• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.68-68
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• 2009

최근 디스플레이 산업의 발달로 LCD 판넬의 수요가 급증함에 따라 검사장치 분야도 동반 성장하고 있다. LCD 검사를 위한 probe unit은 미세전기기계시스템 (MEMS) 공정을 이용하여 제작된다. 본 연구에서는 probe card의 미세 슬릿을 제작하기 위한 Si 깊은 식각 공정을 수행하였다. 공정에 사용된 장비는 STS 사의 D-RIE 시스템으로 식각가스로 $SF_6$, passivation용으로 $C_4F_8$ 가스를 각각 사용하였다. 식각용 마스크는 $30{\sim}50{\mu}m$의 선폭을 probe card의 패턴에 따라 제작되었으며, 분석은 SEM 측정을 이용하였다. 식각 공정 중 발생하는 scallop은 시료를 oxidation 시켜 $SiO_2$ 층을 형성한 후에 식각용액에 에칭하여 제거하였다. 제거전 scallop의 크기는 약 120 nm에서 제거후 약 $50{\mu}m$로 크게 개선됨을 SEM 사진으로 확인하였다.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.49-51
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• 2007

It is as result that study to apply mini magnet nerve curer in peripheral nervous system disease treatment. Design and embodied action power and Control Unit in cylinder form of magnet roof object firstly. Yielded service area about special quality of probe of roof object cylinder style and treatment area dimension and distance of treatment pulse secondly. Embody pulse forming course energy value by Probe's form by third, could embody treatment pulse by disease. Specially, through a special quality experiment, saved Damping pulse torn and treatment pulse form etc. variously. Lately, embodied this to aid a little in disease treatment that follow that there is no invasion that there is no stimulation by medicine development. Go amplitude treatment pulse (traditional magneto-therapy of greatly great that strong) does curative effect greatest at short time and becomes thought that demand is magnified greatly at the future in this research.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.433-433
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• 2010

A microplasma current switch (MPCS) for a device operated in a current mode like organic light-emitting diodes (OLEDs), which features matrix addressability and current switching, is presented as well as its architecture and operational principle. The MPCS utilizes the intrinsic memory and conductivity of plasmas to achieve matrix addressability and current switching. We have fabricated a $100\;mm\;{\times}\;100\;mm$ MPCS panel in which its cell pitch is $1080\;{\mu}m\;{\times}\;1080\;{\mu}m$. The matrix addressability and current switching were verified. In addition, the current-voltage (I-V) characteristic of the unit cell was measured when plasmas were ignited. In principle, the scheme of the MPCS is equivalent to that of a double Langmuir probe diagnosing plasma parameters except for their relative dimensions to a plasma volume. Accordingly, the I-V characteristic was analyzed by a double Langmuir probe theory, and the plasma density and electron temperature were estimated from the I-V curve using a collisional double Langmuir probe theory.

• Journal of Korea Society of Digital Industry and Information Management
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• v.5 no.3
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• pp.29-37
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• 2009

It is as result that study to apply mini magnet nerve curer in peripheral nervous system disease treatment. Simulator and embodied action power and Control Unit in cylinder form of magnet roof object firstly. Yielded service area about special quality of probe of loop object cylinder style and treatment area dimension and distance of treatment pulse secondly. Embody pulse forming course energy value by Probe's form by third, could embody treatment pulse by disease. Specially, through a special quality experiment, saved Damping pulse form and treatment digital forming etc. variously. Lately, embodied this to aid a little in disease treatment that follow that there is no invasion that there is no stimulation by medicine development. Neuralgia, muscular disease and Altzheimer, with stroke etc. is becoming the matter of concern and interest which disease of adult etc. it is same is important. And the melancholia in compliance with the modern direction of a ceremony which is complicated and garrulous, trillion it will cry and symptoms, it is a tendency where the emotional obstacle etc. nervous psychiatric disorder patient is increasing at class speed. But currently the applicator it will be able to treat like this disease almost it is a condition which is wholly lacking. Consequently like this disease it used magnetic stimulation and it diagnosed and the equipment it will be able to treat plan and it embodied.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

• Journal of Power Electronics
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• v.8 no.2
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• pp.121-130
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• 2008

