• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.175-177
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• 2012

A corrosion resistance and hard nitrocarburized layer was distinctly formed on 310 austenitic stainless steel substrate by DC plasma nitrocarburizing. Basically, 310L austenitic stainless steel has high chromium and nickel content which is applicable for high temperature applications. In this experiment, plasma nitrocarburizing was performed in a D.C. pulsed plasma ion nitriding system at different temperatures in $H_2-N_2-CH_4$ gas mixtures. After the experiment structural phases, micro-hardness and corrosion resistance were investigated by the optical microscopy, X-ray diffraction, scanning electron microscopy, micro-hardness testing and Potentiodynamic polarization tests. The hardness of the samples was measured by using a Vickers micro hardness tester with the load of 100 g. XRD indicated a single expanded austenite phase was formed at all treatment temperatures. Such a nitrogen and carbon supersaturated layer is precipitation free and possesses a high hardness and good corrosion resistance.

• Proceedings of the KIEE Conference
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• 1999.07e
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• pp.2251-2252
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• 1999

In this paper, the effect of magnetic field was measured on NOx removal characteristics for wire-plate plasma reactor with magnetic field applied to electric field vertically. NOx from simulated diesel engine flue gas are decomposed by the corona discharge of DC, AC and Pulsed voltages in wire-plate reactor. Consumption power increased with increasing discharge voltage. When magnetic field was applied to electric field vertically, consumption power decreased. NOx removal rate and arc transition voltage of plasma reactor with magnetic field were higher than those of plasma reactor without magnetic field.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.87-88
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• 2006

Ceramic-Metal Functionally Graded Materials (FGM) are of great interest for application as Thermal Barrier Coating (TBC) or Wear Resistant Coating (WRC). Spark Plasma Sintering (SPS) is a promising techniques for time-saving consolidation of laminated/graduated powder systems: SPS is a pressure-assisted electrical sintering method which directly applies a pulsed DC current as heat source. In the present work, production of $Al_2O_3-Ni$ FGMs by means of Spark Plasma Sintering is considered; effect of sintering condition on density, hardness and fracture toughness is studied. Problems correlated to this new processing technology are discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.226-226
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• 2011

소형 대기압 플라즈마 소스는 그 형태에 따라 DBD (Dielectric Barrier Discharge)나 Plasma Needle, 혹은 Plasma Jet 등으로 구별되며, 구동 파형의 특성에 따라 DC, RF (Radio Frequency), 혹은 Pulsed 방식 등으로 나뉜다. 또한 코로나 방전도 소형 대기압 플라즈마 장치에서 사용된다. DBD는 1857년 Siemens에 의해 최초로 보고 되었고 산업 분야에서 대규모로 사용되어 왔다. 본 연구에서는 대향 방전 DBD 대신 유전체 양쪽 면에 전극이 도포된 면방전 형태의 DBD 구조 내부로 He 가스가 흐를 때의 방전에 대한 광학적 진단을 수행하였다. 전극간의 거리와 가스 유속의 변화에 따라 방전 특성이 어떻게 달라지에 대해서 Optical Emission Spectroscopy (OES)를 통하여 생성되는 radical 종의 변화를 측정하고 ICCD (intensified charge coupled device) image를 통해 방전이 시간에 따라 어떻게 진행되는지를 진단하였다.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1910-1912
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• 1996

This paper presents the results of laboratory experimentals to remove $SO_2$ and $NO_x$ by a pulsed corona discharge in the wire-plate reactor. A rotating spark gap switch was used to generate the pulse by chewing the dc high voltage. Repetition frequency of the pulse was 60Hz and rising time of 50ns. The photo pictures of positive streamer corona taken by ICCD camera, pulse voltage and current were measured using a digital oscilloscope. Simultaneous effects of $C_{2}H_{4}$ injection and heterogeneous chemical reactions on nonthermal plasma process to remove $SO_2$ and $NO_x$ from flue gas were investigated in the present study

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.182.2-182.2
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• 2016

