• Korean Journal of Materials Research
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• v.27 no.8
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• pp.403-408
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• 2017

We investigated the effect of ZnO buffer layer on the formation of ZnO thin film by ultrasonic assisted spray pyrolysis deposition. ZnO buffer layer was formed by wet solution method, which was repeated several times. Structural and optical properties of the ZnO thin films deposited on the ZnO buffer layers with various cycles and at various temperatures were investigated by field-emission scanning electron microscopy, X-ray diffraction, and photoluminescence spectrum analysis. The structural investigations showed that three-dimensional island shaped ZnO was formed on the bare Si substrate without buffer layers, while two-dimensional ZnO thin film was deposited on the ZnO buffer layers. In addition, structural and optical investigations showed that the crystalline quality of ZnO thin film was improved by introducing the buffer layers. This improvement was attributed to the modulation of the surface energy of the Si surface by the ZnO buffer layer, which finally resulted in a modification of the growth mode from three to two-dimensional.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1727-1732
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• 2008

We present a facile, yet versatile carbon nanofabrication method using electron beam lithography and resist pyrolysis. Various resist nanopatterns were fabricated using a negative electron beam resist, SAL-601, and were then subjected to heat treatment in an inert atmosphere to obtain carbon nanopatterns. Suspended carbon nanostructures were fabricated by wet-etching of an underlying sacrificial oxide layer. Free-standing carbon nanostructures, which contain 122 nm-wide, 15 nm-thick, and 2 ${\mu}m$-long nanobridges, were fabricated by resist pyrolysis and nanomachining processes. Electron beam exposure dose effects on resist thickness and pattern widening were studied. The thickness of the carbon nanostructures was thinned down by etching with oxygen plasma. An electrical biosensor utilizing carbon nanostructures as a conducting channel was studied. Conductance modulations of the carbon device due to streptavidin-biotin binding and pH variations were observed.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.22-25
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• 2022

Metal oxide semiconductor (MOS) based on spray-pyrolysis deposition technique has attracted large attention due to simple and low-cost processibility while preserving their intrinsic optical and electrical characteristics. However, their high process temperature limits practical applications. Here, we demonstrated the nc-ZnO/ZnO field-effect transistors (FETs) via spray-pyrolysis as incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. The nc-ZnO/ZnO FETs exhibit good quality of electrical properties. Our experiments reveal that nc-ZnO in active layer enhance electrical characteristics.

• Journal of the Semiconductor & Display Technology
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• v.22 no.1
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• pp.78-82
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• 2023

Metal oxide semiconductor (MOS) adapting spray-pyrolysis deposition technique has drawn large attention based on their high quality of intrinsic and electrical properties in addition to simple and low-cost processibility. To fully utilize the merits of MOS field-effect transistors (FETs) , transparency, it is important to understand the instability behaviors of FETs under illumination. Here, we studied the photo-induced properties of nc-ZnO/ZnO field-effect transistors (FETs) based on spray-pyrolysis under illumination which incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. Our experiments reveal that nc-ZnO in active layer suppressed the light instabilities of FETs.

• Korean Journal of Materials Research
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• v.27 no.7
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• pp.392-397
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• 2017

Fluorine-doped tin oxide (FTO) coated NiCrAl alloy foam is fabricated using ultrasonic spray pyrolysis deposition (USPD). To confirm the influence of the FTO layer on the NiCrAl alloy foam, we investigated the structural, chemical, and morphological properties and chemical resistance by using USPD to adjust the FTO coating time (12, 18, and 24 min). As a result, when an FTO layer was coated for 24 min on NiCrAl alloy foam, it was found to have an enhanced chemical resistance compared to those of the other samples. This improvement in the chemical resistance of using USPD NiAlCr alloy foam can be the result of the existence of an FTO layer, which can act as a protection layer between the NiAlCr alloy foam and the electrolyte and also the result of the increased thickness of the FTO layer, which enhances the diffusion length of the metal ion.

