• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.569-572
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• 2000

This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10$\mu\textrm{m}$ thick silicon membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD(Resistance Thermometer Device)on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280$^{\circ}C$ at input Power 0.9 W; for the SOI membrane with 10 trenches, it is 580$^{\circ}C$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro thermal sensors and actuators.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1921-1923
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• 2001

In this work, an array of resistance temperature detector(RTD) was fabricated inside the microchannel in order to investigate in-situ flow characteristics. A rectangular straight microchannel, integrated with RTD's for temperature sensing and a heat source for generating the temperature gradient along the channel. were fabricated with the dimension of $200{\mu}m(W){\times}{\mu}m(D){\times}$48mm(L), while RTD measured precise temperatures at the inside-channel wall. 4" $525{\pm}25{\mu}m$ thick P-type <100> Si wafer was used as a substrate. For the fabrication of RTDs. 5300$\AA$ thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, glass wafer was bonded with Si wafer by anodic bonding, therefore RTD was located inside the microchannel. The temperature distribution inside the fabricated microchannel was obtained from 4 point probe measurements and Dl water is used as a working fluid. Temperature distribution inside the microchannel was measured as a function of mass flow rate and heat flux. As a result, precise temperatures inside the microchannel could be obtained. In conclusion, this novel temperature distribution measurement system will be very useful to the accurate analysis of the flow characteristics in the microchannel.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2544-2546
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• 1998

The electrical and physical charateristics of Pt-Co alloy thin films on $Al_2O_3$ substrate, deposited by r.f cosputtering respectively, were analyzed with thickness of thin films ($1700{\sim}10000{\AA}$) and increasing annealing temperature ($800{\sim}1000^{\circ}C$). At input power of Pt : 4.4 W/$cm^2$, Co : 6.91 W/$cm^2$, working vacuum of 10 mTorr and annealing conditions of $1000^{\circ}C$) and 60 min, the resistivity and sheet resistivity of Pt-Co thin films with thickness of $3000{\AA}$ was $15{\mu}{\Omega}{\cdot}cm$ and 0.5 ${\Omega}/{\square}$, respectively. The TCR value of Pt-Co alloy thin films was measured with various thickness of thin films and annealing conditions. The optimum TCR value of 3850 ppm/$^{\circ}C$ in temperature range($200{\sim}400^{\circ}C$) is gained under conditions $3000{\AA}$ of thin films thickness and $1000^{\circ}C$ of annealing temperature. The thermal charateristics of Pt-Co micro heaters were analysed with Pt-Co RTD integrated on the same substrate. In the analysis of characteristics of Pt-Co micro heaters, the Pt-Co micro heaters with thickness of $3000{\AA}$ and annealing temperature of $1000^{\circ}C$ had a good linearity and temperature is up to $468.2^{\circ}C$ with 2.1 watts of the heating power.

• 한국표면공학회지
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• 제32권1호
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• pp.3-9
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• 1999

Pt thin film of about 7000$\AA$ thickness was deposited on the alumina substrate using DC Magnetron Sputter and the characteristics of the film for temperature sensor were investigated. When film of about 7000$\AA$ thickness was deposited at working gas pressure of $2.0{\times}10^{-3}$torr, sputtering power of 50W, substrate temperature of $350^{\circ}C$(Ts), sheet resistance(Rs), resistivity($\rho$) and temperature coefficient of resistivity(TCR) of the film were respectively 0.39$\Omega$/$\square$, 27.60$\mu\Omega$-cm and $3350 ppm/^{\circ}C$. When the film was annealed at $1000^{\circ}C$ for 240min in hydrogen ambient, Rs, $\rho$ and TCR were respectively 0.236$\Omega$/$\square$, 15.18$\mu\Omega$-cm and 3716 ppm/$3716 ppm/^{\circ}C$. When working gas of 15sccm oxygen and 100sccm Argon were used, Rs, $\rho$ and TCR were respectively 0.335$\Omega$/$\square$, 22.45$\mu\Omega$-cm and $3427 ppm/^{\circ}C$. When the film was annealed at $1000^{\circ}C$ for 240min, Rs, $\rho$and TCR were respectively 0.224/$\Omega$$\square$, 14$\mu\Omega$-cm and $3760 ppm/^{\circ}C$ and the characteristics of the film were much improved.

