• Title/Summary/Keyword: Process Chamber

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The Experimental study on the Flame Propagation Process of a Constant Volume Combustion Chamber (정적 연소실내에서 화염 전파 과정에 대한 실험적 연구)

  • Kim, Chun-Jung;Kang, Kyung-Koo
    • Journal of the Korean Society of Industry Convergence
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    • v.2 no.1
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    • pp.121-130
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    • 1999
  • It is necessary to measure pressure, temperature, chemical equilibrium and the shape of flame in order to understand the combustion process in a combustion chamber. In particular, the flame formulation and combustion process of divided combustion chamber are different from those of a single chamber, And the variable diameter of a jet hole can effect not only physical properties like ejection velocity, temperature and time of combustion but also a chemical property like the reaction mechanism. Accordingly temperature is one of the most important factors which influence the combustion mechanism. This paper observed shape of flame by using the schlieren photographs and measured the pressure in a combustion chamber and the reaching time of the flame by ion probe By doing these, we investigation the formulation of the flame and the process of propagation. These measurement methods can be advanced in understanding the combustion process and process and propagation of flame.

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Measurement Technology of Chamber Impedance for RF Matching (RF 정합 특성 개선을 위한 챔버의 임피던스 측정법)

  • 설용태;이의용;박성진
    • Journal of the Semiconductor & Display Technology
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    • v.2 no.4
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    • pp.13-17
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    • 2003
  • An adaptor is designed for chamber impedance measurement of plasma process. Copper rod, fixed board and compensation circuit are the major components of the adaptor. An adaptor can be to measure chamber impedance on time unless stopping a process and Data to measure can do the database. We can use it to a criteria data for a failure diagnosis. So developed adaptor could be used for diagnosis the plasma process chamber in semiconductor industry.

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Status Change Monitoring of Semiconductor Plasma Process Equipment (주파수 도메인 반사파 측정법을 이용한 플라즈마 공정장비 상태변화 연구)

  • Yunsang Lee;Sang Jeen Hong
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.1
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    • pp.52-55
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    • 2024
  • In this paper, a state change study was conducted through Frequency Domain Reflectometry (FDR) technology for the process chamber of plasma equipment for semiconductor manufacturing. In the experiment, by direct connecting the network analyzer to the RF matcher input of the 300 mm plasma enhanced chemical vapor deposition (PECVD) chamber, S11 was measured in a situation where plasma was not applied, and the frequency domain reacting to the chamber state change was searched. Response factors to changes in the status, such as temperature, spacing of the heating chuck, internal pressure difference, and process gas supply state were confirmed. Through this, the frequency domain in which a change in the reflection value was detected through repeated experiments. The reliability of the measured micro-displacement was verified through reproducibility experiments.

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Development of Large Calibration Chamber System (Large Calibration Chamber의 개발)

  • 정충열;김태준;김대규;이우진
    • Proceedings of the Korean Geotechical Society Conference
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    • 2002.03a
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    • pp.673-678
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    • 2002
  • Laboratory calibration chamber tests for cone penetrometers, pressuremeters and dilatometers in cohesionless soil specimens have been conducted by numerous researchers. However, there have been only few applications to compacted or preconsolidated cohesive soils. Therefore, for the first time, Calibration Chamber System was developed in Korea University. This can be attributed to the extremely time consuming and laborious process involved in the preparation of large cohesive soil specimens in addition to other complexities involving instrumentation for pore pressure monitoring and the need for maintaing saturation by back pressure. Chamber System with similar principle as LSU Chamber System was made of more strengthen and complementary form by increasing system diameter(1.2m), carrying out 1st and 2nd consolidation process in one system for smooth and safe work, accurate Data Aquisition.

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The Flame Characteristics by Combustion Chamber Shape in 2 Stroke D.I. Diesel Engine -The Influence of Scavenging Pressure and Scavenging Temperature- (직접분사식 2행정 디젤기관의 연소실 형상에 따른 화염 특성 -소기압력 및 소기온도의 영향을 중심으로-)

  • 최익수;방중철
    • Transactions of the Korean Society of Automotive Engineers
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    • v.11 no.1
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    • pp.55-63
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    • 2003
  • In a diesel engine, air-fuel mixture formation and ignition delay period have great influence on the performance of engine. Their main factors are combustion chamber shape, fuel injection system. air volume, air flow and so on. So, the combustion process in the cylinder is complex because of many factors which have direct and indirect effects on it. In this study, we take into consideration of scavenging pressure and scavenging temperature that are hewn as the main factor to the combustion process of two-stroke D.1. diesel engine. It is taken a picture of the combustion flame process for combustion chamber of re-entrant type and cylindrical type. So, it is applied to the basis data of combustion chamber design from an image analysis.

