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Real-Time Spacer Etch-End Point Detection (SE-EPD) for Self-aligned Double Patterning (SADP) Process

  • Han, Ah-Reum;Lee, Ho-Jae;Lee, Jun-Yong;Hong, Sang-Jeen
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.436-437
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    • 2012
  • Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

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Antecedents of Intent to Purchase a Brand Extension -A University-Licensed Merchandise Case-

  • Lee, Jaeha;Park, Kwangsoo
    • 패션비즈니스
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    • 제22권3호
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    • pp.1-15
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    • 2018
  • The purpose of this study is to address marketing strategies for the brand extension of university-licensed merchandise by investigating influences on intent to purchase a new university-licensed merchandise line, tartan. A survey questionnaire was developed and administered online to the major target market for university-licensed merchandise. Four hundred and fifty students and alumni from a US Midwestern university completed the survey. Respondents were asked to answer questions on university identification, perceived university prestige, perceived value of the university-licensed merchandise, intent to purchase a brand extension in university-licensed merchandise, and demographics. It was hypothesized that university identification (H1) and perceived university prestige (H2) are positively related to the perceived value of the university-licensed merchandise and that perceived value of the university-licensed merchandise is positively related to intent to purchase a brand extension in university-licensed merchandise (H3). The difference between students and alumni was also tested. Consumers with high university identification and high perceived university prestige highly valued the university-licensed merchandise. Consumers who perceived a high value of the current university-licensed merchandise displayed a strong intent to purchase a brand extension in university-licensed merchandise. There was no structural difference between the two groups. The study builds on existing research on the influences of attitudes toward the university and university-licensed merchandise on purchasing university-licensed merchandise, specifically investigating intent to purchase a brand extension in university-licensed merchandise. This study also extends previous brand-extension research into university-licensed merchandise.

국내산 발효유 선택속성의 상대적 중요도 및 최적효용 도출 (Investigation of the Relative Importance and Optimal Utility on Choice Attributes of Fermented Milk)

  • 박문경
    • 한국식생활문화학회지
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    • 제34권6호
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    • pp.719-725
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    • 2019
  • This study examined the relative importance and the effective utility of fermented milk by consumers. The questionnaire was developed by an in-depth interview and literature review and was surveyed on-line. Statistical analysis was carried out descriptive analysis, ANOVA, paired t-test, and conjoint analysis using the SPSS package. First, an analysis of the consumption status of fermented milk found that the consumption frequency was 1-2 times/week (36.2%), 3-4 times/week (26.5%). The product choice attributes of fermented milk were found to be the same with 'taste' (3.93) and 'manufacturing date/expired date' (3.92), rated the highest, followed in order by, 'sanitary quality' (3.82), 'origin of ingredient' (3.81). Comparative analysis of the importance and satisfaction level of the choice attributes of fermented milk showed that the choice attributes with lower satisfaction compared to importance were 'taste', 'nutrients', 'manufacturing data/expired date', 'sanitation quality', 'price', 'manufacturing method' and 'certification of quality' (p<0.001, p<0.01). 'Price' and 'certification of quality' were the choice attributes of fermented milk classified as 'Focus Here' because of its high importance and low satisfaction. The preferred combination of relative importance in choice attributes of the fermented milk was 'domestic resource', 'Eat with spoon', and 'none additives'. Therefore, it is believed that sales will increase if dairy companies can improve the 'price' and 'certification of quality'. In addition, the use of domestic ingredients in the development of new fermented milk products in the future could be an important marketing factor in consumer choice.

Rapid and Unequivocal Identification Method for Event-specific Detection of Transgene Zygosity in Genetically Modified Chili Pepper

  • Kang, Seung-Won;Lee, Chul-Hee;Seo, Sang-Gyu;Han, Bal-Kum;Choi, Hyung-Seok;Kim, Sun-Hyung;Harn, Chee-Hark;Lee, Gung-Pyo
    • 원예과학기술지
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    • 제29권2호
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    • pp.123-129
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    • 2011
  • To identify unintended vertical gene-transfer rates from the developed transgenic plants, rapid and unequivocal techniques are needed to identify event-specific markers based on flanking sequences around the transgene and to distinguish zygosity such as homo- and hetero-zygosity. To facilitate evaluation of zygosity, a polymerase chain reaction technique was used to analyze a transgenic pepper line B20 (homozygote), P915 wild type (null zygote), and their F1 hybrids, which were used as transgene contaminated plants. First, we sequenced the 3'-flanking region of the T-DNA (1,277 bp) in the transgenic pepper event B20. Based on sequence information for the 3'- and 5'-flanking region of T-DNA provided in a previous study, a primer pair was designed to amplify full length T-DNA in B20. We successfully amplified the full length T-DNA containing 986 bp from the flanking regions of B20. In addition, a 1,040 bp PCR product, which was where the T-DNA was inserted, was amplified from P915. Finally, both full length T-DNA and the 1,040 bp fragment were simultaneously amplified in the F1 hybrids; P915 ${\times}$ B20, Pungchon ${\times}$ B20, Gumtap ${\times}$ B20. In the present study, we were able to identify zygosity among homozygous transgenic event B20, its wild type P915, and hemizygous F1 hybrids. Therefore, this novel zygosity identification technique, which is based on PCR, can be effectively used to examine gene flow for transgenic pepper event B20.