• 센서학회지
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• 제18권5호
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• pp.349-352
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• 2009

This paper describes the fabrication and characteristics of micro heaters built on AlN($0.1{\mu}m$)/3C-SiC($1{\mu}m$) suspended membranes by surface micromachining technology. In this work, 3C-SiC and AlN films are used for high temperature environments. Pt thin film was used as micro heaters and temperature sensor materials. The resistance of temperature sensor and the power consumption of micro heaters were measured and calculated. The heater is designed for operating temperature up to about $800^{\circ}C$ and can be operated at about $500^{\circ}C$ with a power of 312 mW. The thermal coefficient of the resistance(TCR) of fabricated Pt resistance of temperature detector(RTD)'s is 3174.64 ppm/$^{\circ}C$. A thermal distribution measured by IR thermovision is uniform on the membrane surface.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.324-326
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• 1997

Low power ZnO-Si gas sensor below 500 mW at operating temperature has been fabricated by using micromachining technique. I-V measurement shows the power consumption of 260 mW at $400^{\circ}C$ The sensitivity of the sensor was 45 percent at operating temperature of $350^{\circ}C$(230 mW) with 1,000 ppm CO gas atmosphere. The response and the recovery time found out to be 94 sec and 180 sec, respectively, when CO gas was used. In order to measure the exact temperature of the gas sensing layer, Pt/Cr bilayer-RTD was used in this experiment.

• 한국식품저장유통학회지
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• 제1권1호
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• pp.37-43
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• 1994

A microcomputer system consisting of 16-bit microcomputer, PCL-711S interface board, censors, and converters have been set up in order to automatically measure temperature, humidity and weight loss which are major variables of storage of apple. This system was operated by PC-LabDAS software. It has been possible to measure continuously the weight loss of Fuji apple stored in CA with the weight converter made by a miniature load cell and a strain amplifier. The temperature was checked by a k-type thermocouple and Pt 100 $\Omega$ RTD, and humidity by PQ653JAl humidity sensor. It has been possible to set up a linear equation which showers high correlationship between the estimate of temperature, weight humidity and the output of the converter in that r2 is more than 0.99. Transpiration rate, a significant factor of quality deterioration for CA storage of apple, can be estimated with these values.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권9호
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• pp.449-454
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• 2002

A rectangular straight microchannel, integrated with the resistance temperature detectors(RTDs) for temperature sensing and a micro-heater for generating the Temperature gradient along the channel, was fabricated. Its dimension is 57${\mu}{\textrm}{m}$(H)$\times$200${\mu}{\textrm}{m}$(W)$\times$48,050${\mu}{\textrm}{m}$(L), and RTDs were placed at the inner-channel wall. Si wafer was used as a substrate. For the fabrication of RTDs, 5300$\AA$ thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, the glass wafer was bonded with Si wafer by anodic bonding, so that the RTDs are located inside the microchannel. Temperature coefficient of resistance(TCR) values of the fabricated Pt-RTDs were 2800~2950ppm$^{\circ}C$ and the variation of TCR value In the range of O~10$0^{\circ}C$ was less than 0.3％. Therefore, it was proved that the fabricated Pt-RTDs without annealing were excellent as temperature sensors. The temperature distribution in the microchannel was investigated as a function of mass flow rate and heating power. The temperature increase rate diminished with decreasing the applied power and increasing the mass flow rate. It was confirmed from the comparison with the simulation results that the temperature measured inside the microchannel is more accurate than measuring the temperature measured at the outer wall. The proposed temperature sensing method and microchannel are expected to be useful in microfluidics researches.