Prevention of P-i Interface Contamination Using In-situ Plasma Process in Single-chamber VHF-PECVD Process for a-Si:H Solar Cells

  • Han, Seung-Hee;Jeon, Jun-Hong;Choi, Jin-Young;Park, Won-Woong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.204-205
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    • 2011
  • In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is a most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. For best performance of thin film silicon solar cell, the dopant profiles at p/i and i/n interfaces need to be as sharp as possible. The sharpness of dopant profiles can easily achieved when using multi-chamber PECVD equipment, in which each layer is deposited in separate chamber. However, in a single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of a single-chamber PECVD system in spite of the advantage of lower initial investment cost for the equipment. In order to resolve the cross-contamination problem in single-chamber PECVD systems, flushing method of the chamber with NH3 gas or water vapor after doped layer deposition process has been used. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. A single-chamber VHF-PECVD system was used for superstrate type p-i-n a-Si:H solar cell manufacturing on Asahi-type U FTO glass. A 80 MHz and 20 watts of pulsed RF power was applied to the parallel plate RF cathode at the frequency of 10 kHz and 80% duty ratio. A mixture gas of Ar, H2 and SiH4 was used for i-layer deposition and the deposition pressure was 0.4 Torr. For p and n layer deposition, B2H6 and PH3 was used as doping gas, respectively. The deposition temperature was $250^{\circ}C$ and the total p-i-n layer thickness was about $3500{\AA}$. In order to remove the deposited B inside of the vacuum chamber during p-layer deposition, a high pulsed RF power of about 80 W was applied right after p-layer deposition without SiH4 gas, which is followed by i-layer and n-layer deposition. Finally, Ag was deposited as top electrode. The best initial solar cell efficiency of 9.5 % for test cell area of 0.2 $cm^2$ could be achieved by applying the in-situ plasma cleaning method. The dependence on RF power and treatment time was investigated along with the SIMS analysis of the p-i interface for boron profiles.

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Developing Trends of Spinning Process for Manufacturing Thrust Chamber of Launch Vehicle (발사체 연소기 제작에서 스피닝 공정 개발 동향)

  • Lee, Keumoh;Ryu, Chulsung;Choi, Hwanseok;Heo, Seongchan;Kwak, Junyoung;Choi, Younho
    • Journal of the Korean Society of Propulsion Engineers
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    • v.19 no.6
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    • pp.64-71
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    • 2015
  • Spinning process is generally used for manufacturing axisymmetrical, thin-walled thickness and hollow circular cross-section parts. Traditional spinning technology is classified to conventional spinning and power spinning(shear spinning and flow forming). Literature surveys of spinning application for regenerative cooling chamber and divergent nozzle of liquid propellent rocket thrust chamber have been conducted. Most spinning technology has been used mandel for manufacturing chamber and nozzle. Recently, hot spinning has been used much compared to traditional cold spinning.

Study of Combustion and Emission Characteristics for DI Diesel Engine with a Swirl-Chamber

  • Liu, Yu;Chung, S.S.
    • Journal of ILASS-Korea
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    • v.15 no.3
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    • pp.131-139
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    • 2010
  • Gas motion within the engine cylinder is one of the major factors controlling the fuel-air mixing and combustion processes in diesel engines. In this paper, a special swirl-chamber is designed and applied to a DI (direct injection) diesel engine to generate a strong swirl motion thus enhancing gas motion. Compression, combustion and expansion strokes of this DI diesel engine with the swirl-chamber have been simulated by CFD software. The simulation model was first validated through comparisons with experimental data and then applied to do the simulation of the spray and combustion process. The velocity and temperature field inside the cylinder showed the influences of the strong swirl motion to spray and combustion process in detail. Cylinder pressure, average temperature, heat release rate, total amount of heat release, indicated thermal efficiency, indicated fuel consumption rate and emissions of this DI diesel engine with swirl-chamber have been compared with that of the DI diesel engine with $\omega$-chamber. The conclusions show that the engine with swirlchamber has the characteristics of fast mixture formulation and quick diffusive combustion; its soot emission is 3 times less than that of a $\omega$-chamber engine; its NO emission is 3 times more than that of $\omega$-chamber engine. The results show that the DI diesel engine with the swirl-chamber has the potential to reduce emissions.

Design of Porthole Extrusion Die for Improving the Welding Pressure in Welding Chamber by using the FE Analysis and Taguchi Method (유한요소해석 및 다구찌법을 이용한 접합실 내 접합압력 향상을 위한 포트홀 압출 금형 설계)

  • Lee, S.Y.;Lee, I.K.;Jeong, M.S.;Ko, D.C.;Lee, S.K.
    • Transactions of Materials Processing
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    • v.28 no.6
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    • pp.347-353
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    • 2019
  • The porthole extrusion process is a classic metal forming process to produce complex cross-section shaped aluminum profile. It is very difficult to design porthole die and extrusion process because of the complex shape of extrusion die and internal metal flow. The main variables in this process are ram speed, initial billet and tool temperature, and die shape. In general, the metal flow of porthole extrusion process can be divided into two steps. During the first step, the billet is divided into several parts in the porthole die bridge. During the second step, the divided billets are welded in the welding chamber. In the welding chamber, the level of welding pressure is very important for the quality of the final product. The purpose of this study is to increase the welding pressure in the welding chamber by using a two stage welding chamber. The porthole extrusion die was designed by using the Taguchi method with orthogonal array. The effectiveness of the optimized porthole die was verified by using the finite element analysis.

Study on the Sheet Metal Forming of the Brake Chamber Head using the Finite Element Analysis (유한요소해석을 이용한 브레이크 챔버 헤드 판재 성형에 관한 연구)

  • Lee, S.I.;Choi, D.H.;Lee, J.W.;Lee, J.H.
    • Transactions of Materials Processing
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    • v.26 no.2
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    • pp.79-86
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    • 2017
  • In this study, the sheet metal forming process of the brake chamber head, which had a complex shape compared to the conventional head part, was investigated using finite element (FE) analysis. In order to prevent the forming failures such as necking and fracture, the multi-stage forming process was introduced. The forming process consisted of three steps: (1) first drawing, (2) second drawing, (3) final forming. Experimental and FE simulated results of the brake chamber head were compared, and the results showed that the required characteristics of the straightness and the wall thickness at each location were satisfied.