• Journal of the Korean Ceramic Society
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• v.36 no.4
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• pp.403-409
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• 1999

The dielectric and pyroelectric properties of $Ba_{0.66}$$Sr_{0.38}$$TiO_{3}$(BST) thin films growtn on Pt/Ti/NON/Si us-ing RF magnetron sputtering have been investigated. With increasing the substrate temperature during de-position of the BST film in the range of 300-$600^{\circ}C$ the dielectric and pyroelectric constants of the film were increased due to improved crystallinity of the film. In addition the dependence of the microstructural and electrical properties of BST films onthe deposition temperature of the bottom Pt electrode was studied. The preferred orientation of the BST films as well as the microstructure of the Pt film was greatly in-fluenced by the deposition temperature of the bottom Pt electrode was studied. The preferred orientation of the BSt films as well as the microstructure of the Pt film was greatly in-fluenced by the deposition temperature of the bottom Pt electrodes. and thus so were the pyrolelectric pro-perties of the BST film. The highest value of pyroelectric coefficient at room temperature obtained in this work was $nCcm^{-2}K^{-1}$ which is much higher than those previously reported on other perovskite fer-roelectric thin films.

• Korean Chemical Engineering Research
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• v.51 no.1
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• pp.116-120
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• 2013

Characteristics of photocatalytic CO removal process conducting CO conversion by using Pt loaded $TiO_2$ photocatalyst were investigated in a photocatalytic tubular reactor. Effects of Pt loading method onto $TiO_2$, linear velocity of gas stream containing CO gas, CO concentration and moisture content in the gas stream on the conversion of CO to $CO_2$ were examined. It was found that the CO gas could be removed almost 100% by using photocatalytic tubular reactor internally coated with Pt/$TiO_2$ photocatalyst under UV irradiation, when the linear velocity of gas stream was in the range of 0.01~0.25 m/s and CO concentration in the gas stream was ranged from 20 to 100 ppm and the relative humidity of the gas stream was in the range of 20~40%. The conversion of CO gas decreased gradually with increasing linear velocity of gas stream and CO concentration in the gas stream. The moisture in the gas stream could promote the removal of CO gas by means of the generation of OHradicals.

• Journal of the Korean Ceramic Society
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• v.51 no.3
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• pp.218-223
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• 2014

The domain structures, dielectric properties, and phase transformation of (001)-oriented $Pb(Mg_{1/3}Nb_{2/3})O_3-x%PbTiO_3$ (PMN-x%PT) crystals for x=20, 30, 35, and 40 mole% have been investigated. PMN-20%PT consists of polar nano-domains (PND) which do not self-assemble into macro-domain plates. PMN-30%PT consists of PNDs which begin to self-assemble into colonies along preferred {110} planes. PMN-35PT consists of miniature polar domains on the nm scale. PMN-40%PT consists of {001} oriented lamella domains on the mm scale that have internal nano-scale heterogeneities. The dielectric properties of poled (001) PMN-x%PT single crystals have been measured for orientations both parallel and perpendicular to the [001] poling direction. The results of the temperature dependence of the dielectric constant and mesh scans for the 30%PT sample demonstrate that the initial monoclinic phase changes to single domain tetragonal phase and to cubic phase with increasing temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.609-612
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• 2002

In this study, the electrical properties were investigated for the deposited Ba,Sr)(Nb,Ti)$O_3$[BSNT] thin films grown on $Pt/TiO_2/SiO_2/Si$ substrate by RF sputtering method. The structural properties of the BSNT thin films affected by the $Ar/O_2$ rates were investigated. In the case of the BSNT thin films deposited with condition of 60/40$(Ar/O_2)$ ratio, the $BaTiO_3$, $SrTiO_3$ and $BaNbO_3$ phases were showed. The composition ratio of Nb and Ti in the BSNT thin films were nearly equivalent. Also, in the BSNT thin films deposited with condition of 60/40 and 80/20$(Ar/O_2)$ ratios, the composition of Ba, Sr, Nb and Ti were relatively uniform. The Ba, Sr, Nb and Ti in the BSTN thin films were not diffused into the Pt layer.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.99-99
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• 2000

본 논문에서는 RF Magnetron Sputtering 방법으로 Ba0.5Sr0.5TiO3 박막을 Pt/Ti/SiO2/Si 기판위에 증착하였다. Ar과 O2의 가스비는 90:10부터 50:50까지 O2의 함유비율을 10씩 증가시켰으며, 모든 조건에서 증착온도는 실온으로 설정하였다. Ba0.5Sr0.5TiO3 박막의 증착후 각 가스비에 따른 동일한 샘플에 대해 RTA(Rapid Thermal Anneal) 장비를 이용하여 $600^{\circ}C$에서 열처리는 하여 열처리 효과에 대한 특성도 조사하였다. 최종적으로 제작한 BST 커패시터는 Pt/BST/Pt 구조를 갖는 MIM(Metal-Insulator-Metal) 구조의 커패시터였으며 상.하부 전극은 전기적 특성이 우수한 Pt를 사용하였다. 제작된 BST 커패시터를 대해 유전 특성을 조사하기 위해 C-V 측정을 한 결과 산소 함유량이 증가함에 따라 유전율의 증가를 보여주었으며, 제작된 샘플 중 산소 함유량이 30인 샘플은 300이상의 우수한 유전율을 나타내었다. 또한 누설 전류특성에서는 모든 샘플에 대해 1.0V의 인가전압에서 1.0$\times$106A/cm2 이하의 누설 전류 밀도 값을 가져 전기적으로도 안정된 커패시터 구조임을 확인하였다. 또한 막의 증착상태와 미세구조관찰을 위해 SEM 측정을 하였고 구성성분 결정 구조를 알기 위해 XRD 측정도 시행하였다. 결과적으로 본 논문에서 제작된 커패시터 중 Sr/O의 비율이 70:30인 샘플이 가장 우수한 유전특성을 나타내었고, 이 샘플의 유전특성과 누설 전류 특성은 차세대 메모리인 1GigaByte급 DRAM에 적용 가능한 조건들을 만족시켰다.