Hollow cathode discharge(중공 음극)는 음극 표면에서 발생되는 2차 전자를 이용하여 높은 밀도의 플라즈마를 만들 수 있는 장점이 있다. 전원으로 microwave, RF, DC, pulsed dc등을 사용할 수 있으며 박막의 증착, 식각 등에 응용 가능하다. 물리적 현상으로는 중공 음극 재료 표면 물질의 가열 및 이온 스퍼터링, 2차 전자의 가열, 자기장 인가 구조의 경우 전자 거동이 있다. PIC(particle-in-cell)방식의 모델링과 fluid model을 이용한 방법이 있는데 본 연구에서는 상용 fluid model software인 ESI사의 CFD-ACE+를 사용하여 모델링 하였다. 구동 주파수는 13.56 MHz의 상용 고주파 전원과 보다 낮은 1 MHz, 100 kHz의 수치 모델을 이용하여 HF, MF, LF 영역에서의 동작 특성을 해석하였다. 1차적으로는 가스 유동의 특성을 2D, 3D로 조사하였고 플라즈마 거동은 2차원을 주로 진행하였으며 계산 시간이 오래 거리는 3차원 모델을 하나 만들어 그 특성을 조사하였다.

• Applied Science and Convergence Technology
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• v.23 no.3
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• pp.145-150
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• 2014

MgO thin films were deposited by internal ICP-assisted reactive-magnetron sputtering with bipolar pulse bias on a substrate to suppress random arcs. Mg is reactively sputtered by a bipolar pulsed DC power of 100 kHz into ICP generated by a dielectrically shielded internal antenna. At a mass flow ratio of $Ar/O_2$ = 10 : 2 and an ICP/sputter power ratio of 1 : 1, optimal film properties were obtained (a powder-like crystal orientation distribution and a RMS surface roughness of approximately 0.42 nm). A bipolar pulse substrate bias at a proper frequency (~a few kHz) prevented random arc events. The crystalline preferred orientations varied between the (111), (200) and (220) orientations. By optimizing the plasma conditions, films having similar bulk crystallinity characteristics (JCPDS data) were successfully obtained.

• Korean Journal of Materials Research
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• v.12 no.6
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• pp.447-451
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• 2002

Pulsed DC-plasma nitriding has been applied to form nitride layer having only a diffusion layer. The discharge current with the variation of discharge gases is proportional to the intensity of $N_2^+$ peak in optical emission spectroscopy during the plasma nitriding. The discharge current, microhardness in surface of substrate and depth of nitride layer increased with the ratio of $N_2\;to\;H_2$ gas in discharge gases. When the ratio of $N_2\;to\;H_2$ is lower than 60% in the discharge gases, high microhardness value of 1100Hv nitride layer which contains no compound layer has been formed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.120-124
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• 2000

In this paper, the effect of magnetic field was measured on NOx(NO+NO2) removal and consumption power for wire-plate plasma reactor with magnetic field applied to electric field vertically. NOx of the simulated diesel engine flue gas were removed by the corona discharge generated by DC, AC and Pulsed voltages in wire-plate reactor. Consumption power increased with discharge voltage. However, when magnetic field was applied to electric field vertically, consumption power slightly decreased. NOx removal rate and arc transition voltage for plasma reactor with magnetic field were higher than those for plasma reactor without magnetic field. Consumption power decreased, however NOx removal significantly increased, when water vapour bubbled by dry air was put into simulated flue gas.

• Journal of the Korean institute of surface engineering
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• v.45 no.5
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• pp.206-211
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• 2012

Process analysis was carried out during deposition of MgO by inductively coupled plasma assisted reactive magnetron sputtering in Ar and $O_2$ ambient. At the initiation of Mg sputtering with bipolar pulsed dc power in Ar ambient, total pressure showed sharp increase and then slow fall. To analyse partial pressure change, QMS was used in downstream region, where the total pressure was maintained as low as $10^{-5}$ Torr during plasma processing, good for ion source and quadrupole operation. At base pressure, the major impurity was $H_2O$ and the second major impurity was $CO/N_2$ about 10%. During sputtering of Mg in Ar, $H_2$ soared up to 10.7% of Ar and remained as the major impurity during all the later process time. When $O_2$ was mixed with Ar, the partial pressure of Ar decreased in proportion to $O_2$ flow rate and that of $H_2$ dropped down to 2%. It was understood as Mg target surface was oxidized to stop $H_2$ emission by Ar ion sputtering. With ICP turned on, the major impurity $H_2$ was converted into $H_2O$ consuming $O_2$ and C was also oxidized to evolve CO and $CO_2$.