• 한국정밀공학회지
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• 제24권6호
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• pp.86-95
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• 2007

This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1196-1200
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• 2004

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. In this study, a bubble-powered micropump was fabricated and tested. The micropump consists of two-parallel micro line heaters, a pair of nozzle-diffuser flow controller and a 1 mm in diameter, 400 ${\mu}m$ in depth pumping chamber. The two-parallel micro line heaters with 20 ${\mu}m-width$ and 200 ${\mu}m-length$ were fabricated to be embedded in the silicon dioxide layer of a wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer (thickness of $525{\pm}15$ ${\mu}m$) having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Finally the silicon wafer of the base plate, the silicon wafer of pumping chamber and the glass wafer were aligned and bonded (Si-Si bonding and anodic bonding). A sequential photograph of bubble nucleation, growth and collapse was visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the end of collapsing period can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. As duty ratio increases, flow rate decreases gradually when the duty ratio exceeds 60%. Also as the operation frequency increases, the flow rate of the micropump decreases slightly.

• Applied Science and Convergence Technology
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• 제24권4호
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• 한국진공학회지
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• 제2권4호
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• pp.480-485
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• 1993

Factros considered building the magnetron sputtering system for TFT LCD (thin film transistor liquid crystal display0 metallization were thin film thichnes uniformity, temperature uniformity and the pressure gradient of sputtering gas flow in vacuum chamber, base pressure, and the stability fo the carrier moving . The system was consisted of a deposition chamber, a pre-heating chamber, a RF-precleaning chamber and a load/unload lock chamber. The system was designed to handle a substrate with dimension of 400$\times$400mm. The temperautre uniformity of a heater table developed showed $250 ^{\circ}C\pm$5% accuracyon the substrate glass. A base pressure of 1.8 $\times$10-7 torr was obtained after 24 hours pumping with a cryo pump. After an aluminum target was installed in a sputtering source and the film wa sdeposited on the glass, the uniformity, reflectivity and sheet resistance of the deposited film were measured.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1658-1665
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• 1989

Reactor design considerations over several critical parameters for a planar type reactive ion etcher are given. The etch uniformity is taken as a principal design constraint. The characteristics of economicaly available vacuum pumping system are taken as practical design constraints. A set of theoretical conditions on the chamber geometry and on the gas delivery and vacuum system, that satisfy the design constraints, are derived from basic properties of RF glow discharge and gas dynamics. The theoretical results are applied to decide design parameters of a practical single-wafer-per-chamber planar type reactive ion etching machine.

• International journal of advanced smart convergence
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• 제8권4호
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• pp.200-206
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• 2019

In this study, we compared the VacCAD and VacSim^(Multi), commercial vacuum simulators, to verify the advantages of VacCAD's efficiency. It was emphasized on immediacy and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and vacuum materials. First, usability of simulation mechanism was estimated through the modeling schematics and obtained simulation results of each employed simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping characteristics of commercially available high vacuum systems. In addition, the degree of tolerances on VacCAD was also investigated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacSim^(Multi) has been presented, and it was expected that the utilization of VacCAD in vacuum applications to be increased.

• 한국유체기계학회 논문집
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• 제9권2호
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• pp.19-24
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• 2006

Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction of patterns and surface variation in the micro process. In this study, nuo fountain-pen is composed with reservoir, micro channels, tip and scondary chamber. Instead of traditional method only using capillary force, liquid can be definitely and exactly injected with membrane pumping by the repulse force of tip. It is dfficult to perform experiments in the micro range so that we carried out a numerical analysis for internal flow, using a commercial code, FlUENT, The velocity, pressure and flow rate are obtained under laminar, unsteady, three-dimensional incompressible flow with no-slip condition, and results are graphically described.

• 한국정밀공학회지
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• 제16권5호통권98호
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• pp.74-82
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• 1999

To meet the needs of the hydraulic excavator of large capacity, tandem axial type piston pump which is high pressure and high speed have been developed. But inevitably we can not help facing the problem of noise at that time. In order to reduce the noise of this pump, many researchers have been studying the problem of oil distribution manner. But they are not interested in the symmetric structure of tandem type pump. So, focusing on the symmetric structure of tandem type pump, this paper analyzed unbalanced force developed in the pump chamber and verified the effect of the pumping phase of the piston on vibration and noise of the tandem axial type piston pump theoretically.

• International journal of advanced smart convergence
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• 제12권4호
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• pp.217-223
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• 2023

In this study, we compared the VacCAD and VacTran, commercial vacuum simulators, to investigate the simulation applicability and efficiency as vacuum simulation software. It was verified on reliability and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and employed vacuum materials. First, usability of simulation schematics was estimated through the modeling tools and the overall simulation characteristics of each simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping performance characteristics of commercial high vacuum system models. In addition, the degree of tolerances on both simulators was also evaluated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacTran has been presented, and it was also expected that the utilization of VacTan in vacuum applications to be increased due to the higher availability of modelling variations.

• 한국유체기계학회 논문집
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• 제8권4호
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• pp.20-26
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• 2005

When the pumps are started or stopped for the operation or tripped due to the power failure, the hydraulic transients occur as a result of the sudden change in velocity. The field tests on the waterhammer were carried out for Pangyo booster pumping station in which had six booster pumps and two in-line pumps with the motor of output 1,700 kW, respectively. The booster pumping station was equipped with the pump control valve as the main surge suppression device, and the surge relief valve as auxiliary one. But the pump control valve had not early controlled in the planned closing mode, the slamming occurred to the valve of which abruptly closed during the large reverse flow. Because the positive pressure wave caused by the pump failure was superposed on the slam surge, the upsurge increased so extremely that the pump control valve was damaged. After the air chambers were additionally installed in the booster pumping station, it was preyed that the water supply system acquire the safety and reliability on the pressure surge.