This paper introduces a design and implementation of a digital control unit for an Oxygenaire Servo Baby Incubator. The control unit is designed and implemented according to international standards. The control unit is based on an AVR Atmel microcontroller unit. It is built for monitoring and control and displays the three main temperature values: set point temperature, baby skin temperature and air temperature. User friendly software is implemented. The implemented control unit was tested in the laboratory as well as in the field. The control unit is sensitive to change of $0.1^{\circ}C$. At startup, based on a unique control strategy, the incubator reaches its steady state in about 14 minutes. The system schematic diagrams are shown in the paper. Also, programs flow charts are presented. The control unit was designed and implemented based on a contract between the Electronics Research Institute (ERI) and ENGIMED Company. The authors would like to thank ERI and ENGIMED for introducing all required finance and shoring to complete this work.

• Journal of the Korea Convergence Society
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• v.10 no.10
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• pp.75-80
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• 2019

During the medical ultrasound exercise at school, we randomly select parts of the ultrasound device and areas with the most contact in the abdominal phantom to detect bacteria that are above the probe and determine the number of pathogens. I want to find out. The experimental method was rubbed 20 times with the sterilized cotton swab for sterilization and then smeared on Lysogeny broth (LB) agar, put into the incubator and incubated for 48 hours, and the colony forming unit (CFU) count was measured. The bacterial distribution of probe handle and abdominal phantom was evaluated by evaluation. As a result, the CFU value is the lens was $3.0{\pm}0.87$, print button was $5.5{\pm}1.06$, freeze button was $8.0{\pm}4.95$, phantom was $20.0{\pm}2.78$, line was $23.5{\pm}2.50$, and probe handle was measured as $35.3{\pm}10.75$. In this study, it is expected that attention to infection control of equipment during practice during medical ultrasound practice can be highlighted and further contributed to the reduction of bacterial infection rate of ultrasound devices.

• Design & Manufacturing
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• v.14 no.2
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• pp.21-27
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• 2020

Recently, LCD (Liquid Crystal Display) has been replaced by OLDE (Organic Light Emitting Diode) in high resolution display industry. In the process of OLDE production, it inspects defective products by sending a signal using a probe during OLED panel inspection. At this time, the cause of the detection of failure is divided into two. One is the self-defect of the OLED panel and the other is the poor contact occurring in the process of contact between the two. The second case is unknown at the time of testing, which increases the time for retesting. To this end, we made a system that can identify in real time whether the probe is in contact during the inspection. A contact probe unit was designed for the system, and a stage system was implemented. An inspection system was constructed through S / W and circuit configuration for actual inspection. Finally, a system that can check contact and non-contact in real time was constructed.

• Proceedings of the KIEE Conference
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• 2007.04c
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• pp.153-155
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• 2007

It is as result that study to apply mini magnet nerve curer in peripheral nervous system disease treatment. Design and embodied action power and Control Unit in cylinder form of magnet roof object firstly. Yielded service area about special quality of probe of roof object cylinder style and treatment area dimension and distance of treatment pulse secondly. Embody pulse forming course energy value by Probe's form by third, could embody treatment pulse by disease. Specially, through a special quality experiment, saved Damping pulse form and treatment pulse form etc. variously Lately, embodied this to aid a little in disease treatment that follow that there is no invasion that there is no stimulation by medicine development Go amplitude treatment pulse (traditional magneto-therapy of greatly great that strong.) does curative effect greatest at short time and becomes thought that demand is magnified greatly at the future in this research.

• Journal of Mechanical Science and Technology
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• v.15 no.12
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• pp.1728-1738
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• 2001

Measurements have been made in an automotive HVAC b1ower for two different centrifugal fans. This work is directed at improving the performance of a conventional forward-curved centrifugal fan for a given small blower casing. Mean velocities and pressure have been measured using a miniature five-hole probe and a pressure scanning unit connected to an online data acquisition system. First, we obtained the fan performance versus flow rates showing a significant attenuation of unstable nature achieved with the new fan rotor in the surging operation range. Second, aerodynamic characterizations were carried out by investigating the velocity and pressure fields in the casing flow passage for different fan operating conditions. The measurements stowed that performance coefficients are strongly influenced by flow characteristics at the throat region. The main flow features ware common in both fans, but improved performance is achieved with tole new fan rotor, particularly in lower flow rate legions. Based on the measured results, design improvements were carried out in an acceptable operation range, which gave considerable insight into what features of flow behavior ware most important.