• Title/Summary/Keyword: RF 센서

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Crystalline structures and electrical properties of $Pb[(Zr,Sn)Ti]NbO_3$ Thin Films deposited using RF Magnetron Sputtering Method (RF 마그네트론 스퍼터링 방법으로 제작된 $Pb[(Zr,Sn)Ti]NbO_3$ 박막의 결정구조와 전기적 특성)

  • Choi, Woo-Chang;Choi, Yong-Jung;Choi, Hyek-Hwan;Lee, Myoung-Kyo;Kwon, Tae-Ha
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.242-247
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    • 2000
  • $Pb_{0.99}[(Zr_{0.6}Sn_{0.4})_{0.9}Ti_{0.1}]_{0.98}Nb_{0.02}O_3(PNZST)$ thin films were deposited by RF magnetron sputtering on $(La_{0.5}Sr_{0.5})CoO_3(LSCO)/Pt/Ti/SiO_2/Si$ substrate using a PNZST target with excess PbO of 10 mole%. The thin films deposited at substrate temperature of $500^{\circ}C$, and at RF power of 80W were crystallized to a perovskite phase after rapid thermal annealing(RTA). The thin films annealed at $650^{\circ}C$ for 10 seconds in air exhibited the good structures and electrical properties. The fabricated PNZST capacitor had a remanent polarization value of about $20\;{\mu}C/cm^2$ and coercive field of about 50 kV/cm. The reduction of the polarization after $2.2{\times}10^9$ switching cycles was less than 10%.

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VWOx 볼로미터 센서 박막의 특성 연구

  • Kim, Jin-Hyeok;Sin, Gwang-Su;Kim, Hyo-Jin;Go, Hang-Ju;Nam, Seong-Pil;Lee, Seong-Gap;Han, Myeong-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.175-175
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    • 2011
  • 인체감지 적외선 센서로 사용되는 마이크로볼로미터 센서 감지재료인 $V_{2-x}W_xO_5$를 증착하고 단위소자를 제작하여 저항 및 센서성능을 측정 조사하였다. 감지재료는 $V_2O_5$에 W을 첨가하여 $V_{2-n}W_nO_5$ 타겟을 제작하였으며 RF sputtering 장비를 이용하여 $V_{1.85}W_{0.15}O_5$ 박막을 증착하였다. 증착온도 $400^{\circ}C$, $Ar/O_2$ 가스비율 50/20, 두께 200nm로 증착된 센서 재료의 특성을 조사한 결과 저항은 약 $20{\sim}70k{\Omega}$이었으며, TCR 값은 -3%/$^{\circ}C$ 이상으로 매우 우수한 박막특성을 얻었다. 볼로미터소자는 $40{\times}40{\sim}140{\times}140um^2$의 셀면적으로 설계하여 전극패턴과 습식식각공정으로 센서 구조체를 제작하였다. 소자의 성능평가는 검출기 측정장비를 이용하여 반응도 및 탐지도 특성을 조사하였다.

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Development of Korea Ocean Satellite Center (KOSC): System Design on Reception, Processing and Distribution of Geostationary Ocean Color Imager (GOCI) Data (해양위성센터 구축: 통신해양기상위성 해색센서(GOCI) 자료의 수신, 처리, 배포 시스템 설계)

  • Yang, Chan-Su;Cho, Seong-Ick;Han, Hee-Jeong;Yoon, Sok;Kwak, Ki-Yong;Yhn, Yu-Whan
    • Korean Journal of Remote Sensing
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    • v.23 no.2
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    • pp.137-144
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    • 2007
  • In KORDI (Korea Ocean Research and Development Institute), the KOSC (Korea Ocean Satellite Center) construction project is being prepared for acquisition, processing and distribution of sensor data via L-band from GOCI (Geostationary Ocean Color Imager) instrument which is loaded on COMS (Communication, Ocean and Meteorological Satellite); it will be launched in 2008. Ansan (the headquarter of KORDI) has been selected for the location of KOSC between 5 proposed sites, because it has the best condition to receive radio wave. The data acquisition system is classified into antenna and RF. Antenna is designed to be $\phi$ 9m cassegrain antenna which has 19.35 G/T$(dB/^{\circ}K)$ at 1.67GHz. RF module is divided into LNA (low noise amplifier) and down converter, those are designed to send only horizontal polarization to modem. The existing building is re-designed and arranged for the KOSC operation concept; computing room, board of electricity, data processing room, operation room. Hardware and network facilities have been designed to adapt for efficiency of each functions. The distribution system which is one of the most important systems will be constructed mainly on the internet. and it is also being considered constructing outer data distribution system as a web hosting service for offering received data to user less than an hour.

