• Title/Summary/Keyword: Process Chamber

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Comparative Study on Microwave Probes for Plasma Density Measurement by FDTD Simulations

  • Kim, D.W.;You, S.J.;Na, B.K.;Kim, J.H.;Chang, H.Y.;Oh, W.Y.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.218.1-218.1
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    • 2014
  • In order to measure the absolute plasma density, various probes are proposed and investigated and microwave probes are widely used for its advantages (Insensitivity to thin non-conducting material deposited by processing plasmas, High reliability, Simple process for determination of plasma density, no complicate assumptions and so forth). There are representative microwave probes such as the cutoff probe, the hairpin probe, the impedance probe, the absorption probe and the plasma transmission probe. These probes utilize the microwave interactions with the plasma-sheath and inserted structure (probe), but frequency range used by each probe and specific mechanisms for determining the plasma density for each probe are different. In the recent studies, behaviors of each microwave probe with respect to the plasma parameters of the plasma density, the pressure (the collision frequency), and the sheath width is abundant and reasonably investigated, whereas relative diagnostic characteristics of the probes by a comparative study is insufficient in spite of importance for comprehensive applications of the probes. However, experimental comparative study suffers from spatially different plasma characteristics in the same discharge chamber, a low-reproducibility of ignited plasma for an uncertainty in external discharge parameters (the power, the pressure, the flow rate and so forth), impossibility of independently control of the density, the pressure, and the sheath width as well as expensive and complicate experimental setup. In this paper, various microwave probes are simulated by finite-different time-domain simulation and the error between the input plasma density in FDTD simulations and the measured that by the unique microwave spectrums of each probe is obtained under possible conditions of plasma density, pressure, and sheath width for general low-temperature plasmas. This result shows that the each probe has an optimum applicable plasma condition and reliability of plasma density measurement using the microwave probes can be improved by the complementary use of each probe.

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Variation of Salt Concentration for the Intrust Sea Water in the Kyongin Navigation Channel (경인운하 수로에서 해수유입에 의한 염분농도의 변화)

  • Lee, Gil-Seong;O, Seong-Taek
    • Journal of Korea Water Resources Association
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    • v.31 no.2
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    • pp.209-219
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    • 1998
  • Sea water volume intruded from the lock gated was compted by a one-dimensional numerical model and the extent of diffusion of sea water was evaluated for that. The volume of intruded sea water, in the exchange processes of salt and fresh waters, was computed by the conceptual model considering the tidal level, volume of chamber, volume of canal, and operation period only, It was divided into some cases according to whether ships enter or leave the canal and whether the level of tide is lower or higher than that of water level in canal. The model, developed in this work, assumed that intruded sea water is well mixed in the canal; and complete is the exchange of waters between sea and canal. The simulation case was divided into two categories according to whether the water was added from the Han River or not.

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Dry Etching of GaAs and AlgaAs Semiconductor Materials in High Density BCl$_3$, BCl$_3$/Ar Inductively Coupled Plasmas (BCl$_3$, BCl$_3$/Ar 고밀도 유도결합 플라즈마를 이용한 GaAs 와 AlGaAs 반도체 소자의 건식식각)

  • Lim, Wan-Tae;Baek, In-Kyoo;Lee, Je-Won;Cho, Guan-Sik;Jeon, Min-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.31-36
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    • 2003
  • We investigated dry etching of GaAs and AlGaAs in a high density planar inductively coupled plasma system with $BCl_3$ and $BCl_3/Ar$ gas chemistry. A detailed process study as a function of ICP source power, RIE chuck power and $BCl_3/Ar$ mixing ratio was performed. At this time, chamber pressure was fixed at 7.5 mTorr. The ICP source power and RIE chuck power were varied from 0 to 500 W and from 0 to 150 W, respectively. GaAs etch rate increased with the increase of ICP source power and RE chuck power. It was also found that etch rate of GaAs in $BCl_3$ gas with 25% Ar addition was superior to that of GaAs in a pure $BCl_3$ (20 sccm $BCl_3$) plasma. The result was same with AlGaAs. We expect that high ion-assisted effect in $BCl_3$/Ar plasma increased etch rates of both materials. The GaAs and AIGaAs features etched at 20 sccm $BCl_3$ and $15BCl_3/5Ar$ with 300 W ICP source power, 100 W RIE chuck power and 7.5 mTorr showed very smooth surfaces(RMS roughness < 2 nm) and excellent sidewall. XPS study on the surfaces of processed GaAs also proved extremely clean surfaces of the materials after dry etching.