• Journal of the Korean Ceramic Society
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• v.39 no.4
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• pp.341-345
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• 2002

The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.4
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• pp.317-321
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• 2003

In this study, the structural properties were Investigated for the deposited (Ba,Sr)(Nb,Ti)O$_3$[BSNT] thin films grown on Pt/TiO$_2$/SiO$_2$/Si substrate by RF sputtering method. The structural properties of the BSNT thin films affected by the Ar/02 ratios were Investigated. In the case of the BSNT thin films deposited with condition of 60/40(Ar/O$_2$) ratio, the BaTiO$_3$, SrTiO$_3$ and BaNbO$_3$ phases were showed. The composition ratio of Nb and Ti in the BSNT thin films were nearly equivalent. Also, in the BSNT thin films deposited with condition of 60/40 and 80/20(Ar/O$_2$) ratios, the composition of Ba, Sr, Nb and Ti were relatively uniform. The Ba, Sr, Nb and Ti in the BSTN thin films were not diffused into the Pt layer.

• Korean Journal of Materials Research
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• v.30 no.1
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• pp.14-21
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• 2020

Carbon supports for dispersed platinum (Pt) electrocatalysts in direct methanol fuel cells (DMFCs) are being continuously developed to improve electrochemical performance and catalyst stability. However, carbon supports still require solutions to reduce costs and improve catalyst efficiency. In this study, we prepare well-dispersed Pt electrocatalysts by introducing titanium dioxide (TiO₂) into biomass based nitrogen-doped carbon supports. In order to obtain optimized electrochemical performance, different amounts of TiO₂ component are controlled by three types (Pt/TNC-2 wt%, Pt/TNC-4 wt%, and Pt/TNC-6 wt%). Especially, the anodic current density of Pt/TNC-4 wt% is 707.0 mA g^-1_pt, which is about 1.65 times higher than that of commercial Pt/C (429.1 mA g^-1_pt); Pt/TNC-4wt% also exhibits excellent catalytic stability, with a retention rate of 91 %. This novel support provides electrochemical performance improvement including several advantages of improved anodic current density and catalyst stability due to the well-dispersed Pt nanoparticles on the support by the introduction of TiO₂ component and nitrogen doping in carbon. Therefore, Pt/TNC-4 wt% may be electrocatalyst a promising catalyst as an anode for high-performance DMFCs.

• Journal of the Microelectronics and Packaging Society
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• v.4 no.2
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• pp.47-54
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• 1997

Pt/SiO2/Si을 기판으로 사용하고 RF 마그네트론 스퍼터링에 의한 (Ba, Sr)TiO3 (BST) 씨앗층을 약 10nm 정도의 두께로 입힌 다음 그 상부에 화학 기상증착법으로 BST를 증착하여 BST seed layer가 CVD BST 박막의 특성에 미치는 영향을 조사하였다. 또한 급 속열처리가 BST 박막과 커패시터의 특성에 미치는 영향도 조사하였다. Seed layer와 급속 열처리에 의해 박막의 결정성이 향상되었으며 이로인해 유전상수가 증가되었고 주파수에 대 한 유전특성도 개선되었다. Seed layer를 도입함으로써 BST 박막과 Pt 하부전극 사이의 계 면에 존재하고 있는 산소부족\ulcorner이 사라짐을 확인할수 있었으며 이로 인해 Pt/BST/Pt 커\ulcorner 시터의 누설전류가 감소하였다. 또한 급속 열처리에 의해 BST/Pt 계면에서 트랩된 전자의 농도가 감소함으로써 누설전류 특성이 개선됨을 알수 있었다. Seed layer 위에 증착된 CVD BST 박막의 유전상수는 증착온도가 증가함에 따라 증가하였으나 누설전류도 같이 증가하 였다.

• Journal of the Korean Ceramic Society
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• v.32 no.9
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• pp.1056-1064
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• 1995

95Pb(Mg1/3Nb2/3)O3-5PbTiO3 (hereinafter designated as 95PMN-5PT) system was prepared by the columbite-precursor method with 2 mol% excess PbO to compensate the PbO loss during thermal process. The amount of CuO was 1~10 mol%, and the effects of CuO addition on the dielectric properties of this system have been investigated. From the microstructures, XRD analysis and dielectric measurements, the solubility limit of CuO in 95PMN-5PT was found to be around 3 mol%. Lattice parameter and Curie temperature were found to be decreased as the amount of CuO increased up to the solubility limit. This result confirmed that the Cu2+-ions substituted the Pb2+-ions. It was revealed that the addition of CuO on 95PMN-5PT promoted the sinterability and properties. The room temperature dielectric constant, the loss factor and the specific resistivity of the specimens processed with optimum conditions were 23000, 1%, and 8$\times$1011Ω.cm, respectively.