• 제목/요약/키워드: Processing Equipment

검색결과 1,222건 처리시간 0.029초

웨이퍼 오류 패턴 인식 시뮬레이션 (Wafer Fail Pattern Classification Simulation)

  • 김상진;한영신;이칠기
    • 한국시뮬레이션학회:학술대회논문집
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    • 한국시뮬레이션학회 2003년도 춘계학술대회논문집
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    • pp.161-166
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    • 2003
  • Semiconductor Manufacturing has emerged as one of the most Important world industries. Even with the highly automated and precisely monitored facilities used to process the complex manufacturing steps in a near particle free environment, processing variations in wafer fabrication still exist. The causes of these variations may arise from equipment malfunctions, delicate and difficult processing steps, or human mistakes. In this paper, we could specify the cause stage and the cause equipment and take countermeasures at a speed by the conventional method, without depending on the experience and skills of the engineer

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웨이퍼 오류 패턴 인식 시뮬레이션 (Wafer Fail Pattern Classification Simulation)

  • 김상진;한영신;이칠기
    • 한국시뮬레이션학회논문지
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    • 제12권3호
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    • pp.13-20
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    • 2003
  • Semiconductor Manufacturing has emerged as one of the most important world industries. Even with the highly automated and precisely monitored facilities used to process the complex manufacturing steps in a near particle free environment, processing variations in wafer fabrication still exist. The causes of these variations may arise from equipment malfunctions, delicate and difficult processing steps, or human mistakes. In this paper, we could specify the cause stage and the cause equipment and take countermeasures at a speed by the conventional method, without depending on the experience and skills of the engineer

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선박 유수분리기용 유분검출기의 개발 (Development of Oil Content Meter for Oily Water Separator in Ship)

  • 황정웅;정병건;김창화
    • Journal of Advanced Marine Engineering and Technology
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    • 제25권2호
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    • pp.338-344
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    • 2001
  • According to the MARPOL 73/78 of Convention, all ships should have oil filtering equipment and 15 ppm bilge which satisfy Requirements of MARPOL 73/78. This study is concerned with designing and manufacturing a prototype Oil content Meter(OCM) used in machinery area of ship. The prototype OCM is composed of two parts which are oil content sensing module and data processing unit. The oil content sensing module consists of infra-red light source, photo-diode light receivers, and a glass tube for bilge water sample. The data processing unit has a micro-processor as hard core and peripheral devices. The experimental results of prototype OCM and analysis of collected data reveal linear property between transmitted light and scattered light as long as the bilge water has low level content of oil. And this linear property leads to a oil content detecting method which is programmed and loaded into the data processing unit. The performance of the prototype OCM is compared with that of the commercial OCM in the market.

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ON THE DEVELOPMENT OF A DISTILLATION PROCESS FOR THE ELECTROMETALLURGICAL TREATMENT OF IRRADIATED SPENT NUCLEAR FUEL

  • Westphal, Brian R.;Marsden, Kenneth C.;Price, John C.;Laug, David V.
    • Nuclear Engineering and Technology
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    • 제40권3호
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    • pp.163-174
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    • 2008
  • As part of the spent fuel treatment program at the Idaho National Laboratory, a vacuum distillation process is being employed for the recovery of actinide products following an electrorefining process. Separation of the actinide products from a molten salt electrolyte and cadmium is achieved by a batch operation called cathode processing. A cathode processor has been designed and developed to efficiently remove the process chemicals and consolidate the actinide products for further processing. This paper describes the fundamentals of cathode processing, the evolution of the equipment design, the operation and efficiency of the equipment, and recent developments at the cathode processor. In addition, challenges encountered during the processing of irradiated spent nuclear fuel in the cathode processor will be discussed.

A fast high-resolution vibration measurement method based on vision technology for structures

  • Son, Ki-Sung;Jeon, Hyeong-Seop;Chae, Gyung-Sun;Park, Jae-Seok;Kim, Se-Oh
    • Nuclear Engineering and Technology
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    • 제53권1호
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    • pp.294-303
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    • 2021
  • Various types of sensors are used at industrial sites to measure vibration. With the increase in the diversity of vibration measurement methods, vibration monitoring methods using camera equipment have recently been introduced. However, owing to the physical limitations of the hardware, the measurement resolution is lower than that of conventional sensors, and real-time processing is difficult because of extensive image processing. As a result, most such methods in practice only monitor status trends. To address these disadvantages, a high-resolution vibration measurement method using image analysis of the edge region of the structure has been reported. While this method exhibits higher resolution than the existing vibration measurement technique using a camera, it requires significant amount of computation. In this study, a method is proposed for rapidly processing considerable amount of image data acquired from vision equipment, and measuring the vibration of structures with high resolution. The method is then verified through experiments. It was shown that the proposed method can fast measure vibrations of structures remotely.