• 한국전기전자재료학회논문지
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• 제28권1호
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• pp.46-50
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• 2015

The cable degradation process is largely divided into three steps; Step 1 : Thermal degradation, Step 2 : Weibull degradation, Step 3 : Partial discharge. it is progress in step order. This article aims to explain the process of cable degradation using the method of insulation resistance and accordingly to compose and manufacture a system of measuring the life of electrical cable. Before measuring the insulation resistance, a system of measuring the temperature and current of cables was made, and the established system was installed for test on the site of a power plant to collect the measured data. The current sensor was used TFC30P80A-CL420, and temperature sensor was used the DK-1270 PT100 sensor as RTD sensor. When measured the temperature and the load current at the same position, was confirmed that in case of the load current value was high, also temperature value high. Therefore, the correlation between load currents and temperature was verified, and the analysis of diagnostic data was evaluated, which could be utilized in identifying the fault condition of cable systems.

• 한국조경학회지
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• 제40권5호
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• pp.100-108
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• 2012

통풍과 차양이 하절기 옥외공간에서 인간이 느끼는 온열쾌적성에 어떤 영향을 미치는지를 객관적으로 검증하기 위하여 통풍과 차양을 달리한 실험구를 조성하고 흑구온도와 기온 및 풍속을 측정하여 평균복사온도를 환산하여 비교 분석하였다. 미기후 측정을 위하여 개방된 잔디밭에 철제 각관을 이용하여 가로${\times}$세로${\times}$높이가 각각 $3m{\times}3m{\times}1.5m$인 프레임을 구성하고, 투명 폴리에틸렌 필름과 농업용 차광막을 이용하여 통풍과 차양의 조건을 달리한 네 가지의 실험구를 조성하였다. 각 실험구 내 중심부 지면으로부터 1.2m 높이에서 베인형 풍속계와 흑구, 측온저항체(PT-100)를 이용하여 2011년 5월 1일부터 동년 9월 30일까지 풍속과 기온, 흑구온도를 매 분 단위로 계측하였다. 기상조건과 계측자료의 유효성 등을 고려하여 총 44일 동안의 13,262건의 자료를 바탕으로 실험구별 일중 시계열적 변화를 분석하였으며, 낮 시간에 해당되는 오전 7시부터 오후 8시까지의 7,172건의 자료를 바탕으로 실험구에 따른 통계적 차이를 해석하였다. 아울러 햇볕이 가장 강렬한 시간대인 오전 11시부터 오후 4시까지의 자료를 바탕으로 평균복사온도와 풍속 및 일사량과의 관계를 분석하였다. 평균복사온도를 기준으로 해석했을 때, 통풍이 차단된 노지에서의 측정기간 중 최고값이 $58.84^{\circ}C$까지 상승한 반면, 차양이 적용되고 통풍이 원할한 실험구의 최고값은 $42.94^{\circ}C$였다. 시험결과를 종합하면, 하절기 옥외공간에서 낮 동안의 평균복사온도에 있어서 차양에 의해서는 최대 $13^{\circ}C$, 평균 $9^{\circ}C$의 냉각효과가 발생한 반면, 방풍에 의해서는 반대로 평균 약 $3^{\circ}C$의 가열효과가 있는 것으로 정리되어, 통풍이 되지 않는 태양직사광 지역은 바람이 원활하게 통하는 그림자 지역 보다 최대 $16^{\circ}C$까지 높은 것으로 나타났다. 결론적으로 본 연구를 통해서 하절기 옥외공간의 열쾌적성을 개선하는데 차양이 가장 중요하며, 그 다음이 통풍이라는 사실을 파악할 수 있었다. 따라서 옥외공간에 더 많은 녹음수와 숲을 조성하여 그림자 지역을 증가시킴으로써 인간의 하절기 옥외활동에 많은 제약을 주고 있는 불필요한 열에너지를 현격하게 저감시켜 쾌적한 미기후를 효과적으로 조성할 수 있으며, 나아가 정교하게 조성된 바람길이나 통풍 시스템을 적용한다면 도시 전체의 열환경도 효과적으로 개선할 수 있을 것이다.