Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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The Study of nc-ZnO/ZnO Field-effect Transistors Fabricated by Spray-pyrolysis Process

스프레이 공정을 이용한 nc-ZnO/ZnO 전계효과트랜지스터 제작 및 특성 분석

  • Cho, Junhee (Department of Electronics Engineering, Sangmyung University)
  • 조준희 (상명대학교 전자공학과)
  • Received : 2022.08.03
  • Accepted : 2022.09.19
  • Published : 2022.09.30
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Abstract

Metal oxide semiconductor (MOS) based on spray-pyrolysis deposition technique has attracted large attention due to simple and low-cost processibility while preserving their intrinsic optical and electrical characteristics. However, their high process temperature limits practical applications. Here, we demonstrated the nc-ZnO/ZnO field-effect transistors (FETs) via spray-pyrolysis as incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. The nc-ZnO/ZnO FETs exhibit good quality of electrical properties. Our experiments reveal that nc-ZnO in active layer enhance electrical characteristics.

Keywords

Acknowledgement

본 연구는 2022학년도 상명대학교 교내연구비를 지원 받아 수행하였음 (과제번호: 2022-A000-0326).

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