고밀도 폴리에틸렌 공정의 Melt Index 모델예측제어에 관한 연구 (Model Predictive Control of the Melt Index in High-Density Polyethylene(HDPE) Process)

  • 이은호;김태영;여영구
    • Korean Chemical Engineering Research
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    • 제46권6호
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    • pp.1043-1051
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    • 2008
  • 폴리올레핀 공정의 melt index(MI or MFI)는 제품의 품질을 결정짓는 가장 중요한 제어변수이다. MI는 실시간으로 측정하는 것이 어렵기 때문에 MI를 예측하여 상관관계를 나타내고자 하는 많은 방법들이 제안되었다. 본 연구에서는 시스템 인식기법을 바탕으로 MI 예측을 위한 새로운 1차의 동적 예측모델을 고안하였다. 이 모델의 예측성능은 등급변경이 수반되는 고밀도 폴리에틸렌 공장의 실제 운전데이터에 근거한 모사로 검증하였으며 다른 예측방법들과의 비교로부터 본 연구에 의한 예측모델의 우수성을 확인하였다. 구성된 MI 동적 예측모델을 토대로 하는 모델예측제어방법의 적용을 통하여 각 단위공정별 MI를 계산하고 운전데이터와 비교하였다. 제어운전의 모사를 통하여 등급변경이 이루어지는 운전 동안의 전이시간과 불량제품 발생량이 현저한 감소를 보임을 확인하였다.

전통 떡살문을 활용한 패션문화상품 디자인 개발 (Design Development for Fashion-Cultural Products using Traditional Tteoksal Patterns)

  • 김지영;오윤정
    • 복식문화연구
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    • 제19권5호
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    • pp.993-1008
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    • 2011
  • Traditional culture could be a wonderful source of inspiration for creative design. Tteoksal, the stamps used for making decorative patterns on traditional rice-cakes, have been used and passed on to generations to show the emotions of our ancestors. Numerous traditional patterns found in Tteoksal can be used to better understand and transmit tradition in modern ways. The purpose of this study was to develop fashion cultural products with a modern sensibility by understanding the origin, types and characteristics of Tteoksal and its patterns. The method of this study was through considering the proceeding studies and the references published by a specialist and museums having some information about further knowledge on Tteoksal. In line with the aforementioned study, neckties, eco-friendly bags and pouches were developed as fashion goods. Among the Tteoksal's patterns selected were lotus, bats, 樂 letters and complex patterns. Using a computer graphic software program such as Adobe Illustrator CS5, archetypes of patterns were traced as vector graphics, and two design motives were developed in every pattern. The patterns were developed into two types: one was a basic pattern faithful to a basic motive pattern, and the other was a varied type that was changed and applied. The fashion products were developed as two styles for basic and varied patterns for neckties, eco-friendly bags and pouch items. Twelve products were made for each pattern, which totals 48 unique products. In conclusion, the study could be a critical step to better understand the traditional culture and its influence to the patterns applied to modern fashion design.

스포츠 클라이밍 팬츠의 기능적 디자인에 대한 소비자 수요 특성과 상품 개발 (Consumer's demands on functional design for sports climbing pants and product developments)

  • 박지혜;천종숙
    • 복식문화연구
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    • 제25권3호
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    • pp.391-404
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    • 2017
  • The purpose of this study was to identify the consumers' demands on functional design of sports climbing pants. Data were collected through a field survey. 82 male and 70 female amateur sports climbers in Seoul participated. The questionnaires measured aspects of functional design in sports climbing pants, specifically motion adaptability, comfort and aesthetic value of the climbing pants. The results of this study show that comfort during climbing postures was the most important value of the climbing pants. The subjects sought motion adaptability at the hip, crotch, thigh and knee. The preferred style and degree of fit of climbing pants were differed according to gender. Men preferred loose or semi tight fit style climbing pants but women preferred the leggings style of the sport pants. The soft touch seam line and body shaping function were also important for women. The type of pants preferred for sports climbing also differed by the climbing experience period. Men began to wear the outdoor mountaineering style pants when they had experienced sports climbing for 6 months and to wear the climbing expert style pants when they had experienced sports climbing for a year. Most women wore leggings style sports pants from the beginner stage. This study also analyzed Korean market trend in 2016~2017 F/W for sports climbing pants design. The men's pants were more likely to be designed to improve mobility compared to the women's pants, even though the aesthetic value of the sports climbing pants was important for women.

