• 제목/요약/키워드: Probing Accuracy

검색결과 31건 처리시간 0.023초

컴플라이언스를 갖는 웨이퍼 탐침 시스템용 미동 매니퓰레이터 (A Fine Manipulator with Compliance for Wafer Probing System)

  • 최기봉;김수현;곽윤근
    • 한국정밀공학회지
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    • 제14권9호
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    • pp.68-79
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    • 1997
  • A six DOF fine manipulator based on magnetic levitation is developed. Since most of magnetic levitation system are inherently unstable, a proposed magnetically levitated fine manipulator is implemented by use of an antagonistic structure to increase stability. From mathematical modeling and experiment, the equations of motion are derived. In addition, a six DOF sensing system is implemented by use of three 2-axis PSD sensors. A model reference-$H_{\infty}$ controller is applied to the system for the position control, In application of the fine manipulator, a wafer probing system is proposed to identify nonfunctional circuts. The probing system requires compliance to avoid destruction of DUT(device under test). A feedfor- ward-PD controllers are presented by the terms of the position accuracy, the settling time and the force accuracy.y.

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공작기계용 접촉식 측정 프로브의 프로빙 오차 보상에 관한 연구 (Touch-Trigger Probe Error Compensation in a Machining Center)

  • 이찬호;이응석
    • 대한기계학회논문집A
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    • 제35권6호
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    • pp.661-667
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    • 2011
  • 접촉식 측정 프로브는 3 차원 좌표 측정기 및 CNC 공작기계 등에서 제품 검사에 많이 활용되고 있고, 최근 품질 향상을 위한 가공 및 검사장비의 고정도화에 따라 측정의 정확도도 또한 매우 중요시 되고 있다. 이에 따라 스트레인 게이지 등을 이용한 고정도의 측정 프로브가 사용되고 있기는 하지만, 본 연구에서는 경제적인 측면을 고려하여 산업현장에서 공작기계에 많이 활용되는 일반 접촉식 측정 프로브의 메커니즘을 이해하고, 측정 시 발생할 수 있는 프로빙 오차에 대한 분석 및 보정을 통하여 그 활용성을 높이고자 하였다. 이를 위하여 스타일러스 반경 및 중심 정렬오차가 규명되었고, 3 차원 공간상의 측정 좌표에서 프로빙 오차에 대한 해석이 이루어졌다. 이러한 오차들을 보정하기 위한 알고리즘이 개발되었으며, 실제 CNC 공작기계 상에서 기준구 측정을 통한 검증이 이루어졌다.

Cuckoo Hashing을 이용한 RCC에 대한 성능향상 (Enhancing RCC(Recyclable Counter With Confinement) with Cuckoo Hashing)

  • 장룡호;정창훈;김근영;양대헌;이경희
    • 한국통신학회논문지
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    • 제41권6호
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    • pp.663-671
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    • 2016
  • 인터넷 트래픽양의 급증에 따라 고속 라우터의 수요가 많아졌다. 트래픽 통계 또는 보안 등의 목적으로 라우터에서 패킷을 측정해야 하는데 고속 라우터의 특성상 메모리공간이 제한적이다. RCC는 적은 메모리로 트래픽을 정확하고 효율적으로 측정하는 방법을 제시했다. RCC에서는 트래픽을 측정하는데 큰 Flow를 추가적인 Quadratic Probing 기반 해시 테이블에 누적하는 방법 사용한다. 그런데 Quadratic Probing은 적은 메모리 또는 메모리 사용률이 많은 상황에서 연산량이 많으며, 특히 갱신 또는 실시간 조회가 자주 발생하는 시스템에서 오버헤드가 크다. 이 논문에서는 RCC의 특성을 분석하고 실험을 통해 Quadratic Probing의 문제점을 증명하며 갱신 또는 조회에 효율적인 Cuckoo Hashing을 사용하여 RCC의 성능을 개선한다. 실험 결과에 따르면 RCC에서 Cuckoo Hashing을 사용할 때 메모리 사용률이 높은 상황에서도 높은 정확도를 보여주었고, 효율적으로 트래픽을 측정할 수 있었다.

