• Title/Summary/Keyword: Profile and cross section

검색결과 172건 처리시간 0.037초

전자빔 리토그라피에서 스트링모델을 이용한 3차원 리지스트 프로파일 시뮬레이션 (3-D resist profile simulation using string model on E-beam lithography)

  • 서태원;함영목;전국진;이종덕
    • 전자공학회논문지A
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    • 제33A권6호
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    • pp.144-150
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    • 1996
  • The purpose of this paper is to develop a simulation program to predict resist prifile in electron-beam lithography, where the main issue is proximity effect. The simualtion program composes of monte-carlo simulation, exposure simulation and development simulation. In nonte-carlo simulation, the absorbed energy in the resist is calculated when one electron is incident into resist, using hybrid model on the basis of the rutherford differential scattering cross section and moller theory. In exposure simulation, the absorbed energy in the resist is calculated when electrons are incident in exposure pattern. In the program, the developed profile depending on time is obtained by string model. The 0.2$\mu$m and the 0.3$\mu$m line and space patterns are experimentally delineated and compared to the simulation results to check the relevance of the program.

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직접 접합에 의한 Al2O3 SOI 구조 제작 (Fabrication of Al2O3 SOI with direct bonding)

  • 공대영;은덕수;배영호;이종현
    • 센서학회지
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    • 제14권3호
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    • pp.206-210
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    • 2005
  • The SOI structure with buried alumina was fabricated by ALD followed by bonding and etchback process. The interface of alumina and silicon was analyzed by CV measurements and cross section was investigated by SEM analysis. The density of interface state of alumina and silicon was 2.5E11/$cm^{2}$-eV after high temperature annealing for wafer bonding. It was confirmed that the surface silicon layer was completely isolated from substrate by cross section SEM and AES depth profile. The device on this alumina SOI structure would have better thermal properties than that on conventional SOI due to higher thermal conductivity of alumina than that of silicon dioxide.

유량제어밸브 개방형태가 선형펌프 방식 수중사출 시스템에 미치는 영향에 관한 수치적 연구 (Numerical Investigation of Effect of Opening Pattern of Flow Control Valve on Underwater Discharge System using Linear Pump)

  • 이선주
    • 한국군사과학기술학회지
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    • 제22권2호
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    • pp.255-265
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    • 2019
  • In the present study, the effect of opening patterns of a flow control valve on underwater discharge systems using a linear pump was investigated numerically. For that, a improved mathematical model was developed. The improvement is to separate a middle tank from a water cylinder because the cross-section area of the inlet of the middle tank is an important parameter. To validate the improved model, calculation results were compared with a previous study. The results showed that $2^{nd}$ order or more polynomial opening patterns had an advantage over ramp opening patterns. Higher an order of polynomial resulted in wider operating limits. An escape velocity and a maximum acceleration of underwater vehicle were affected by time derivative of the cross-section area of the flow control valve. Besides, as a velocity profile of the vehicle got closer to linearity, the escape velocity got faster and the maximum acceleration got smaller. And velocities of the vehicle and piston had similar variation trend.

실측자료 기반 함정 RCS 측정 및 산란점 분석 연구 (A Study on RCS and Scattering Point Analysis Based on Measured Data for Maritime Ship)

  • 정회인;박상홍;최재호;김경태
    • 한국군사과학기술학회지
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    • 제23권2호
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    • pp.97-105
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    • 2020
  • In order to set up radar cross section(RCS) reduction factors for a target, the scattering point position of the target should be identified through inverse synthetic aperture radar(ISAR) image analysis. For this purpose, ISAR image focusing is important. Maritime ship is non-linear maneuvering in the sea, however, which blur the ISAR image. To solve this problem, translational and rotational motion compensation are essential to form focused ISAR image. In this paper, hourglass and ISAR image analysis are performed on the collected data in the sea instead of using the prediction software tool, which takes much time and cost to make computer-aided design(CAD) model of the ship.

Finite Difference Evaluation of Moisture Profile in Boxed-heart Large-cross-section Square Timber of Pinus densiflora during High Temperature Drying

  • Kim, Hyunbin;Han, Yeonjung;Park, Yonggun;Yang, Sang-Yun;Chung, Hyunwoo;Eom, Chang-Deuk;Lee, Hyun-Mi;Yeo, Hwanmyeong
    • Journal of the Korean Wood Science and Technology
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    • 제45권6호
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    • pp.762-771
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    • 2017
  • Predicting the amount and distribution of moisture content within wood allows calculating the various mechanical dynamics of the wood as well as determining the drying time. For boxed-heart wood with a large cross-section, since it is difficult to measure the moisture content of the interior, it is necessary to predict the moisture content distribution. This study predicted the moisture movement in boxed-heart red pine timber, during high temperature drying, by using the three-dimensional finite difference method for the efficient drying process. During drying for 72 h, the predicted and actual moisture content of the tested wood tended to decrease at a similar rate. In contrast, the actual moisture content at 196 and 240 h was lower than predicted because surface checking of the wood occurred from 72 h and excessive water emission was unexpectedly occurred from the checked and splitted surface.