3D 스캐닝, 3D 모델링, 3D 프린팅 기반의 3D 시스템에 의한 시니어 평발용 인솔 제작 (Producing the insoles for flat feet of senior men using 3D systems based on 3D scanning, 3D modeling, and 3D printing)

  • 오설영;서동애
    • 복식문화연구
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    • 제25권3호
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    • pp.270-284
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    • 2017
  • This study aimed to create 3D-printed insoles for flat-footed senior men using 3D systems. 3D systems are product-manufacturing systems that use 3-dimensional technologies like 3D scanning, 3D modeling, and 3D printing. This study used a 3D scanner (NexScan2), 3D CAD programs including Rapidform, AutoCAD, SolidWorks, Nauta+ compiling program, and a 3D printer. In order to create insoles for flat-footed senior men, we analyzed horizontal sections of 3D foot scans We selected 20 flat-footed and 20 normal-footed subjects. To make the 3D insole models, we sliced nine lines on the surface of the subjects' 3D foot scans, and plotted 144 points on the lines. We calculated the average of these 3D coordinates, then located this average within the 3D space of the AutoCAD program and created 3D sole models using the loft surface tools of the SolidWorks program. The sole models for flat feet differed from those of normal feet in the depth of the arch at the inner sideline and the big toe line. We placed the normal-footed sole model on a flat-footed sole model, and the combination of the two models resulted in the 3D insole for flat feet. We printed the 3D modeled insole using a 3D printer. The 3D printing material was an acrylic resin similar to rubber. This made the insole model flexible and wearable. This study utilized 3D systems to create 3D insoles for flat-footed seniors and this process can be applied to manufacture other items in the fashion industry as well.

유전자변형 바이러스 저항성 고추의 알레르기 안전성 (Allergic risk assessment of genetically modified cucumber mosaic virus resistant pepper)

  • 손대열
    • 한국식품저장유통학회지
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    • 제22권6호
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    • pp.901-907
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    • 2015
  • CMV 바이러스 저항성 H15 고추 도입유전자의 발현산물인 CMV-CP 단백질의 80개씩의 아미노산 비교에서 35% 보다 큰 상동성을 갖거나 8개 이상의 일련된 아미노산 염기 서열이 일치하는 알레르겐은 존재하지 않는 것이 확인되었으며, 따라서 CMV-CP 단백질 서열은 기지의 알레르겐과 구조적 및 면역학적으로 연관된 유사성이 없음을 확인하였다. 형질전환에 따른 특성 변화를 비교하기 위해 서로 다른 지역에서 재배된 CMV 바이러스 저항성 H15 고추 및 그 모본의 발현 단백질 항원 농도와 그 분포를 비교한 결과 발현된 단백질의 양상과 양은 재배 연도 및 환경적 영향에 따른 차이가 발견되었지만, 동일한 연도에 같은 장소에서 재배된 유전자변형 고추와 그 모본 사이에서의 차이는 발견되지 않아 형질전환으로 인한 특성변화는 없는 것으로 확인 되었다. 환자 혈청을 이용해 immunoblotting법과 ELISA법으로 확인한 항원-항체 반응성 비교에서도 CMV 바이러스 저항성 H15 고추와 그 모본 P2377사이에 차이가 없는 것이 확인되었다. 이러한 결과를 종합할 때, 유전자변형 고추 H15는 그 모본과 비교하여 형질전환으로 인한 알레르기성의 변화는 없는 것으로 판단된다.

격자형 하이브리드 금형에 의한 열간 알루미늄후판 곡면성형공정해석 및 실험 (Experimental and FE Analyses of Hot Curvature-Forming for Aluminum Thick Plate Using Grid-Typed Hybrid Die)

  • 이인규;이정민;손영기;이찬주;김병민
    • 소성∙가공
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    • 제20권4호
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    • pp.316-323
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    • 2011
  • The hot curvature-forming of large aluminum thick plate using a grid-typed hybrid die is a process for the production of a spherical LNG tank. Many variables such as the initial die surface quality, grid size, grid thickness, size of blank plate and cooling line design, control the success of the process. In addition, the plate used in this process is generally larger than $10{\times}10m$ in size. Thus, it is very difficult to predict the surface characteristics of the plate during forming and to measure the different parameters due to the high cost of the experiments. In order to optimize the process design for the grid-type die, the development of an analytical method to predict the surface characteristics of the final product in hot curvature-forming is needed. This paper described the development of the method and procedures for FE simulations of the hot curvature-forming process, including hot forming, air flow, cooling, and thermal deformation analyses. An experiment for a small scale model of the process was conducted to check the validity of the numerical method. The results showed that the curvature of the plate in the analysis agrees well with that of the experiment within 0.037 and 0.016% tolerance margins for its side and corner, respectively.