• Title/Summary/Keyword: Quartz crystal

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Study on the crystallization of quartz glass crucibles for preparation of single crystal silicon (단결정 실리콘 제조용 석영유리도가니의 결정화에 대한 연구)

  • Lim, Jong Won;Kim, Tae Huei;Park, Kyung Bong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.3
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    • pp.99-105
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    • 2018
  • In order to avoid un-uniform crystallization on the surface of a quartz glass crucible that is known to affect the production yield of the single crystal silicon, Ba (barium) was selected as a crystallization promotor and the inner surface of the crucible was coated using Ba (barium hydroxide octahydrate)-solution by the spray pyrolysis method. For un-coated crucible, it was found that the crystallization of its surface started at $1350^{\circ}C$, and at $1450^{\circ}C$ the surface was uniformly crystallized with ${\beta}$-cristobalite phase. It was found that the crucible coated with Ba began to be crystallized from $1000^{\circ}C$ and was uniformly crystallized on the crucible surface at $1300^{\circ}C$. In this case, ${\alpha}$-cristobalite and needle-shaped $BaSi_2O_5$ phase were created and disappeared as a crystal phase, and the ${\beta}$-cristobalite phase was eventually evenly distributed over the Ba-coated crucible surface.

Fabrication of Boron-Doped Polycrystalline Silicon Films for the Pressure Sensor Application (압력센서용 Boron이 첨가된 다결정 Silicom 박막의 제조)

  • 유광수;신광선
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.3 no.1
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    • pp.59-65
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    • 1993
  • The boron-doped polycrystalline silicon films which can be used in pressure sensors were fabricated in a high-vacuum resistance heating evaporator. Poly-Si films were deposited on quartz substrates at various temperatures and the boron was doped to the silicon film in a diffusion furnace using BN wafer. The silicon films deposited at $500^{\circ}C$ was amorphous, began to show crystalline at $600^{\circ}C$, and became polycrystalline at $700^{\circ}C$. After doping boron at $900^{\circ}C$for 10 minutes, the resistivity of the films was in the range of $0.1{\Omega}cm~1.5{\Omega}cm$, the boron density was $9.4\times10^{15}~2.1\times{10}^{17}cm^{-3}$, and the grain size was $107{\AA}~191{\AA}$.

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Analysis of Coal Fly Ash (석탄회의 분석)

  • 이효진;김동원;이기강;김유택;홍성창;이시진
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.3 no.2
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    • pp.185-201
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    • 1993
  • The objectives of this study are to identify the physical, chemical and microstructural properties of coal fly ash and to increase the industrial use of coal fly ash. Experimental results show that 3 major constituents of coal fly ash are $SiO_2$, $Al_2O_3$ and coal fly ash includes the crystalline of Quartz and Mullite. Coal fly ash are classified into 7 groups based on the type of microstructure. Cenosphere is divided into floater and dry separated cenosphere which are consist mainly of $SiO_2$ and $Al_2O_3$. Cenosphere segregations are formed by adsorption and neck growth of the smaller sized cenosphere particles on the condition of the high temperature and air pressure.

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CMP (Chemical Mechanical Polishing) characteristics of langasite single crystals for SAW filter applications

  • Jang, Min-Chul;An, Jin-Ho;Kim, Jong-Cheol;Auh, Keun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.4
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    • pp.309-317
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    • 2000
  • Langasite is a promising new piezoelectric material for SAW filter application. Little was known until recently about the methods needed to mechanically polish and chemically polish/etch this material. In this experiment, polishing, slurry chemistry and chemical wet etching for langasite is described. Conventional quartz and LN ($LiNbO_3$) polishing methods did not produce satisfactory polished surfaces, and polishing with a colloidal silica slurries has shown to be most effective. The optimum condition was investigated by changing the slurry chemistry. As the planarization effect is very important in SAW filter applications, the examination of the effective particle number effect and the particle size effect was carried out. Z-cut langasite surface which had been polished with the colloidal silica slurries was etched in a variety of etchants. Conventional quartz etchants destroyed the polished surface. Other etchants formed a thin film on the surfaces. In this experiment, the reaction between langasite and a few etching solution was analysed. And an appropriate selective etchant solution for analyzing the defects was synthesized.

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Quartz Crystal Microbalance Modified by a Novel Vapor Diffused Molecular Assembly Technique and Measurement of Chiral Mandelic Acid (기상확산 자기조립화법에 QCM수식과 Madelic Acid 키랄물질 측정)

  • Kim, JongMin;Kim, SeungJin;Woo, SunYoung;Jang, SukHee;Kim, Woo-Sik;Chang, SangMok
    • Korean Chemical Engineering Research
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    • v.48 no.5
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    • pp.574-582
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    • 2010
  • In this study, the possibility of a quartz crystal micro-balance(QCM) modification of crystallization of L-Penicillamine and D-Penicillamine with a Vapor Diffused Molecular Assembly Technique and its application to the R-(-)-Mandelic acid and S-(+)- Mandelic acid measurement was investigated. The 3-dimensional structures of L-Penicillamine and D-Penicillamine on the surface of QCM were verified to be different from each other through QCM and AFM analyses. The D-Penicillamine modified QCM had specific recognition to the R-(-)-Mandelic acid, but L-Penicillamine modified QCM had no specificity to the R-(-)-Mandelic acid and S-(+)- Mandelic acid. From these results, it was known that the QCM could be modified with various selective meterials via VDMA, and the chiral isomer such as a Mandelic acid isomer could be detected by using a modified QCM.

A QCM-based Sensor System for Detecting NO2 and SO2 (QCM기반 NO2와 SO2 감지용 센서시스템)

  • Hwang, Min-Jin;Shim, Wang Geun;Moon, Hee
    • Korean Chemical Engineering Research
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    • v.51 no.2
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    • pp.285-291
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    • 2013
  • The effects of sensing materials, coating methods, diluent gases, and temperature have been studied in detail to make a quartz crystal microbalance based adsorption sensor system for detecting gases. In particular, sensor elements for detecting $NO_2$ and $SO_2$, that are known as major air pollutants, have been prepared by coating two different polymers, polypyrrole and poly(3,4-ethylenedioxythiophene). The sensor elements prepared in this work have high sensitivity and selectivity for $NO_2$ and $SO_2$ at ppm level concentrations. It was proven that the sensing characteristics and response rate of the sensing elements are highly dependent on the coating method and the loading mass of sensing materials.

A Study on the PZT Application for Spacecraft Components under Space Environment (우주환경하의 위성부품용 압전진동자 활용에 관한 연구)

  • Lee, Sang-Hoon;Moon, Guee-Won;Yoo, Seong-Yeon
    • Journal of the Korean Vacuum Society
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    • v.21 no.6
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    • pp.287-294
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    • 2012
  • In the high vacuum condition of the space, outgassing from any assembly of satellite can contaminate satellites, especially second surface mirror and optical lens, it cause satellite to fail in own missions. Therefore, all unit shall be check for compatibility with vacuum using CVCM (Collected Volatile Condensable Material) and TML (Total Mass Loss) in advance. CVCM and TML of the PZT-5 piezoelectric ceramic vibrator has less than 0.1% and 1.0% respectively. Also, it has less than 500 $ng/cm^2/hr$ of Thermoelectric Quartz Crystal Microbalance for vacuum bake-out test using high temperature(more than $80^{\circ}C$) and high vacuum (less than $5.0{\times}10^{-3}$ Pa). Thus, piezoelectric ceramic vibrator may be employed in the vacuum environments. Finally, it can be confirmed that the characteristics change of the piezoelectric ceramic vibrator is less than 1% under vacuum environments.