골탐침과 방사선학적 및 조직학적 계측의 상관관계 (The correlation of bone probing, radiographic and histometric measurements)

  • 황성준;김창성;이덕연;이용근;조규성;채중규;김종관;최성호
    • Journal of Periodontal and Implant Science
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    • 제33권4호
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    • pp.615-624
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    • 2003
  • The most accurate method to assess bone level is the histometric measurement. However it causes discomfort in patients and damage to the regenerated tissues. in the present study, we used 4 type regenerative therapies, The present study evaluated the clinical reliability and accuracy of bone probing measurements and radiographic bone level in the assessment of bone level by comparing those results with histometric confirmed bone level. Twentyfour(24) intrabony defects(4${\times}$4mm 1-wall intrabony defects) were surgically created in the mandibular second and fourth premolars of 6 beagle dogs. The control group underwent a conventional flap operation. Experimental group I was treated with calcium phosphate glass only, and while experimental group 2 was treated with GTR and experimental group 3 was treated with calcium phosphate glass and GTR. The subjects were sacrificed 8 weeks after the operation and a bone probing measurements, radiographic measurement and histometric measurement was performed. The correlation between bone probing measurements(BP) and histometric measurement(HL), and radiographic measurement(RL) and histometric measurement(HL) were analyzed with Spearman's rank correlation analysis and the statistical significance with respect to the type of regenerative therapies was analyzed with the Kruskal Wallis test. The coefficient of correlation to HL was 0.73 for RL and 0.90 for BP. The type of regenerative therapies had no significant effect on the difference between HL and other measurements. The results of this study suggests that bone probing measurements most closely represents actual bone level. So bone probing measurements may be a good clinical method for assessing the hone level following any type of periodontal regenerative therapies.

3 분력 힘 센서를 이용한 CMM 용 접촉식 프로브의 개발에 관한 연구 (A Study of Development for Contact CMM Probe using Three-Component Force Sensor)

  • 송광석;권기환;박재준;조남규
    • 한국정밀공학회지
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    • 제20권8호
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    • pp.101-107
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    • 2003
  • A new mechanical probe for 3-D feature measurement on coordinate measuring machines (CMMs) is presented. The probe is composed of the contact stylus and the three-component force sensor. With the stylus mounted on the force sensor, the probe can not only measure 3-D features, but also detect contact force acting on the stylus tip. Furthermore, the probing direction and the actual contact position can be determined by the relationship among three components of contact force to be detected. In this paper, transformation matrix representing the relationship between the external force acting on the stylus tip and the output voltages of measurement gauges is derived and calibrated. The prototype of probe is developed and its availability is investigated through the experimental setup for calibration test of the probe. A series of experimental results show that the proposed probe can be an effective means of improving the accuracy of touch probing on CMM.

성인형 치주염 환자에 있어 manual probe의 Florida probe의 임상적 비교 (Clinical Comparison Of Manual Probe With Florida Probe In Adult Periodontitis)

  • 유향미;정진형
    • Journal of Periodontal and Implant Science
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    • 제26권1호
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    • pp.244-254
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    • 1996
  • The periodontal probe is a commonly used instrument to assess periodontal conditions. And so, there has been many studies to develop the accuracy and reproducibility of the periodontal probe. The purpose of this study was to compare two different periodontal probes for measurement reliability and time required to use in subjects with moderate periodontitis. It was done after evaluating reproducibility of probing depth by stent guiding for a Manual probe and a Florida probe in subjects with healthy periodontal condition. The results were as follows 1. In experiment to evaluate the reproducibility of probing depth by stent guiding for a Manual probe and Florida probe in subjects with healthy periodontal condition, there was no major significant difference between intraprobe and interprobe relationships. 2. There were reduced probing measuremint error by using the Florida probe for posterior teeth and by using the Manual probe for anterior teeth of subjects with moderate periodontitis. 3. At proximal area, there was higher measurement error by using the Manual probe than the Florida probe. 4. The mean of pocket depth measurement using Manual probe was signifi cantly higher than that using Florida probe(p<0.05). With increasing pocket depth, interprobe difference increased and reproducibility reduced. 5. There was no significant difference in time required to use between Manual probe and Florida probe(p<0.05). 6. There was slight probing measurement difference between Manual probe and Florida probe at different site, but both probes have similar degrees of reproducibility and similar time required to probe.

