• 제목/요약/키워드: Pure water

검색결과 1,125건 처리시간 0.033초

Applying a Life-Cycle Assessment to the Ultra Pure Water Process of Semiconductor Manufacturing

  • Tien, Shiaw-Wen;Chung, Yi-Chan;Tsai, Chih-Hung;Yang, Yung-Kuang;Wu, Min-Chi
    • International Journal of Quality Innovation
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    • 제6권3호
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    • pp.173-189
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    • 2005
  • A life-cycle assessment (LCA) is based on the attention given to the environmental protection and concerning the possible impact while producing, making, and consuming products. It includes all environmental concerns and the potential impact of a product's life cycle from raw material procurement, manufacturing, usage, and disposal (that is, from cradle to grave). This study assesses the environmental impact of the ultra pure water process of semiconductor manufacturing by a life-cycle assessment in order to point out the heavy environmental impact process for industry when attempting a balanced point between production and environmental protection. The main purpose of this research is studying the development and application of this technology by setting the ultra pure water of semiconductor manufacturing as a target. We evaluate the environmental impact of the Precoat filter process and the Cation/Anion (C/A) filter process of an ultra pure water manufacturing process. The difference is filter material used produces different water quality and waste material, and has a significant, different environmental influence. Finally, we calculate the cost by engineering economics so as to analyze deeply the minimized environmental impact and suitable process that can be accepted by industry. The structure of this study is mainly combined with a life-cycle assessment by implementing analysis software, using SimaPro as a tool. We clearly understand the environmental impact of ultra pure water of semiconductor used and provide a promotion alternative to the heavy environmental impact items by calculating the environmental impact during a life cycle. At the same time, we specify the cost of reducing the environmental impact by a life-cycle cost analysis.

Finite difference TVD scheme for modeling two-dimensional advection-dispersion

  • Guan, Y.;Zhang, D.
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2006년도 학술발표회 논문집
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    • pp.22-27
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    • 2006
  • This paper describes the development of the stream-tube based dispersion model for modeling contaminant transport in open channels. The operator-splitting technique is employed to separate the 2D contaminant transport equation into the pure advection and pure dispersion equations. Then the total variation diminishing (TVD) schemes are combined with the second-order Lax-Wendroff and third-order QUICKEST explicit finite difference schemes respectively to solve the pure advection equation in order to prevent the occurrence of numerical oscillations. Due to various limiters owning different features, the numerical tests for 1D pure advection and 2D dispersion are conducted to evaluate the performance of different TVD schemes firstly, then the TVD schemes are applied to experimental data for simulating the 2D mixing in a straight trapezoidal channel to test the model capability. Both the numerical tests and model application show that the TVD schemes are very competent for solving the advection-dominated transport problems.

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Design of Structured Surfaces for Directional Mobility of Droplets

  • Osada, Takehito;Kaneko, Arata;Moronuki, Nobuyuki;Kawaguchi, Tomoyo
    • International Journal of Precision Engineering and Manufacturing
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    • 제9권3호
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    • pp.13-17
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    • 2008
  • This paper deals with the directional mobility of droplets on structured surfaces. Structured surfaces were micro-patterned with rectangular lines and spaces of varying pitch and height in the sub-millimeter range. The material used was polydimethylsiloxane, which is hydrophobic and wettable by oil. First, we studied the effect of the structural design on the sliding angle of pure water or oil through experiments. For pure water droplets, we found that a wider pitch enhanced the directionality. On the other hand, oil droplets spread along the groove because of their low surface tension and strong capillary force. The directionality of the sliding angle of oil droplets was larger than that of pure water, especially when the groove was narrower and deeper. Second, we poured a large amount of liquid on the structure and evaluated the removal rate on the tilted surface. We found that a parallel structure enhanced the liquid mobility for both pure water and oil.