Development of a wireless telemetry system based on MICS standard (MICS 표준에 기반한 무선 텔레메트리 시스템 개발)

  • Lee, Seung-Ha;Park, Il-Yong
    • Journal of Sensor Science and Technology
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    • v.18 no.1
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    • pp.63-71
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    • 2009
  • It is said that the desirable bio-signal measurement and stimulation system should be an implantable type if the several problems such as biocompatibility, electrical safety, and so on are overcome. In addition to the biocompatibility issue, a robust RF communication and a stable electrical power source for the implantable bio-signal measurement and stimulation system are very important matters. In this paper, a wireless telemetry system which adopts the FCC's approved MICS (medical implant communication service) protocol and a wireless power transmission has been proposed. The proposed system composed of a base station (BS) and an implantable medical device (IMD) has the advantages that the interference with other RF devices can be reduced by the use of the specially assigned MICS frequency band of 402.MHz to 405 MHz. Also, the proposed system includes various functions of a multi-channel bio-signal acquisition and an electric stimulation. Since the electrical power for the IMD can be provided by the inductive link between PCB patterned coils, the IMD needs no battery so that the IMD can be smaller size and much less dangerous than the active type IMD which includes the internal battery. Finally, the validity as a wireless telemetry system has been demonstrated through the experiments by using the implemented BS and IMD.

Characteristics of ZnO thin film for surface acoustic filters (표면탄성파 필터를 위한 ZnO 박막의 특성)

  • Kim, Young-Jin;Park, Wuk-Dong;Kim, Ki-Wan
    • Journal of Sensor Science and Technology
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    • v.4 no.2
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    • pp.45-50
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    • 1995
  • The excellent c-axis oriented zinc oxide thin films were prepared by the RF magnetron sputtering method on glass substrates. Optimum fabrication conditions of the ZnO films were such that RF power, substrate temperature, and gas pressure of mixture Ar(50%):$O_{2}$(50%) were 150 W, $200^{\circ}C$, and 5 mTorr, respectively. In these conditions, the deposition rate was $310\;{\AA}/min$, and the resistivity of the film was $1{\times}10^6\;{\Omega}{\cdot}cm$. The ZnO film also showed high c-axis orientation and crystalinity according to XRD pattern and SEM photograph. A fabricated interdigital transducer generated 1st mode surface acoustic wave at 46.6 MHz and 2nd mode surface acoustic wave at 52.5 MHz. At the 1st mode, the phase velocity of surface acoustic wave and the electromechanical coupling coefficient were 2795 m/sec and 0.031 %, respectivly. At the 2nd mode, they were 3149 m/sec and 0.019 %. respectivly.

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Bio-Medical Data Transmission System using Multi-level Visible Light based on Resistor Ladder Circuit (저항 사다리 회로 기반의 다중레벨 가시광을 이용하는 의료 데이터 전송 시스템)

  • An, Jinyoung;Chung, Wan-Young
    • Journal of Sensor Science and Technology
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    • v.25 no.2
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    • pp.131-137
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    • 2016
  • In this study, a multilevel visible light communication (VLC) system based on resistor ladder circuit is designed to transmit medical data. VLC technology is being considered as an alternative wireless communication due to various advantages such as ubiquity, license free operation, low energy consumption, and no radio frequency (RF) radiation characteristics. With VLC even in places where traditional RF communication (e.g., Wi-Fi) is forbidden, significant bio-medical signal including the electrocardiography (ECG) and photoplethysmography (PPG) data can be transmitted. More lives could be saved anywhere by this potential advantage of VLC with a fast emergency response time. A multilevel transmission scheme is adopted to improve the data capacity with keeping simplicity, where data transmission rate can increase by log2m times (m is the number of voltage levels) than that of conventional VLC transmission based on on/off keying. In order to generate multi-amplitudes, resistor ladder circuit, which is a basic principle of digital to analog convertor, is employed, and information is transferred through LED (Light-Emitting Diode) with different voltage level. In the receiver side, multilevel signal is detected by optical receiver including a photo diode. Then, the collected data are analyzed to serve the necessary medical care to the concerned patient.

