267
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• 2015

current mine detector can't division the section if it is conducted and it needs too much labor force and time. in addition to, if the user don't move the head of sensor in regular speed or move it too fast, it is hard to detect a mine exactly. according to this, to improve the problem using one direction ultrasonic wave sensing signal, that is made up of human body antenna part, main micro processor unit part, smart glasses part, body equipped LCD monitor part, wireless data transmit part, belt type power supply part, black box type camera, Security Communication headset. the user can equip this at head, body, arm, waist and leg in removable type. so it is able to detect the powder in a 360-degree on(under) the ground whether it is metal or nonmetal and it can express the 2D or 3D film about distance, form and material of the mine. so the battle combats can avoid the mine and move fast. also, through the portable battery and twin self power supply system of the power supply part, combat troops can fight without extra recharge and we can monitoring the battle situation of distant place at the command center server on real-time. and then, it makes able to sharing the information of battle among battle combats one on one. as a result, the purpose of this study is researching a smart wearable mine detector which can establish a smart battle system as if the commander is in the site of the battle.

• Journal of Korean Society of Rural Planning
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• v.21 no.3
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• pp.171-179
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• 2015

The objectives of this research have been focussed on 1) developing prediction techniques for the flash flood and landslide based on rainfall prediction data in agricultural area and 2) developing an integrated forecasting system for the abrupt disasters using USN based real-time disaster sensing techniques. This study contains following steps to achieve the objective; 1) selecting rainfall prediction data, 2) constructing prediction techniques for flash flood and landslide, 3) developing USN and communication network protocol for detecting the abrupt disaster suitable for rural area, & 4) developing mobile application and SMS based early warning service system for local resident and tourist. Local prediction model (LDAPS, UM1.5km) supported by Korean meteorological administration was used for the rainfall prediction by considering spatial and temporal resolution. NRCS TR-20 and infinite slope stability analysis model were used to predict flash flood and landslide. There are limitations in terms of communication distance and cost using Zigbee and CDMA which have been used for existing disaster sensors. Rural suitable sensor-network module for water level and tilting gauge and gateway based on proprietary RF network were developed by consideration of low-cost, low-power, and long-distance for communication suitable for rural condition. SMS & mobile application forecasting & alarming system for local resident and tourist was set up for minimizing damage on the critical regions for abrupt disaster. The developed H/W & S/W for integrated abrupt disaster forecasting & alarming system was verified by field application.

• Journal of Information Technology Services
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• v.15 no.3
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• pp.71-95
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• 2016

In recent years, text mining has been used to extract meaningful insights from the large volume of unstructured text data sets of various domains. As one of the most representative text mining applications, topic modeling has been widely used to extract main topics in the form of a set of keywords extracted from a large collection of documents. In general, topic modeling is performed according to the weighted frequency of words in a document corpus. However, general topic modeling cannot discover the relation between documents if the documents share only a few terms, although the documents are in fact strongly related from a particular perspective. For instance, a document about "sexual offense" and another document about "silver industry for aged persons" might not be classified into the same topic because they may not share many key terms. However, these two documents can be strongly related from the R&D perspective because some technologies, such as "RF Tag," "CCTV," and "Heart Rate Sensor," are core components of both "sexual offense" and "silver industry." Thus, in this study, we attempted to discover the differences between the results of general topic modeling and R&D perspective topic modeling. Furthermore, we package social issues from the R&D perspective and present a prototype system, which provides a package of news articles for each R&D issue. Finally, we analyze the quality of R&D perspective topic modeling and provide the results of inter- and intra-topic analysis.

• Journal of Sensor Science and Technology
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• v.16 no.3
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• pp.197-201
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• 2007

The magnetron reactive ion etching (RIE) characteristics of polycrystalline (poly) 3C-SiC grown on $SiO_{2}$/Si substrate by APCVD were investigated. Poly 3C-SiC was etched by $CHF_{3}$ gas, which can form a polymer as a function of side wall protective layers, with additive $O_{2}$ and Ar gases. Especially, it was performed in magnetron RIE, which can etch SiC at a lower ion energy than a commercial RIE system. Stable etching was achieved at 70 W and the poly 3C-SiC was undamaged. The etch rate could be controlled from $20\;{\AA}/min$ to $400\;{\AA}/min$ by the manipulation of gas flow rates, chamber pressure, RF power, and electrode gap. The best vertical structure was improved by the addition of 40 % $O_{2}$ and 16 % Ar with the $CHF_{3}$ reactive gas. Therefore, poly 3C-SiC etched by magnetron RIE can expect to be applied to M/NEMS applications.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.1
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• pp.12-16
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• 2005