Water-Methanol and Water-Acetonitrile Mixture Analysis using NIR Spectral Data and Iterative Target Transform Factor Analysis

  • Na, Dae-Bok;Hur, Yun-Jeong;Park, Young-Joo;Cho, Jung-Hwan
    • 한국근적외분광분석학회:학술대회논문집
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    • 한국근적외분광분석학회 2001년도 NIR-2001
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    • pp.1289-1289
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    • 2001
  • Water-methanol and water-acetonitrile mixtures are frequently used as HPLC solvent system and strong hydrogen bonding is well-known. But a detailed aspect of water-methanol and/or water-acetonitrile mixtures have not been shown with direct spectral evidence. Recently, near infrared spectroscopy and chemometric data refinery have been successfully combined in many applications. On the basis of factor analytical methods, the spectral features of water-methanol and water-acetonitrile mixtures were studied to reveal the detail of mixtures. Water-methanol and water-acetonitrile mixtures were prepared with varying concentration of each constituent and near infrared spectral data were acquired in the range of 1100-2500nm with 2-nm interval. The data matrices were analysed with ITTFA(Iterative Target Transform Factor Analysis) algorithm implemented as MATLAB codes. As a result, the concentration profiles of water, methanol and water-methanol complex were resolved and the spectra of water-methanol complexes were calculated, which cannot be acquired with pure complexes. A similar result was obtained with NIR spectral data of water-acetonitrile mixtures. Moreover, pure spectra of hydrogen-bonding complexes of water-methanol and water-acetonitrile can be computed, while any other usual physical methods cannot isolated those complexes for acquiring pure component spectra.

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수분 섭취 및 배설량의 측정방법에 관한 연구 (A Study on Fluid Intake and Output Measurements)

  • 최스미;양영희;정연
    • 대한간호학회지
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    • 제25권1호
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    • pp.88-98
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    • 1995
  • The Fluid and electrolytes balance in the body is of critical importance in maintaining good health. When the fluid and electrolyte imbalance is present, patients are in great danger. They must be assessed immediately by a nurse so that appropriate treatment can be started as soon as possible. Patients' fluid intake and output records contain highly important information for the diagnosis and treatment of fluid imbalance, but, these records are often inaccurate and the method of recording the fluid intake is not universal for every hospital. Be-cause they are few quantitative measurements of a patient's hydration, the need to improve the accuracy of fluid intake records is very important. However, very few studies have been done to investigate the accuracy of measurements of patients' fluid intake and output. The purpose of this study was to investigate the methods used for calculation of fluid intake which is most similar to fluid output in normal adults and hospitalized patients. This study focused on three different calculation methods for fluid intake and compared these to fluid output and developed suggestions as to the ideal way to record fluid in-take. Data for 43 hospitalized patients and 37 normal adults were analyzed. The findings of this study are as follows ; 1) In normal adults, the daily intake of water which enteres by the oral route was 2415m1 (the first method of calculation). The daily intake of water in the form of pure water or some other beverage was 1365m1 (the third method of calculation) The daily intake of water including fresh fruits and vegetables, rice, porridges, and Me m which have water content more than 80% were 2186m1 (the second method of calculation). 2) The urine output of the normal adults was 1350m1. This apprroximates the amount of fluid an adult takes in the form of pure water. 3) In patient group, the total intake of water was 2550m1 (the first method of calculation). The in-take of water in the form of pure water or as some other beverage and IV fluid was 1661m1 (the third method of calculation). The daily in-take of water including foods which have high water content was 2356m1 (the second method of calculation). 4) The urine output of the patient's group was 1728m1. This approximates the amount of fluid an adult takes in the form of pure water. 5) Investigation of the method of calculation of the patient fluid intake showed that among the 31 hospitals studied, only eight use the third method of calculation which reflects the most close value to urine output. From the results obtained in this study, it was indicated that the amount of fluid taken in the form of pure water reflects the most close value to urine output. Therefore, it can be suggested that the third method of calculation which includes water in-take only in the form of pure water or beverage should be used as patients' fluid intake record.