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Effect of Cycles of Freezing and Thawing on the Behavior of Retaining Walls using Reduced-Scale Model Tests (축소 모형실험을 이용한 동결-융해 반복작용이 옹벽 구조물의 거동에 미치는 영향)

  • Yoo, Chungsik;Jang, Dong-Wook
    • Journal of the Korean Geosynthetics Society
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    • v.13 no.3
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    • pp.49-58
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    • 2014
  • This paper presents the results of a reduced-scale physical model investigation into the behavior of retaining walls subject to cycles of freezing and thawing due to seasonal temperature change. Reduced-scale model walls equipped with a temperature control chamber that can simulate freezing and thawing conditions were first constructed and a series of tests were conducted with due consideration of different initial water contents of backfill soil and soil types. The results indicate that cycles of freezing and thawing process increase wall deformation as well as earth pressure acting on the wall. Also revealed was that the effect of the freezing and thawing cycles becomes more pronounced for cases with a larger initial water content and for soils with a larger fine content. Practical implications of the findings from this study are discussed in great detail.

A Biosensor for the Rapid Detection of the Fungicide Iprovalicarb Residuess (살균제 Iprovalicarb 잔류물의 신속한 검출을 위한 바이오센서)

  • Cho, Han-Keun;Kim, Woon-Ho;Kyung, Kee-Sung;Lee, Eun-Young
    • Journal of Biosystems Engineering
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    • v.32 no.6
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    • pp.440-447
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    • 2007
  • In this study, a biosensor was developed using an enzyme-linked immunosorbent assay (ELISA) to rapidly measure the fungicide iprovalicarb residues in agricultural products. The biosensor was designed to include micro-pumps and solenoid valves for fluid transport, a spectrophotometer cuvet as a reaction chamber, a photodiode with a light-emitting diode for optical density measurement, and a control microcomputer to implement assay. The rate of change in optical density of the cuvet was read as final signal output. Micro-pumps were evaluated to investigate their delivery capability, the highest values of the error and the coefficient of variation were 4.3% and 4.6% respectively. As the incubation period was reduced from 15 minutes to 11 minutes to shorten the total processing time, the sensor sensitivity was decreased as the antibody dilution ratio was reduced to a half. The maximum usable period of the coated cuvet was found to be two days with 1% error limit. To predict the concentration of the iprovalicarb residue in agricultural products, a linear calibration model was obtained with r-square values of 0.992 for potato and 0.985 for onion. In validation test for the samples of potatoes and onions against the high performance liquid chromatography, very high correlation values were obtained as 0.996 and 0.993 respectively. Using the cuvet immobilized with antigen, it took 21-minutes for the biosensor to complete the measuring process of the iprovalicarb residues.

Geometric Effects on Damping Characteristics of Acoustic Cavity for the Control of Combustion Instabilities (연소불안정 제어를 위한 음향공의 감쇠에 대한 형상 효과)

  • 차정필;고영성;고영성
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.34 no.6
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    • pp.59-66
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    • 2006
  • Acoustic cavity as a stabilization device to control high-frequency combustion instabilities in liquid rocket engine is adopted and its damping capacity is verified in atmospheric temperature. First, harmful resonant frequency in a modeling chamber can be damped effectively by the installation of properly-tuned acoustic cavity. Besides, geometric effects of acoustic cavity on damping characteristics are analyzed and compared quantitatively. Satisfactory agreements have been achieved with linear acoustic analysis and experimental approach. Results show that the acoustic cavity of the largest orifice area or the shortest orifice length was the most effective in acoustic damping of the harmful resonant frequency. Finally, it is proved that an optimal design process is indispensable for the effective control of combustion instabilities.

A Study on the Parameters for Icing Airworthiness Flight Tests of Surion Military Helicopter (수리온 군용헬기의 결빙 감항인증 비행시험을 위한 파라미터 고찰)

  • Hur, Jang-Wook;Kim, Chan-Dong;Jang, Jae-Sang
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.6
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    • pp.526-532
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    • 2015
  • In order to relieve limitation of flight operation under icing condition and verify its operation in adverse weather condition for Surion, military helicopter developed in Korea, airworthiness certification in icing condition is required. The process of Surion icing certification should be considered by implementation of four methods by step such as CFD analysis, simulated flight tests, artificial icing flight tests, and natural icing flight tests. For Surion icing flight tests, these are required 20~30 sorties and 20~23 hours in artificial icing condition; 20~30 sorties and 20~22 hours in natural icing condition. In addition, to proceed with efficient flight tests, it is necessary to implement artificial icing flight tests in LWC $0.5{\sim}1.0g/m^3;$ natural icing flight tests in less than LWC $0.5g/m^3$.