다중 시계열 패턴인식을 이용한 반도체 생산장치의 지능형 감시시스템 (An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition)

  • 이중재;권오범;김계영
    • 정보처리학회논문지D
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    • 제11D권3호
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    • pp.709-716
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    • 2004
  • 본 논문에서는 다중 시계열 패턴인식 사용하여 생산장치의 상태자료부터 공정결과를 예측하여 정상 또는 비정상을 판정하는 지능형 감시시스템에 관하여 기술한다. 제안하는 감시스템은 초기화, 학습 그리고 인식의 세 단계로 구성된다. 초기화 단계에서는 감시대상의 생산장치가 가지는 인사들 각각의 가중치와 각 인자들이 가지는 시계열 자료 중에서 학습과 인식에 유효단계를 설정한다. 학습단계에서는 LBG알고리즘을 사용하여 이 생산장치에 의하여 생성되고 수집된 패턴들을 군집화 한다. 각 패턴은 시계열 형태의 자료와 처리 완료 후 계측기에 의하여 측정된 ACI로 구성된다. 인식단계에서는 DTW를 사용하여 실시간으로 입력된 패턴과 군집화된 패턴들 사이의 대응을 수행하여 가장 잘 정합되는 패턴을 찾는다. 다음은 이 패턴이 가지는 ACI, 차 그리고 가중치들의 조합으로 예측된 ACI 값을 산출한다. 최종적으로 예측된 ACI가 정상으로 수용할 수 있는 값 범위에 없는지 여부를 결정한다. 제안하는 시스템의 성능평가를 위하여 식각장치로부터 획득된 자료를 대상으로 실험하였다. 실험결과에서는 학습횟수가 증가함에 따라 예측 ACI값과 실측ACI값 사이의 오차가 현저히 감소함을 볼 수 있다

듀얼블레이드 로봇 클러스터툴의 생산성 분석 (Throughput Analysis for Dual Blade Robot Cluster Tool)

  • 유선중
    • 제어로봇시스템학회논문지
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    • 제15권12호
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    • pp.1240-1245
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    • 2009
  • The throughput characteristics of the cluster tool with dual blade robot are analyzed. Using equipment's cycle time chart of the equipment, simple analytic form of the throughput is derived. Then, several important throughput characteristics are analyzed by the throughput formula. First, utilization of the process chamber and the robot are maximized by assigning the equipment to the process whose processing time is near the critical process time. Second, rule for selecting optimal number of process chambers is suggested. It is desirable to select a single process chamber plus a single robot structure for relatively short time process and multi process chambers plus a single robot, namely cluster tool for relatively long time process. Third, throughput variation between equipments due to the wafer transfer time variation is analyzed, especially for the process whose processing time is less than critical process time. And the throughput and the wafer transfer time of the equipments in our fabrication line are measured and compared to the analysis.

FPGA implementation using a CLAHE contrast enhancement technique in the termal equipment for real time processing

  • Jung, Jin-Hyun
    • 한국컴퓨터정보학회논문지
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    • 제21권11호
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    • pp.39-47
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    • 2016
  • In this paper, we propose an approach for real time computation of rayleigh CLAHE using a FPGA. The contrast enhancement technique should be applied in thermal equipment having a low contrast image. And thermal equipment must be processed in real time. The CLAHE is an improved algorithm based Histogram Equalization, but the HW design is complex. A value greater than a given threshold in CLAHE should be equally distributed on the other histogram bin, this process requires iterations for the distribution. But implementation of this processing in the FPGA is constrained, so this section was implemented on the assumption of the histogram distribution or modified the operation process or implemented separately in the CPU. In this paper, we designed a distinct redistribution operation in two stages. So FPGA was designed for easy, this was designed to be distributed evenly without the assumptions and constraints. In addition, we have designed a CLAHE with the rayleigh distribution to the FPGA. The simulation shows that the proposed method provides a better image quality in the thermal image.

3차원 객체의 사실적인 표현을 위한 측정데이터 기반 렌더링 기법 (A method for the realistic Rendering of 3D Objects)

  • 서명국;권혁진;윤복중
    • 한국정보처리학회:학술대회논문집
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    • 한국정보처리학회 2015년도 추계학술발표대회
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    • pp.1499-1501
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    • 2015
  • 본 연구는 컴퓨터그래픽스 분야에서 3차원 객체를 사실적으로 표현하기 위해 사용되고 있는 주요 데이터 측정, 모델링, 렌더링 기술을 소개한다. 객체의 최종 외관은 객체의 형상과 표면 재질, 그리고 주변 광 조건에 크게 영향을 받는다. 따라서 임의 가상공간(디스플레이)에서 3차원 객체를 사질적으로 표현하기 위해서는 주요 영향 인자에 대한 정보가 확보되어야 한다. 최근 컴퓨터그래픽스 분야에서는 객체 형상 및 재질 정보 획득을 위한 다양한 기술 및 장비와 객체 가시화를 위한 다양한 기법을 제시하고 있다. 효과적인 객체 가시화하기 위해서는 각 객체의 구성 재질에 대한 광학 특성에 대한 선행 분석을 토대로, 적절한 측정 및 모델링, 렌더링 기법 적용이 필요하다. 본 연구는 측정 데이터 기반의 재질 렌더링 기법에 중심으로 다양한 재질에 적합한 요소 기술과 그 결과를 설명하고, 재질 렌더링 기법을 활용한 건설분야의 향후 연구 계획을 제시한다.

Advanced Engineering in Processing of Leafstalk Biomass of Sown Grasses

  • Proydak, N.I.
    • 한국농업기계학회:학술대회논문집
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    • 한국농업기계학회 1996년도 International Conference on Agricultural Machinery Engineering Proceedings
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    • pp.711-714
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    • 1996
  • The energy saving base technological processes were substantiated and high efficient equipment for the wet fractionation of the leafstalk biomass of the annual and perennial sown grasses into the multipurpose products was designed.

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