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메탄-공기 확산화염에서 수소와 수증기 첨가가 화염구조와 NOx 배출에 미치는 효과 (Effects of Addition of Hydrogen and Water Vapor on Flame Structure and NOx Emission In $CH_4$-Air Diffusion Flame)

  • 박정;길상인;윤진한
    • 한국수소및신에너지학회논문집
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    • 제18권2호
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    • pp.171-181
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    • 2007
  • Blending effects of hydrogen and water vapor on flame structure and NOx emission behavior are numerically studied with detailed chemistry in methane-air counterflow diffusion flames. The composition of fuel is systematically changed from pure methane and pure hydrogen to the blending fuels of methane-hydrogen-water vapor through the molar addition of $H_2O$. Flame structure is changed considerably for hydrogen-blending methane flames and hydrogen-blending methane flames diluted with water vapor in comparison to pure methane flame. These complicated changes of flame structures also affect NOx emission behavior considerably. The changes of thermal NO and Fenimore NO are analyzed for various combinations of the fuel composition. Importantly contributing reaction steps to thermal NO and Fenimore NO are addressed in pure methane, hydrogen-blending methane flames, and hydrogen-blending methane flames diluted with water vapor.

개질된 표면을 이용한 풀비등 임계열유속 증진에 관련한 실험적 연구 (Experimental Investigation of CHF Enhancement on the Modified Surface Under Pool Boiling)

  • 강순호;안호선;조항진;김무환;김형모;김준원
    • 대한기계학회논문집B
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    • 제33권11호
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    • pp.840-848
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    • 2009
  • In the boiling heat transfer mechanism, CHF(critical heat flux) is the significantly important parameter of the system. So, many researchers have been struggling to enhance the CHF of the system in enormous methods. Recently, there were lots of researches about enormous CHF enhancement with the nanofluids. In that, the pool boiling CHF in nanofluids has the significantly increased value compared to that in pure water because of the deposition of the nanoparticle on the heater surface in the nanofluids. The aim of this study is the comparison of the effect of the nanoparticle deposited surface and the modified surface which has the similar morphology and made by MEMS fabrication. The nanoparticle deposited surface has the complex structures in nano-micro scale. Therefore, we fabricated the surfaces which has the similar wettability and coated with the micro size post and nano structure. The experiment is performed in 3 cases : the bare surface with 0.002% water-ZnO nanofluids, the nanoparticle deposited surface with pure water and the new fabricated surface with pure water. The contact angle, a representative parameter of the wettability, of the all 3 cases has the similar value about 0 and the SEM(scanning electron microscope) images of the surfaces show the complex nano-micro structure. From the pool boiling experiment of the each case, the nanoparticle deposited surface with pure water and the fabricated surface with pure water has the almost same CHF value. In other words, the CHF enhancement of the nanoparticle deposited surface is the surface effect. It also shows that the new fabricated surface follows the nanoparticle deposited surface well.

디젤자동차의 저공해형 연료공급장치 개발 I (유화연료의 특성 및 분무거동) (Development of the low Emission type Fuel Feeding System for Diesel Automobile I (Characteristics and Spray of Emulsified Fuel))

  • 조성철;윤면근;류정인
    • 한국분무공학회지
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    • 제2권3호
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    • pp.8-16
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    • 1997
  • Ta investigate characteristics and spray of emulsified fuet we are mixed water with diesel oil using ultrasonic energy fuel feeding system. Separation ratio of emulsified fuel was shown good condition that of water content is small and longer ultrasonic energy adding time. Viscosity of emulsified fuel increased 79% with addition to water content and surface tension increased 1.6% in comparision to pure diesel oil. The SMD of emulsified fuel adding ultrasonic energy decreased with 3% in comparision to pure diesel oil. With increasing 5, 10% water content the SMD decreased 15.6, 20.1% in comparision to pure diesel oil. The mind-explosion was investigated with 4step.

