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The Study of nc-ZnO/ZnO Field-effect Transistors Fabricated by Spray-pyrolysis Process  

Cho, Junhee (Department of Electronics Engineering, Sangmyung University)
Publication Information
Journal of the Semiconductor & Display Technology / v.21, no.3, 2022 , pp. 22-25 More about this Journal
Abstract
Metal oxide semiconductor (MOS) based on spray-pyrolysis deposition technique has attracted large attention due to simple and low-cost processibility while preserving their intrinsic optical and electrical characteristics. However, their high process temperature limits practical applications. Here, we demonstrated the nc-ZnO/ZnO field-effect transistors (FETs) via spray-pyrolysis as incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. The nc-ZnO/ZnO FETs exhibit good quality of electrical properties. Our experiments reveal that nc-ZnO in active layer enhance electrical characteristics.
Keywords
Zinc oxide; Spray pyrolysis; Metal oxide; Nanocrystalline nanoparticle;
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