Chemical mechanical polishing (CMP) process is one of the most useful methods for improving the surface roughness of films. The effects of CMP on the surface morphology of WO$_3$ films prepared by RF sputtering system were investigated in this paper. A removal rate of films increased, and the uniformity performance of surface decreased with the addition of an oxidizer to the tungsten slurry. Non-uniformity performance of surface was superior as its value was below 5 % when oxidizers of 5.0 vol% and 2.5 vol%, respectively, were added to the tungsten slurry. The optimized oxidizer concentration, reflected both the improved roughness values and hillock-free surface with the good uniformity performance, was 5.0 vol% as an atomic force microscopy(AFM) analysis of thin film topographies. Our CMP results will be a useful reference for advanced technology of thin films for gas sensor applications in the near future.

• Proceedings of the Korean Information Science Society Conference
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• 2006.10d
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• pp.95-100
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• 2006

최근 반도체 기술과 무선 통신기술의 발전으로 센서 네트워크를 이용한 응용 분야가 다양하게 나타나고 있다. 본 논문에서는 센서 네트워크를 이용하여 산악지역의 자동인원계수시스템과 환경모니터링시스템을 개발했다. 이 시스템은 저전력으로 동작하고 이중 RF 보드를 이용하여 최대한 신뢰성 있는 데이터 전송이 가능하도록 개발하였다. 또한 산악지역에서 데이터 전송율과 통신 신뢰성을 만족시킬 수 있는 433MHz 대역이 적합함을 실험을 통하여 확인하였다. 기존의 CCD 카메라를 이용한 자동인원계수기는 전원공급과 네트워크 부재로 인하여 산악지역에서는 사용하기에 부적합하다. 본 논문에서는 산악지역의 탐방로 폭이 협소함을 이용하여 포토 빔 센서를 이용한 양방향 계수센서를 개발하였다. 산악지역에서 실험한 결과 1.5m 이하의 도로 폭에서 95% 이상의 계수 신뢰도를 보임을 확인할 수 있다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.589-592
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• 1999

This paper describes direct $\mu$C-Si/CaF$_2$/glass thin film growth by RPCVD system in a low temperature for thin film transistor (TFT), photovoltaic devices. and sensor applications. Experimental factors in a low temperature direct $\mu$ c-Si film growth are presented in terms of deposition parameters: SiH$_4$/H$_2$ ratio, chamber total pressure, substrate temperature, rf power, and CaF$_2$ buffer layer. The structural and electrical properties of the deposited films were studied by means of Raman spectroscopy, I-V, L-I-V, X-ray diffraction analysis and SEM. we obtain a crystalline volume fraction of 61%, preferential growth of (111) and (220) direction, and photosensitivity of 124. We achieved the improvement of crystallinity and electrical property by using the buffer layers of CaF$_2$ film.

• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.131-135
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• 2005

This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.371-375
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• 2022

Antimony-doped tin oxide (ATO) thin films, one type of transparent conductive oxide (TCO) films, were prepared on a SiO₂-coated glass substrate with different substrate temperatures by a radio-frequency magnetron sputtering system. Structural, optical, and electrical characteristics of the deposited ATO films were analyzed using X-ray diffraction, scanning electron microscopy, alpha-step, ultraviolet-visible spectrometer, and Hall effect measurement. The substrate temperature during deposition did not affect the basic crystal structure of the films but changed the grain size and film thickness. The optical transmittance of the ATO films deposited at different substrate temperatures was over 70%. The lowest sheet resistance and resistivity were 8.43 × 10² Ω/sq, and 0.3991 × 10^-2 Ω·cm, respectively, and the highest carrier concentration and mobility were 2.36 × 10²¹ cm^-3 and 6.627 × 10^-2 cm²V^-1s^-1, respectively, at a substrate temperature of 400 ℃.