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반도체 세정 공정에서의 초순수 (Application of ultra pure water in semiconductor wet cleaning process)

  • 송재인;박흥수;고영범;이문용
    • 한국막학회:학술대회논문집
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    • 한국막학회 1996년도 제4회 하계분리막 Workshop (초순수 제조와 막분리 공정)
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    • pp.149-153
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    • 1996
  • 반도체 소자 제조 공정이 고 집적화 됨에 따라 습식 세정방법에 의한 세정공정의 중요성이 더욱 증가 되어지고 있으며, 특히 그 중에서 전체 세정공정의 약 절반을 차지하고 있는 Deionised water에 의한 rinsing 공정의 경우 ultrapure water의 quality가 최근 지속적으로 향상이 되어짐에 따라 많은 발전을 자져 왔다. 일반적으로 Deionised water에 함유하고 있는 TOC(total oxidisable components), bacteria, metallic impurity, desolved oxygen cencentration, colloidal material impurity (예를 들면 Silica, oraganic substrate)등은 ultra pure water의 quality를 결정하는데 매우 중요한 factor로 작용하고 있으며, 이러한 불순물들이 반도체 제조공정중 wafer surface에 흡착되어 졌을때 여러형태의 defect들을 유발한다고 알려져 있다. 그러나 pseudommonas, flavobacterlum, alcaligene등의 기 얄려진 bacteria들의 경우 Deionised water를 supply해주는 배관의 Inner surface에 잘 흡착 되지만 고온의 water 혹은 과산화수소수($H_{2}O_{2}$) 를 이용하여 주기적으로 처리 해줌으로 인하여 이에 대한 문제점을 어느정도 최소화 시킬수 있다. 위의 두가지 방법중 전자의 경우 chemical을 사용하지 않고, 유지 및 관리가 간편하며, 용존산소량을 줄일수 있다는 점에서 장점이 있으나, 전 ultra pure water의 system이 열적으로 안정해야 하고 경제적인 문제가 수반하는 단점을 가지고 있다. 후자의 경우, 미량의 과산화수소수 (1~10,000 ppm)를 이용해 처리 해주는 방법의 경우 경제적으로 큰 장점이 있고, 처리가 단순하다는 장점이 있으나 과산화수소수 자체에 포함하고 있는 높은 impurit level, 그리고 처리후 장시간의 flushing time을 가져야 한다는 단점등이 존재 하고 있다.

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태양열 집열기 적용을 위한 순수 물과 에탄올 탄소나노유체의 특성 비교 연구 (A Comparative Study on the Characteristics of the Pure water and Ethanol Carbon Nanofluids for Applying Solar Collector)

  • 안응진;박성식;천원기;박윤철;김남진
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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    • pp.194-199
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    • 2012
  • In this study, for increasing the efficiency of solar collector, the thermal conductivities and viscosities of the pure water and ethanol oxidized multi-walled carbon nanofluids were measured. Nanofluids were manufactured by ultra-sonic dispersing oxidized multi-walled carbon nanotubes(OMWCNTs) in the pure-water and ethanol at the rates of 0.0005 ~ 0.1 vol%. the Thermal conductivities and viscosities of manufactured nanofluids were measured at the low temperature($10^{\circ}C$), the room temperature($25^{\circ}C$) and the high temperature($70^{\circ}C$). For measuring thermal conductivity and viscosity, we used Transient Hot-wire Method and Rotational Digital Viscometer, respectively. As a result, under given temperature conditions, thermal conductivity of the 0.1 vol% pure-water nanofluid improved 7.98% ($10^{\circ}C$), 8.34% ($25^{\circ}C$), and 9.14% ($70^{\circ}C$), and its viscosity increased by 37.08% ($10^{\circ}C$), 33.96% ($25^{\circ}C$) and 21.64% ($70^{\circ}C$) than the base fluids. Thermal conductivity of the 0.1 vol% ethanol nanofluids improved 33.72% ($10^{\circ}C$), 33.14% ($25^{\circ}C$), and 32.36% ($70^{\circ}C$), and its viscosity increased by 37.93% ($10^{\circ}C$), 31.92% ($25^{\circ}C$) and 29.42% ($70^{\circ}C$) than the base fluids.

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