Transparent Conducting Multilayer Electrode (GTO/Ag/GTO) Prepared by Radio-Frequency Sputtering for Organic Photovoltaic's Cells

  • Pandey, Rina;Kim, Jung Hyuk;Hwang, Do Kyung;Choi, Won Kook
    • Journal of Sensor Science and Technology
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    • v.24 no.4
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    • pp.219-223
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    • 2015
  • Indium free consisting of three alternating layers GTO/Ag/GTO has been fabricated by radio-frequency (RF) sputtering for the applications as transparent conducting electrodes and the structural, electrical and optical properties of the gallium tin oxide (GTO) films were carefully studied. The gallium tin oxide thin films deposited at room temperature are found to have an amorphous structure. Hall Effect measurements show a strong influence on the conductivity type where it changed from n-type to p-type at $700^{\circ}C$. GTO/Ag/GTO multilayer structured electrode with a few nm of Ag layer embedded is fabricated and show the optical transmittance of 86.48% in the visible range (${\lambda}$ = 380~770 nm) and quite low electrical resistivity of ${\sim}10^{-5}{\Omega}cm$. The resultant power conversion efficiency of 2.60% of the multilayer based OPV (GAG) is lower than that of the reference commercial ITO. GTO/Ag/GTO multilayer is a promising transparent conducting electrode material due to its low resistivity, high transmittance, low temperature deposition and low cost components.

A Low-Power Design of Delta-Sigma Based Digital Frequency Synthesizer for Bio Sensor Networks (의료용 센서 네트워크를 위한 저전력 델타 시그마 디지털 주파수 합성기 설계)

  • Bae, Jung-Nam;Kim, Jin-Young
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.17 no.5
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    • pp.193-197
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    • 2017
  • In this paper, we present a low-power delta-sigma based digital frequency synthesizer with high frequency resolution for bio sensor networks. Biomedical radio-frequency (RF) transceivers require miniaturized forms with a long battery life and low power consumption. For the technology scaling, digital circuits have become preferable compared to analog circuits because of the aggressive cost, size, flexibility, and repeatability. Therefore, the digital circuits based on standard-cell library are used to reduce a power consumption. Additionally, a delta-sigma is used for making fractional frequency tuning range. From the simulation, we confirmed that proposed scheme has good performance in accordance with power and frequency resolution.

RF Sputtering으로 증착한 In2O3:C 박막의 구조 전이 연구

  • Kim, Ju-Hyeon;Gang, Hyeon-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.422-422
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    • 2012
  • In2O3 계열의 산화물 전도성 투명 전극은 최근 디스플레이, 태양전지 등 전자산업에서 중요한 소재로 전 세계적으로 많이 연구되고 있다. 또한 3.6 eV의 wide bandgap을 가짐으로서 센서 등의 반도체 소자로의 응용가능성이 매우 큰 것으로 알려져 있다. 기존의 연구는 In2O3에 SnO2, Al2O3, Ga2O3 등을 혼합하여 화합물 형태의 투명전극 소재를 개발하고, 전도성 및 투과율 등을 개선시키는데 초점이 맞춰져왔다. 최근에 들어서 나노스케일 물질의 제조 기술 개발로 낮은 차원의 In2O3 나노구조는 센서나 발광다이오드와 같은 전자기기의 제작을 위해서 연구 되었는데, 본 논문에서는 Carbon을 doping하여 p-형 반도체로의 응용 가능성을 고찰하였다. 본 논문에서는 In2O3:C 박막을 radio-frequency magnetron sputtering 방법으로 sapphire(0001) 기판위에 증착하였다. 통상적으로 ceramic target에 carbon을 혼합하여 sintering하여 제작한 ceramic target 대신, In2O3 powder와 CNT를 혼합하여 powder형태의 sputter target을 사용하였다. 박막의 증착 초기에는 매우 평평한 층구조로 성장하였고, 박막의 두께가 증가함에 따라 섬조직이 생성되기 시작하여 표면거칠기가 매우 크게 증가하였다. 박막의 두께가 500 nm 이상이 되면 나노 피라미드가 생성되는데, 이는 In2O3의 결정구조에 기인한 것으로 판단된다.

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An Implementation of Inside Environment Purifying System Using ZIGBEE (ZIGBEE를 이용한 실내 환경 정화 시스템 구현)

  • Seo, Hyung-Yong;Lee, Jae-Heung
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.2
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    • pp.447-450
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    • 2005
  • This paper describes an implementation of system based on ZIGBEE wireless communication technique to prevent for diseases of skin ailments and respiratory ailments as sensing the air pollutions that breaks out in the inside and purifying. ZIGBEE wireless communication technique has features - low battery consumption, low cost, acceptance of the maximum 256 node and simple protocol structure of below 32Kbyte. Hardware platform is implemented by using ATmega128L in ATmel corporation and 2.4GHz RF-IC CC2420 in Chipcon corporation and dust sensor(GP2Y1010AU) and gas sensor(GSBT11) that confirm degree of inside air pollution for ZIGBEE wireless communication technique.

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