• Korean Chemical Engineering Research
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• v.44 no.6
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• pp.614-622
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• 2006

A Study on the characteristics of $Ta/Ta_2O_5/MnO_2$ capacitor applied $MnO_2$ by means of pyrolysis of manganese nitrate solution was carried out. Single phase of $MnO_2$ was obtained in the pyrolysis temperature range of 230 to $250^{\circ}C$ by TG/DSC analysis on manganese nitrate solution. Temperature of pyrolysis, concentration of manganese nitrate solution and the number of pyrolysis were selected for the basic parameters of embodying $MnO_2$ solid electrolyte and then the effects of these parameters on the characteristics of capacitor were estimated. The characteristics of capacitor pyrolyzed radiationally was superior to that of capacitor pyrolyzed convectionally on the basis of these optimized parameter conditions. It was verified that radiational pyrolysis formed smaller spherical $MnO_2$ particles than those of convectional one relatively and these facts resulted in forming uniform and dense solid electrolyte layer into the microporous sintered body of capacitor.

• Journal of the Korean Ceramic Society
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• v.39 no.12
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• pp.1153-1157
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• 2002

The fabrication of a three-layered asymmetric ceramic membrane was performed by slip casting of the porous alumina support and dip coating of the alumina intermediate layer using high purity ${\alpha}-Al_2O_3$ powders that have different particle size, followed by screen printing-pyrolysis of the $Tio_2$ layer as an ultrafilteration membrane using Ti-naphthenate solution. The bending strength, porosity and mean pore size of the alumina support were 231 kg/$cm^2$s, 30.26% and 0.19 ${mu}m$, respectively. The thickness of the intermediate layer was 30 ${mu}m$ and the mean pore size of that was 0.063 ${mu}m$. Also, the top layer was 0.5 ${mu}m$ thick and micropores with about 20 nm size were formed uniformly.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.5
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• pp.217-220
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• 2005

We have fabricated a superconducting YBCO system according to the pyrolysis method and low pressure apparatus. In our experiment, the X-ray diffraction pattern of the non doped YBaCuO layer indicated that the superconductor contained only 90K phase crystal. The critical temperature and critical current density for a thick layer at $650^{\circ}C$ were Tc=90 K and $Jc=6{\times}10^{4}A/cm^2$ at 90K. In low pressure apparatus, the 90 K phase YBaCuO was grown at a lower temperature compared with the normal system. Tc and Jc at $650^{\circ}C$ were Tc = 90 K and $Jc=6{\times}10^{4}A/cm^2$ at 90K.

• Journal of the Korean Vacuum Society
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• v.5 no.4
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• pp.341-347
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• 1996

We fabricated the effective $Cu_2S$/CdS solar cells with large area by a spray pyrolysis method. In preparation process, we investigated the process parameters which directly influenced the efficiency of solar cell, such as the grid contact for electrodes, the temperature condition of CdS spray and the junction characteristics of $Cu_2S$ layer, by scanning electron microscope(SEM), x-ray diffraction(XRD) and temperature dependent optical absorption and photoconductivity. The $Cu_2S$/CdS solar cell with area of 1$\textrm{cm}^2$ showed the efficient of 3.15% under air mass 2(AM2) spectrum irradiation with 75mW/$\textrm{cm}^2$.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1499-1502
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• 2005

Dense $BaMgAl_{10}O_{17}:Eu^{2+}$ phosphor particles with a spherical shape have been synthesized through spray pyrolysis method using basic aluminum nitrate precursor as a spray solution. This $BaMgAl_{10}O_{17}:Eu^{2+}$ particles prepared by the spray pyrolysis have shown the stronger emission intensity compared to the commercially-available $BaMgAl_{10}O_{17}:Eu^{2+}$. However, thermal stability of the BAM:Eu b lue phosphor is very poor due to changing from $Eu^{2+}$ to $Eu^{3+}$ at the thermal process, so brightness of the phosphor decreases. To improve the thermal stability of the dense BAM:Eu phosphor, the spherical BAM:Eu particles were coated with pure $BaMgAl_{10}O_{17}$ layer using the hydrolysis reaction in a solution system. The synthesized powders were characterized by XRD, SEM and PL. On the other hand, the emission properties of the BAM:Eu phosphors coated with $BaMgAl_{10}O_{17}$ layer before and after thermal treatment at $500^{\circ}C$ for 30 min were estimated under VUV excitation. The brightness of the coated phosphor was higher than that of the uncoated phosphor. Also, the coating thickness of BAM layer in the BAM:Eu particles was optimized.