대칭 및 비대칭 유동장에서 다회선 초음파 유량계의 유속분포 적분 방법 평가 (Performance Evaluation of the Velocity Profile Integration for the Multi-Path Ultrasonic Flowmeter in Symmetric & Asymmetric Flow Field)

  • 김주영;김경진;박성하
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
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    • pp.370-377
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    • 2002
  • Generally, the system of calculation for the multi-path ultrasonic flow meters can be divided into two methods by how to get the mean velocity, namely, weighting and direct method. Weighting-method derive the mean velocity through modeling in theoretical velocity profile. Direct-method derive the mean velocity though actual flow distribution. The system of calculation varies with maker's transducer configuration and integration method. Each system has merits and demerits. This paper describes the system of integration that calculates line velocity over cross-section of the circular pipe. Flow rate mr discussed in this paper is a difference between theoretical flow rate and integrated flow rate according to values of Reynolds number in symmetric flow field or theoretical flow rate and integrated flow rate according to rotated model in asymmetric flow field.

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청각 장애자용 발음 훈련 기기의 개발 (Speech training aids for deafs)

  • 김동준;윤태성;박상희
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1991년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 22-24 Oct. 1991
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    • pp.746-751
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    • 1991
  • Deafs train articulation by observing mouth of a tutor. sensing tactually the notions of the vocal organs, or using speech training aids. Present speech training aids for deafs can measure only single speech ter, or display only frequency spectra in histogrm or pseudo-color. In this study, a speech training aids that can display subject's articulation in the form of a cross section of the vocal organs and other speech parameters together in a single system Is aimed to develop and this system makes a subject to know where to correct. For our objective, first, speech production mechanism is assumed to be AR model in order to estimate articulatory notions of the vocal tract from speech signal. Next, a vocal tract profile mode using LPC analysis is made up. And using this model, articulatory notions for Korean vowels are estimated and displayed in the vocal tract profile graphics.

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임의의 단면 형상을 갖는 복합재료 블레이드의 첨단 구조해석 모델 개발 (DEVELOPMENT OF A REFINED STRUCTURAL MODEL FOR COMPOSITE BLADES WITH ARBITRARY SECTION SHAPES)

  • Jung, Sung-Nam;Inderjit Chopra
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 1999년도 추계학술발표대회 논문집
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    • pp.215-218
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    • 1999
  • A general structural model, which is an extension of the Vlassov theory, is developed for the analysis of composite rotor blades with elastic couplings. A comprehensive analysis applicable to both thick-and thin-walled composite beams, which can have either open- or closed profile is formulated. The theory accounts for the effects of elastic couplings, shell wall thickness, and transverse shear deformations. A semi-complementary energy functional is used to account for the shear stress distribution in the shell wall. The bending and torsion related warpings and the shear correction factors are obtained in closed form as part of the analysis. The resulting first order shear deformation theory describes the beam kinematics in terms of the axial, flap and lag bending, flap and lag shear, torsion and torsion-warping deformations. The theory is validated against experimental results for various cross-section beams with elastic couplings.

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"Ring 생산 Control System의 퍼지 적응제어" (An adaptive fuzzy control for closed-die ring-rolling process)

  • 이용현
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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    • pp.1476-1479
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    • 1996
  • 발전설비나 자동차 그리고 항공우주분야에 사용되는 각종 bearing, 원형부품들에 사용되는 ring을 생산하는 방법중, 가장 효과적이고 경제적인 방법은 ring rolling (ring 압연)이다. 이 방법은 직경 50cm에서 2m이상의 원형 ring을 연속적으로 짧은 시간내에 (한 ring당 약 1분) 생산 가능하다. 이제까지의 수학적 모델을 사용한 제어시스템은 ring의 단면적이 사각형인 제품에는 최소한의 오차로 생산 가능하였으나, plant의 생산성과 제품의 다양성을 위하여 ring의 단면적이 복잡한 것을 생산시에는 문제점이 노출되었다. 왜냐하면 기존의 수학적모델이 roll gap 또는 metal forming zone에 근거하여 modelling하였기 때문이다. 본 논문에서는, 이러한 문제점을 고전적인 수학적 모델을 기초로한 adaptive control system의 방법대신에, 축적된 control system설계와 운용 경험을 이용하여 설계한 퍼지제어기 및 그것의 실적용 그리고 그 결과를 소개한다. 실적용 결과는, 제조된 단면적이 상대적으로 복잡한 bearing의 형상이 (filling grad)이 제어기의 제어정도 판단기준이었는데, 99.5%의 형상도를 보임으로서 industry에서 요구하는 제품기준을 만족시켰다. 또한 짧은 제어기 설계 및 on-line optimization 기간 또한 이 제어기의 장점이었다.

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Optimum design of parabolic steel box arches

  • Azad, Abul K.;Mohdaly, Hani M.M.
    • Structural Engineering and Mechanics
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    • 제9권2호
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    • pp.169-180
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    • 2000
  • An optimization procedure has been prescribed for the minimum weight design of symmetrical parabolic arches subjected to arbitrary loading. The cross section is assumed to be a symmetrical box section with variable depth and flange areas. The webs are unstiffened and have constant thickness. The proposed sequential, iterative search technique determines the optimum geometrical configuration of the parabolic arch which includes the optimum depth profile and the optimum lengths and areas of the required flange plates corresponding to the prescribed number of curtailments. The study shows that the optimum value of rise to span ratio (h/L) of a parabolic arch is maximum at 0.41 for uniformly distributed loading over the entire span. For any other loading, the optimum value of h/L is less than 0.41.