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지표 및 지하 탐사를 위한 저항성 V 다이폴의 디자인과 성능에 대한 연구 (Design and Performance Evaluation of the Resistive V-Dipole for Surface and Subsurface Probing)

  • 김강욱
    • 한국지구물리탐사학회:학술대회논문집
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    • 한국지구물리탐사학회 2006년도 공동학술대회 논문집
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    • pp.281-284
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    • 2006
  • 저항성 V 다이폴(RVD)은 V 안테나의 각 암(arm)에 연속적인 Wu-King 저항 프로파일을 실은 것이다. RVD는 매우 짧은 펄스를 한 방향으로 복사할 수 있고, 복사된 펄스는 입력 펄스의 미분 등으로 간단하게 연관되는 등 지표 및 지하 탐사를 위해 매우 좋은 특성을 가지고 있다. 또한 레이더 단면적이 적어 지표와 안테나 사이의 다중 반사를 줄일 수 있다. 단점으로는 높은 입력저항과 제작의 어려움을 들 수 있다. 본 연구에서는 저주파에서의 성능과 제작상의 문제를 개선하면서도 저항성 V 다이폴의 특성을 유지하기 위한 방법을 제시한다. 제작된 V 다이폴을 이용하여 간단한 바이스태틱 레이더를 구성하고 지하 구조물에 대하여 스캔하여 이미지로 나타내었다.

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Soft Tissue Measurement Method Using Radiopaque Material on Cone-beam Computed Tomography: An Ex Vivo Validation Study

  • Lee, Hae-Seok;Yun, Jeong-Ho;Lee, Dong-Won
    • 대한구강악안면임플란트학회지
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    • 제22권4호
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    • pp.210-218
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    • 2018
  • Purpose: The purpose of this study was to investigate the validity and reproducibility of a method based on cone-beam computed tomography (CBCT) technology for the visualization and measurement of gingival soft-tissue dimensions. Material and Methods: A total of 66 selected points in soft-tissue of the ex vivo head of an adult pig were investigated in this study. For the measurement of radiographic thickness (RT), wet soft-tissue surfaces were lightly covered with barium sulfate powder using a powder spray. CBCT was taken and DICOM files were assessed for soft-tissue thickness measurement at reference points. A periodontal probe and a rubber stop were used for the measurement of trans-gingival probing thickness (TPT). After flap elevation, actual thickness of soft-tissue (actual thickness, AT) was measured. Correlation analysis and intraclass correlation coefficients analysis (ICC) were performed for AT, TPT, and RT. Results: All variables were distributed normally. Strong significant correlations of AT with RT and TPT values were found. The two ICC values between TPT vs. AT and RT vs. AT differed significantly. Conclusion: Our results indicated that correlation of RT was stronger than that of TPT with AT. We concluded that soft tissue measurement with CBCT could be a reliable method, compared to the trans-gingival probing measurement method.

곡면평활화를 고려한 공작기계상에서의 가공곡면 검사 (Machined Surface Inspection Based on Surface Fairing on the Machine Tool)

  • 이세복;김경돈;정성종
    • 대한기계학회논문집A
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    • 제24권4호
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    • pp.937-945
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    • 2000
  • The assessment of machined surface is difficult because the freeform surface must be evaluated by surface fairness as well as dimensional accuracy. In this study, the machined freeform surface is modeled by interpolating the data measured on the machine tool into the mathematical continuous surface, and then the surface model is improved with the parameterization to minimize surface fairness. The accuracy reliability of the measured data is confirmed through compensation of volumetric errors of the machine tool and of probing errors. Non-uniform B-spline surface interpolation method is adopted to guarantee the continuity of surface model. Surface fairness is evaluated with the consideration of normal curvature on the interpolated surface. The validity and usefulness of the proposed method is examined through computer simulation and experiment on the machine tool.