A Study on Propulsion Performance of Underwater Ram-Jet with Optimized Nozzle Configuration (최적 노즐형상을 갖는 수중램제트의 추진성능에 관한 연구)

  • Kang, H.K.;Kim, Y.T.;Lee, Y.H.
    • Journal of the Society of Naval Architects of Korea
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    • v.34 no.4
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    • pp.42-52
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    • 1997
  • The basic principle of underwater ram-jet as a unique marine propulsion concept showing vary high cruise speed range(e. g. 80-100 knots) is the thrust production by the transfer of the potential energy of compressed gas to the operating liquid through kinetic mixing process. This paper is aimed to investigate the propulsive efficiency of the nozzle flow in underwater ram-jet at the speed of 80 knots for the buried type vessel. The basic assumption of the theoretical analysis is that mixture of water and air can be treated as incompressible gas. For an optimized nozzle configuration obtained from the performance analysis, preliminary data for performance evaluation are obtained and effects of nozzle inner wall friction, ambient temperature, ambient pressure, water density, gas velocity, bubble radius, flow velocity, diffuser area ratio, mass flow ratio and water velocity gradient are investigated.

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A Study on the effect of the multi-pass SMAW welding on the characteristic of the underwater welding areas (SMAW 수중 다층용접시 용접부 특성에 관한 연구)

  • 최기용;이상율;이보영;이병훈;이상용;박성두
    • Journal of Welding and Joining
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    • v.16 no.4
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    • pp.55-62
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    • 1998
  • While excellent joint quality has been obtained using dry chamber underwater welding methods, the size limitations imposed by this process restrict its use for underwater construction work. The wet underwater shielded metal-arc welding eliminates this restriction but suffers from poor weld properties by the 1-pass bead-on-plate welding due to the excessive diffusible hydrogen. On the other hand, in the wet underwater welding, it is well known that the quantity of diffusible hydrogen in multi-pass welded parts reduce to less than that in 1-pass welded parts. Therefore, in this paper, welding experiments are made the 3-pass bead-on-plate welds by using TMCP and normalized steel plates and E4301 and cellulose coated electrode. After that, The amounts of the hydrogen absorbed into the 3-pass welded area were measured according to the JIS Z 3118 specification. The microstructural changes as well as the microhardness distribution after the underwater 3-pass welding were also investigated using Vickers microhardness tester and S.E.M and O.M. The results indicated that the quantity of diffusible hydrogen in 3-pass welded areas was reduced little less than a half of one of that in 1-pass welded areas at the specific welding condition. As a result, the cold cracking of 3-pass welded areas decreased by reduced effect of diffusible hydrogen. In the underwater 3-pass welding, the micrography of cold cracking fracture surface showed mainly the cleavage of hydrogen embrittlement.

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Development and Application of Micromodel for Visualization of Supercritical CO2 Migration in Pore-scale (공극 규모에서의 초임계상 이산화탄소 거동 가시화를 위한 마이크로모델의 개발과 적용)

  • Park, Bogyeong;Lee, Minhee;Wang, Sookyun
    • Journal of Soil and Groundwater Environment
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    • v.20 no.4
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    • pp.73-82
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    • 2015
  • Despite significant effects on macroscopic migration and distribution of CO2 injected during geological sequestration, only limited information is available on wettability in microscopic scCO2-brine-mineral systems due to difficulties in pore-scale observation. In this study, a micromodel had been developed to improve our understanding of how scCO2 flooding and residual characteristics of porewater are affected by the wettability in scCO2-water-glass bead systems. The micromodel (a transparent pore structure made of glass beads and glass plates) in a pressurized chamber provided the opportunity to visualize scCO2 spreading and porewater displacement. CO2 flooding followed by fingering migration and dewatering followed by formation of residual water were observed through an imaging system. Measurement of contact angles of residual porewater in micromodels were conducted to estimate wettability in a scCO2-water-glass bead system. The measurement revealed that the brine-3M NaCl solution-is a wetting fluid and the surface of glass beads is water-wet. It is also found that the contact angle at equilibrium decreases as the pressure decreases, whereas it increases as the salinity increases. Such changes in wettability may significantly affect the patterns of scCO2 migration and porewater residence during the process of CO2 injection into a saline aquifer at high pressures.